JPH0351770Y2 - - Google Patents
Info
- Publication number
- JPH0351770Y2 JPH0351770Y2 JP16865486U JP16865486U JPH0351770Y2 JP H0351770 Y2 JPH0351770 Y2 JP H0351770Y2 JP 16865486 U JP16865486 U JP 16865486U JP 16865486 U JP16865486 U JP 16865486U JP H0351770 Y2 JPH0351770 Y2 JP H0351770Y2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- coil pattern
- conductive coil
- insulating layer
- ferromagnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 31
- 230000005291 magnetic effect Effects 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 12
- 230000005294 ferromagnetic effect Effects 0.000 claims description 11
- 239000003302 ferromagnetic material Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 description 10
- 229910004298 SiO 2 Inorganic materials 0.000 description 9
- 238000005530 etching Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910000859 α-Fe Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16865486U JPH0351770Y2 (US20100223739A1-20100909-C00025.png) | 1986-10-31 | 1986-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16865486U JPH0351770Y2 (US20100223739A1-20100909-C00025.png) | 1986-10-31 | 1986-10-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6374707U JPS6374707U (US20100223739A1-20100909-C00025.png) | 1988-05-18 |
| JPH0351770Y2 true JPH0351770Y2 (US20100223739A1-20100909-C00025.png) | 1991-11-07 |
Family
ID=31101728
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16865486U Expired JPH0351770Y2 (US20100223739A1-20100909-C00025.png) | 1986-10-31 | 1986-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0351770Y2 (US20100223739A1-20100909-C00025.png) |
-
1986
- 1986-10-31 JP JP16865486U patent/JPH0351770Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6374707U (US20100223739A1-20100909-C00025.png) | 1988-05-18 |
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