JPH0351309Y2 - - Google Patents
Info
- Publication number
- JPH0351309Y2 JPH0351309Y2 JP1984119241U JP11924184U JPH0351309Y2 JP H0351309 Y2 JPH0351309 Y2 JP H0351309Y2 JP 1984119241 U JP1984119241 U JP 1984119241U JP 11924184 U JP11924184 U JP 11924184U JP H0351309 Y2 JPH0351309 Y2 JP H0351309Y2
- Authority
- JP
- Japan
- Prior art keywords
- liquefied nitrogen
- evaporator
- nitrogen evaporator
- liquefied
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 200
- 229910052757 nitrogen Inorganic materials 0.000 claims description 93
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 17
- 239000001301 oxygen Substances 0.000 claims description 17
- 229910052760 oxygen Inorganic materials 0.000 claims description 17
- 238000001179 sorption measurement Methods 0.000 claims description 16
- 239000007788 liquid Substances 0.000 claims description 6
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 5
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 14
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 11
- 229910021536 Zeolite Inorganic materials 0.000 description 10
- 239000010457 zeolite Substances 0.000 description 10
- 238000000746 purification Methods 0.000 description 7
- 239000003463 adsorbent Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 239000003054 catalyst Substances 0.000 description 3
- 230000008016 vaporization Effects 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008929 regeneration Effects 0.000 description 2
- 238000011069 regeneration method Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000002808 molecular sieve Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Separation By Low-Temperature Treatments (AREA)
Description
【考案の詳細な説明】
〔技術分野〕
この考案は、不純酸素等の除去機能を備えた液
化窒素蒸発装置に関するものである。[Detailed Description of the Invention] [Technical Field] This invention relates to a liquefied nitrogen evaporator having a function of removing impure oxygen and the like.
電子工業では、極めて多量の窒素ガスが使用さ
れているが、部品の精度維持向上の観点から窒素
ガスの純度について厳しい基準が設けられてい
る。一般に、液化窒素中には、微量の酸素が混在
している。したがつて、これを液化窒素貯槽に溜
め、そこから蒸発器に送り込んで空気と熱交換さ
せて液化窒素を気化させ窒素ガスを得る場合、得
られた窒素ガス中には、酸素が3ppm前後含まれ
ている。しかしながら、電子工業においては、不
純酸素分が0.2ppm以下の高純度の窒素ガスが要
求されているため、蒸発器から得られる窒素ガス
をさらに精製装置を通して不純酸素を除去するこ
とが行われている。これを第１図に示す。第１図
において、１は液化窒素貯槽、２は蒸発器、３は
精製装置である。この精製装置３には、Pt触
媒を使用し窒素ガス中に微量の水素を添加して不
純酸素と200℃程度の温度雰囲気中で反応させ、
不純酸素を水として除去する方法およびNi触
媒を使用し窒素ガス中の不純酸素を200℃程度の
温度雰囲気においてNi触媒と接触させ、Ni＋
１／202→NiOの反応を起こさせて除去する２と
おりの装置がある。しかしながら、前記の装置
では水素の添加量の調整に精度が要求され、不純
酸素量と丁度反応するだけの量の水素を添加しな
いと酸素が残存したり、また添加した水素が残存
して不純分となつてしまうため、作業に熟練を要
するという問題がある。また、前記の装置では
不純酸素との反応で生じたNiOの再生（NiO＋
H2→Ni＋H2O）をする必要が生じ、不純酸素除
去系と再生系の二つの反応塔を用意し、切替え使
用をしなければならないという不都合がある。ま
た、上記，による装置は、いずれも大がかり
となり、したがつて、液化窒素蒸発系全体として
は、大形化するという難点がある。
In the electronics industry, extremely large amounts of nitrogen gas are used, and strict standards have been established for the purity of nitrogen gas from the perspective of maintaining and improving the precision of parts. Generally, liquefied nitrogen contains a trace amount of oxygen. Therefore, when liquefied nitrogen is stored in a liquefied nitrogen storage tank and sent from there to an evaporator to exchange heat with air to vaporize the liquefied nitrogen and obtain nitrogen gas, the resulting nitrogen gas contains around 3 ppm of oxygen. It is. However, in the electronics industry, highly pure nitrogen gas with an impure oxygen content of 0.2 ppm or less is required, so the nitrogen gas obtained from the evaporator is further passed through a purification device to remove impure oxygen. . This is shown in FIG. In FIG. 1, 1 is a liquefied nitrogen storage tank, 2 is an evaporator, and 3 is a purification device. This purification device 3 uses a Pt catalyst to add a small amount of hydrogen to nitrogen gas and react with impure oxygen in an atmosphere at a temperature of about 200°C.
Using a method of removing impure oxygen as water and using a Ni catalyst, impure oxygen in nitrogen gas is brought into contact with the Ni catalyst in an atmosphere at a temperature of about 200°C, and Ni+
1/20 2 → There are two types of devices that remove NiO by causing a reaction. However, the above equipment requires precision in adjusting the amount of hydrogen added, and if the amount of hydrogen that is not added is just enough to react with the amount of impure oxygen, oxygen may remain, or the added hydrogen may remain and cause impurities. Therefore, there is a problem in that the work requires skill. In addition, in the above-mentioned device, the regeneration of NiO produced by the reaction with impure oxygen (NiO +
H 2 →Ni+H 2 O), and there is an inconvenience that two reaction towers, an impure oxygen removal system and a regeneration system, must be prepared and used alternately. Furthermore, the above-mentioned apparatuses are all large-scale, and therefore have the disadvantage that the liquefied nitrogen evaporation system as a whole becomes large.
この考案は、液化窒素蒸発系全体の小形化およ
び煩雑な操作の不要化をその目的とするものであ
る。
The purpose of this invention is to downsize the entire liquefied nitrogen evaporation system and eliminate the need for complicated operations.
上記の目的を達成するため、この考案の液化窒
素蒸発装置は、液化窒素蒸発器の熱交換パイプの
流路において、そこを流通する流体は少なくとも
一部が液体である流路の部分を吸着部に形成し、
この吸着部に、超低温時において酸素および一酸
化炭素に対する選択吸着能を発揮する吸着剤を充
填し、この吸着部付きの液化窒素蒸発器の複数個
を、遮断弁付き流入路を介して液化窒素源に接続
し、各液化窒素蒸発器の液化窒素入口部には大気
への逃し弁付き放出路を設け、かつ各液化窒素蒸
発器の出口流路の相互間を、ある液化窒素蒸発器
の出口流路内の気化液化窒素の一部を他の液化窒
素蒸発器の出口部に導くようにした逆止弁付き接
続路を介して接続したという構成をとるものであ
る。
In order to achieve the above object, the liquefied nitrogen evaporator of this invention uses an adsorption section in the flow path of the heat exchange pipe of the liquefied nitrogen evaporator, in which the fluid flowing therethrough is at least partially liquid. formed into;
This adsorption section is filled with an adsorbent that exhibits selective adsorption ability for oxygen and carbon monoxide at extremely low temperatures, and multiple liquefied nitrogen evaporators equipped with this adsorption section are connected to liquefied nitrogen through an inlet passage with a shutoff valve. The liquefied nitrogen inlet of each liquefied nitrogen evaporator is connected to the liquefied nitrogen evaporator, and the liquefied nitrogen inlet of each liquefied nitrogen evaporator is provided with a discharge passageway with a relief valve to the atmosphere, and the outlet passage of each liquefied nitrogen evaporator is connected to the liquefied nitrogen evaporator outlet. The structure is such that a part of the vaporized liquefied nitrogen in the flow path is connected to the outlet of another liquefied nitrogen evaporator via a connection path equipped with a check valve.
つぎに、この考案を実施例にもとづいて説明す
る。 Next, this invention will be explained based on examples.
第２図はこの考案の一実施例の回路図である。
図において、１０は真空断熱二重槽よりなる液化
窒素貯槽、１３は第１の液化窒素蒸発器である。
第１の液化窒素蒸発器１３は、その入口部１４が
遮断弁１１付きの第１の流入路１２を介して液化
窒素貯槽１０に接続されている。また、第２の液
化窒素蒸発器１７も、その入口部１８が遮断弁１
５付きの第２の流入路１６を介して液化窒素貯槽
１０に接続されている。１９は第１の液化窒素蒸
発器１３の入口部１４から延びる第１の放出路
で、逃し弁１９ａを有している。２０は第２の液
化窒素蒸発器１７の入口部１８から延びる第２の
放出路で、逃し弁２０ａを有している。上記液化
窒素蒸発器１３，１７は、第３図および第４図に
示すように、液化窒素蒸発器１３，１７の熱交換
パイプ１３ａ，１７ａの一部が吸着部１３ｂ（１
７ｂ）に形成され、そこに３Å，４Åもしくは５
Åの細孔径をもつ合成ゼオライト（モレキユラー
シーブ３Ａ，４Ａ，５Ａ、ユニオンカーバイト社
製）が充填されている。なお、上記合成ゼオライ
トに代えて上記ユニオンカーバイト社製の合成ゼ
オライト１３Ｘを用いることも行われる。これら
の合成ゼオライトは、超低温（液化窒素の沸点
《−196℃》近傍およびそれより高温域《例えば−
150℃》）において酸素および一酸化炭素を選択吸
着する。（第５図参照）したがつて、熱交換パイ
プ１３ａ（１７ａ）の入口側から送り込まれた液
化窒素は、気化の過程において、不純酸素および
一酸化炭素を除去され高純度の状態となつて出口
側から取り出されるようになる。第３図および第
４図において、２２，２５は液化窒素蒸発器１
３，１７の出口部である。上記第１の液化窒素蒸
発器１３の出口部２２からは、第２図に示すよう
に第１の出口流路２１が延びており、その中間部
に遮断弁２３が設けられている。上記第２の液化
窒素蒸発器１７の出口部２５からも、第１の液化
窒素蒸発器１３の出口部２２と同様、第２の出口
流路２４が延びており、その中間部に遮断弁２６
が設けられている。これら第１および第２の出口
流路２１，２４は、液化窒素蒸発器と反対側の端
部が共通出口路２７に接続している。２９は一端
が共通出口路２７に接続し他端が第１の液化窒素
蒸発器１３の出口部２２に接続する第１の接続路
で、逆止弁２９ａを備えている。３０は一端が共
通出口路２７に接続し他端が第２の液化窒素蒸発
器１７の出口部２５に接続する第２の接続路で、
逆止弁３０ａを備えている。第１の流入路１２に
設けられた遮断弁１１と第１の出口流路２１に設
けられた遮断弁２３とは一組となつており、同調
して開成、閉成するようになつている。第２の流
入路１６に設けられた遮断弁１５と第２の出口流
路２４に設けられた遮断弁２６とも同様である。
そして、一組の遮断弁１１，２３が開成している
ときは他の組の遮断弁１５，２６が閉成するよう
に開閉制御され、液化窒素貯槽１０からの液化窒
素がいずれか一方の液化窒素蒸発器１３，１７の
みに送入されるようになつている。 FIG. 2 is a circuit diagram of an embodiment of this invention.
In the figure, 10 is a liquefied nitrogen storage tank consisting of a vacuum insulated double tank, and 13 is a first liquefied nitrogen evaporator.
The first liquefied nitrogen evaporator 13 has an inlet portion 14 connected to the liquefied nitrogen storage tank 10 via a first inflow path 12 with a shutoff valve 11 . Further, the second liquefied nitrogen evaporator 17 also has an inlet portion 18 connected to the cutoff valve 1.
It is connected to the liquefied nitrogen storage tank 10 via a second inflow path 16 with 5. 19 is a first discharge path extending from the inlet portion 14 of the first liquefied nitrogen evaporator 13, and has a relief valve 19a. 20 is a second discharge path extending from the inlet portion 18 of the second liquefied nitrogen evaporator 17, and has a relief valve 20a. As shown in FIGS. 3 and 4, in the liquefied nitrogen evaporators 13 and 17, a part of the heat exchange pipes 13a and 17a of the liquefied nitrogen evaporators 13 and 17 is connected to the adsorption section 13b (1
7b), where 3 Å, 4 Å or 5 Å
It is filled with synthetic zeolite (Molecular Sieve 3A, 4A, 5A, manufactured by Union Carbide Corporation) having a pore diameter of 1.5 Å. Note that the synthetic zeolite 13X manufactured by Union Carbide Co., Ltd. may be used in place of the synthetic zeolite. These synthetic zeolites can be used at ultra-low temperatures (near the boiling point of liquefied nitrogen (-196°C)) and higher temperatures (e.g. -
Selectively adsorbs oxygen and carbon monoxide at 150℃》). (Refer to Figure 5) Therefore, the liquefied nitrogen sent from the inlet side of the heat exchange pipe 13a (17a) has impure oxygen and carbon monoxide removed during the vaporization process, becomes highly pure, and then exits. It will be taken out from the side. In FIGS. 3 and 4, 22 and 25 are the liquefied nitrogen evaporator 1.
This is the exit section of No. 3 and 17. As shown in FIG. 2, a first outlet channel 21 extends from the outlet section 22 of the first liquefied nitrogen evaporator 13, and a cutoff valve 23 is provided in the middle thereof. Similarly to the outlet section 22 of the first liquefied nitrogen evaporator 13, a second outlet channel 24 extends from the outlet section 25 of the second liquefied nitrogen evaporator 17, and a cutoff valve 26 is provided in the middle thereof.
is provided. The ends of the first and second outlet channels 21 and 24 on the opposite side from the liquefied nitrogen evaporator are connected to a common outlet channel 27. Reference numeral 29 denotes a first connecting path whose one end is connected to the common outlet path 27 and the other end is connected to the outlet section 22 of the first liquefied nitrogen evaporator 13, and is equipped with a check valve 29a. Reference numeral 30 denotes a second connecting path whose one end is connected to the common outlet path 27 and the other end is connected to the outlet section 25 of the second liquefied nitrogen evaporator 17;
A check valve 30a is provided. The shutoff valve 11 provided in the first inflow path 12 and the shutoff valve 23 provided in the first outlet flow path 21 form a pair, and are configured to open and close in synchronization. . The same applies to the cutoff valve 15 provided in the second inflow path 16 and the cutoff valve 26 provided in the second outlet flow path 24.
When one set of cutoff valves 11, 23 is open, the other set of cutoff valves 15, 26 are controlled to be closed, and the liquefied nitrogen from the liquefied nitrogen storage tank 10 is liquefied into either one. The nitrogen gas is supplied only to the nitrogen evaporators 13 and 17.
この構成において、液化窒素貯槽１０内の液化
窒素の蒸発は、例えば第２の液化窒素蒸発器１７
の系を閉じ、第１の液化窒素蒸発器１３の系を開
き、ここに液化窒素を送入し、熱交換パイプ１３
ａで大気と熱交換させて気化することにより行わ
れる。生成した気化液化窒素（窒素ガス）は、吸
着部１３ｂの合成ゼオライトの作用で精製され高
純度となり、共通出口路２７を経て取り出され
る。この場合、共通出口路２７に送り込まれた高
純度窒素ガスの一部は、第２の接続路３０を通つ
て第２の液化窒素蒸発器１７内に入り、そこを逆
向きに流れ、熱交換パイプ１７ａにおける吸着部
１７ｂに到達して合成ゼオライトを再生し第２の
放出路２０から大気中に放出される。このように
して液化窒素の気化を暫く続けたのち、第１の液
化窒素蒸発器１３の合成ゼオライトの吸着能が低
下する前に、遮断弁１２，２３を閉じて第１の液
化窒素蒸発器１３の系を閉成し、同時に第２の液
化窒素蒸発器１７の系を開成し、今度は第２の液
化窒素蒸発器１７の系で液化窒素の気化精製を行
う。そして、得られた高純度窒素ガスの一部を、
今度は第１の液化窒素蒸発器１３の吸着部１３ｂ
に送り込んで合成ゼオライトの再生をする。この
ように、第１および第２の液化窒素蒸発器１３，
１７を交互に使用し、それらの吸着部１３ｂ，１
７ｂの合成ゼオライトの吸着、再生を交互に行う
ことにより、常時高純度の窒素ガスが得られるの
である。 In this configuration, the liquefied nitrogen in the liquefied nitrogen storage tank 10 is evaporated, for example, by the second liquefied nitrogen evaporator 17.
system is closed, the system of the first liquefied nitrogen evaporator 13 is opened, liquefied nitrogen is fed there, and the heat exchange pipe 13 is
This is done by exchanging heat with the atmosphere and vaporizing it. The generated vaporized liquefied nitrogen (nitrogen gas) is purified to high purity by the action of the synthetic zeolite in the adsorption section 13b, and is taken out through the common outlet path 27. In this case, a part of the high-purity nitrogen gas fed into the common outlet path 27 enters the second liquefied nitrogen evaporator 17 through the second connection path 30, flows therein in the opposite direction, and undergoes heat exchange. The synthetic zeolite reaches the adsorption section 17b in the pipe 17a, regenerates the synthetic zeolite, and is released into the atmosphere from the second release path 20. After continuing to vaporize the liquefied nitrogen for a while in this way, before the adsorption capacity of the synthetic zeolite in the first liquefied nitrogen evaporator 13 decreases, the shutoff valves 12 and 23 are closed and the first liquefied nitrogen evaporator 13 The second liquefied nitrogen evaporator 17 system is simultaneously opened, and liquefied nitrogen is vaporized and purified in the second liquefied nitrogen evaporator 17 system. Then, some of the obtained high-purity nitrogen gas is
This time, the adsorption section 13b of the first liquefied nitrogen evaporator 13
to regenerate synthetic zeolite. In this way, the first and second liquefied nitrogen evaporators 13,
17 are used alternately, and their suction parts 13b, 1
By alternately adsorbing and regenerating the synthetic zeolite in 7b, highly pure nitrogen gas can be obtained at all times.
第６図は他の実施例の回路図である。この実施
例は、入口流路および出口流路をそれぞれの液化
窒素蒸発器の流路として完全に独立させている。
それ以外は前記の実施例と同じであるから、説明
の繰り返しを省略する。 FIG. 6 is a circuit diagram of another embodiment. This embodiment provides completely independent inlet and outlet channels for each liquefied nitrogen evaporator.
Since the rest is the same as the previous embodiment, repeated explanation will be omitted.
なお、上記の実施例は、いづれも液化窒素蒸発
器を２個使用しているが、３個以上使用するよう
にしてもよい。 Incidentally, in each of the above embodiments, two liquefied nitrogen evaporators are used, but three or more may be used.
この考案の液化窒素蒸発装置は、熱交換パイプ
の流路において、そこを流通する流体は少なくと
も一部が液体である流路の部分が吸着部に形成さ
れていてこの吸着部に酸素および一酸化炭素を選
択吸着する吸着剤が充填されているため、精製対
象の液化窒素が液体で吸着剤に接触するようにな
り効率よく精製を行うことができると同時に、精
製済の液化窒素の気化も行うことができる。すな
わち、この液化窒素蒸発装置は、精製機構を内蔵
しているといえるものであり、したがつて、従来
の精製装置が不要になり、系全体の小形化を達成
できるようになる。また、これまでのように精製
のために、水素の添加量を調整したりする等の煩
雑な操作が不要になるという効果も得られるよう
になる。そのうえ、この液化窒素蒸発装置は、各
液化窒素蒸発器の出口流路の相互間を、ある液化
窒素蒸発器の出口流路内の気化液化窒素の一部を
他の液化窒素発生器の出口部に導くようにした逆
止弁付き接続路を介して接続しているため、ある
液化窒素蒸発器を通つて気化され高純度化された
液化窒素（この段階では窒素ガスとなつている）
の一部が、他の液化窒素発生器の出口部から内部
に入り内蔵吸着剤を再生したのち入口部の弁付き
放出路から大気中へ放出される。すなわち、この
液化窒素蒸発装置は、複数個の液化窒素蒸発器の
うちの任意の一個を使用して液化窒素の蒸発精製
を行うと同時に、その蒸発器によつて得られた高
純度窒素ガスの一部を他の液化窒素蒸発器内に送
入して吸着剤の再生を自動的に行うため、いちい
ち装置を止めて吸着剤の再生を行うというような
手間が全く不要になるのである。
In the liquefied nitrogen evaporator of this invention, in the flow path of the heat exchange pipe, a portion of the flow path in which at least a portion of the fluid flowing through the flow path is liquid is formed in an adsorption part, and this adsorption part contains oxygen and monoxide. Because it is filled with an adsorbent that selectively adsorbs carbon, the liquefied nitrogen to be purified comes into contact with the adsorbent in liquid form, allowing for efficient purification, while also vaporizing the purified liquefied nitrogen. be able to. In other words, this liquefied nitrogen evaporator can be said to have a built-in purification mechanism, so that the conventional purification device is not required and the entire system can be downsized. Furthermore, the effect of eliminating the need for complicated operations such as adjusting the amount of hydrogen added for purification as in the past is also achieved. Moreover, this liquefied nitrogen evaporator is configured to transfer a portion of the vaporized liquefied nitrogen in the outlet flow path of one liquefied nitrogen evaporator to the outlet of another liquefied nitrogen generator between the outlet flow paths of each liquefied nitrogen evaporator. Since the connection is made through a connecting path with a check valve, the liquefied nitrogen is vaporized and highly purified through a liquefied nitrogen evaporator (at this stage it is nitrogen gas).
A part of the liquefied nitrogen generator enters the interior from the outlet of another liquefied nitrogen generator, regenerates the built-in adsorbent, and is then released into the atmosphere from the valved discharge passage at the inlet. In other words, this liquefied nitrogen evaporator uses any one of a plurality of liquefied nitrogen evaporators to evaporate and purify liquefied nitrogen, and at the same time evaporates and purifies liquefied nitrogen using the evaporator. Since a portion of the liquefied nitrogen evaporator is fed into another liquefied nitrogen evaporator to automatically regenerate the adsorbent, there is no need to stop the equipment each time to regenerate the adsorbent.
第１図は従来例の説明図、第２図はこの考案の
一実施例の回路図、第３図はその液化窒素蒸発器
の側面図、第４図は第３図においてフレームを除
去した状態の平面図、第５図は合成ゼオライトの
吸着特性曲線図、第６図は他の実施例の回路図で
ある。
１０……液化窒素貯槽、１１，１５，２３，２
６……遮断弁、１２，１６……流入路、１３，１
７……液化窒素蒸発器、１３ａ，１７ａ……熱交
換パイプ、１３ｂ，１７ｂ……吸着部、１９，２
０……放出路、１９ａ，２０ａ……逃し弁、２
１，２４……出口流路、２９，３０……接続路、
２９ａ，３０ａ……逆止弁。
Fig. 1 is an explanatory diagram of a conventional example, Fig. 2 is a circuit diagram of an embodiment of this invention, Fig. 3 is a side view of the liquefied nitrogen evaporator, and Fig. 4 is a state in which the frame is removed from Fig. 3. FIG. 5 is a diagram of the adsorption characteristic curve of the synthetic zeolite, and FIG. 6 is a circuit diagram of another embodiment. 10...Liquid nitrogen storage tank, 11, 15, 23, 2
6...Shutoff valve, 12,16...Inflow path, 13,1
7...Liquid nitrogen evaporator, 13a, 17a...Heat exchange pipe, 13b, 17b...Adsorption section, 19,2
0...Discharge path, 19a, 20a...Relief valve, 2
1, 24... Outlet channel, 29, 30... Connection channel,
29a, 30a...Check valve.
Claims (1)
て、そこを流通する流体は少なくとも一部が液体
である流路の部分を吸着部に形成し、この吸着部
に、超低温時において酸素および一酸化炭素に対
する選択吸着能を発揮する吸着剤を充填し、この
吸着部付きの液化窒素蒸発器の複数個を、遮断弁
付き流入路を介して液化窒素源に接続し、各液化
窒素蒸発器の液化窒素入口部には大気への逃し弁
付き放出路を設け、かつ各液化窒素蒸発器の出口
流路の相互間を、ある液化窒素蒸発器の出口流路
内の気化液化窒素の一部を他の液化窒素蒸発器の
出口部に導くようにした逆止弁付き接続路を介し
て接続したことを特徴とする液化窒素蒸発装置。 In the flow path of the heat exchange pipe of the liquefied nitrogen evaporator, the fluid flowing through it forms an adsorption section in which at least a portion of the flow path is liquid, and this adsorption section absorbs oxygen and carbon monoxide at extremely low temperatures. A plurality of liquefied nitrogen evaporators equipped with adsorption units are connected to a liquefied nitrogen source via an inlet passage with a shutoff valve, and the liquefied nitrogen of each liquefied nitrogen evaporator is A discharge passage with a relief valve to the atmosphere is provided at the inlet, and a part of the vaporized liquefied nitrogen in the outlet passage of one liquefied nitrogen evaporator is transferred between the outlet passages of each liquefied nitrogen evaporator. A liquefied nitrogen evaporator characterized in that the liquefied nitrogen evaporator is connected to an outlet portion of the liquefied nitrogen evaporator via a connecting path with a check valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11924184U JPS6133837U (en) | 1984-07-31 | 1984-07-31 | liquefied nitrogen evaporator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11924184U JPS6133837U (en) | 1984-07-31 | 1984-07-31 | liquefied nitrogen evaporator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6133837U JPS6133837U (en) | 1986-03-01 |
| JPH0351309Y2 true JPH0351309Y2 (en) | 1991-11-01 |
Family
ID=30678122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11924184U Granted JPS6133837U (en) | 1984-07-31 | 1984-07-31 | liquefied nitrogen evaporator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6133837U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5217479U (en) * | 1975-07-25 | 1977-02-07 |
-
1984
- 1984-07-31 JP JP11924184U patent/JPS6133837U/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5217479U (en) * | 1975-07-25 | 1977-02-07 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6133837U (en) | 1986-03-01 |
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