JPH03504768A - 特に可動な構成要素の距離及至シフト運動を測定するための干渉計システム - Google Patents

特に可動な構成要素の距離及至シフト運動を測定するための干渉計システム

Info

Publication number
JPH03504768A
JPH03504768A JP50454490A JP50454490A JPH03504768A JP H03504768 A JPH03504768 A JP H03504768A JP 50454490 A JP50454490 A JP 50454490A JP 50454490 A JP50454490 A JP 50454490A JP H03504768 A JPH03504768 A JP H03504768A
Authority
JP
Japan
Prior art keywords
interferometer system
lens
tune
measurement
interferometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50454490A
Other languages
English (en)
Japanese (ja)
Inventor
ロイクス，ゲルハルト
ラツェクキ，レーネ
Original Assignee
ドクター・ヨハネス・ハイデンハイン・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ドクター・ヨハネス・ハイデンハイン・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング filed Critical ドクター・ヨハネス・ハイデンハイン・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング
Publication of JPH03504768A publication Critical patent/JPH03504768A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02051—Integrated design, e.g. on-chip or monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP50454490A 1989-03-21 1990-03-15 特に可動な構成要素の距離及至シフト運動を測定するための干渉計システム Pending JPH03504768A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT65289A AT392537B (de) 1989-03-21 1989-03-21 Interferometeranordnung, insbesondere zur entfernungs- bzw. verschiebewegbestimmung eines beweglichen bauteiles
AT652/89 1989-03-21

Publications (1)

Publication Number Publication Date
JPH03504768A true JPH03504768A (ja) 1991-10-17

Family

ID=3496240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50454490A Pending JPH03504768A (ja) 1989-03-21 1990-03-15 特に可動な構成要素の距離及至シフト運動を測定するための干渉計システム

Country Status (4)

Country Link
EP (1) EP0422143A1 (de)
JP (1) JPH03504768A (de)
AT (1) AT392537B (de)
WO (1) WO1990011484A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015230259A (ja) * 2014-06-05 2015-12-21 日本電信電話株式会社 距離計測装置

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5617207A (en) * 1990-04-23 1997-04-01 Commonwealth Scientific And Industrial Research Organisation Appartatus and method for measuring a change in an energy path length
ATE132252T1 (de) * 1990-08-31 1996-01-15 Commw Scient Ind Res Org Interferenzmikroskop
FR2676808B1 (fr) * 1991-05-21 1993-08-13 Commissariat Energie Atomique Dispositif de mesure d'une caracteristique d'un objet en optique integree, par interferometrie.
US5291267A (en) * 1992-01-22 1994-03-01 Hewlett-Packard Company Optical low-coherence reflectometry using optical amplification
FR2696546B1 (fr) * 1992-10-06 1994-12-30 Suisse Electronique Microtech Interféromètre comprenant un ensemble intégré et un miroir séparés l'un de l'autre par une région de mesure.
FR2696545B1 (fr) * 1992-10-06 1994-12-30 Suisse Electronique Microtech Interféromètre comprenant un ensemble intégré et une unité réfléchissante séparés l'un de l'autre par une région de mesure.
FR2699269B1 (fr) * 1992-12-10 1995-01-13 Merlin Gerin Dispositif de mesure interferrométrique.
DE102011005937B4 (de) * 2011-03-23 2020-10-22 Dr. Johannes Heidenhain Gmbh Vorrichtung zur interferentiellen Abstandsmessung
DE102013209833A1 (de) * 2013-05-27 2014-11-27 Polytec Gmbh Optisches Interferometer und Vibrometer mit solch einem optischen Interferometer
EP3415874A1 (de) * 2017-06-14 2018-12-19 IMEC vzw Sensorvorrichtung, messsystem und verfahren zur erkennung eines externen einflusses
EP3415887B1 (de) 2017-06-14 2020-03-18 IMEC vzw Kraftmessvorrichtung und kraftmesssystem
US20230046152A1 (en) * 2019-12-11 2023-02-16 Rockley Photonics Limited Frequency shifter for heterodyne interferometry measurements and device for heterodyne interferometry measurements having such a frequency shifter

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6412204A (en) * 1987-07-07 1989-01-17 Topcon Corp Optical ic interferometer

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4609290A (en) * 1983-06-06 1986-09-02 Mcdonnell Douglas Corporation Passive homodyne demodulator and sensor system
US4522495A (en) * 1983-06-13 1985-06-11 The United States Of America As Represented By The Secretary Of The Navy Optical sensing devices
SE447601B (sv) * 1985-04-04 1986-11-24 Ericsson Telefon Ab L M Fiberoptisk interferometer
GB2182223A (en) * 1985-10-23 1987-05-07 Stc Plc Optical fibre reflectometer
DE3616393C1 (en) * 1986-05-15 1987-07-02 Daimler Benz Ag Two-frequency laser interferometer
DE3918812A1 (de) * 1988-06-13 1989-12-28 Kerner Anna Entfernungsmessendes heterodynes interferometer
CH678109A5 (de) * 1988-06-13 1991-07-31 Althis Ag

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6412204A (en) * 1987-07-07 1989-01-17 Topcon Corp Optical ic interferometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015230259A (ja) * 2014-06-05 2015-12-21 日本電信電話株式会社 距離計測装置

Also Published As

Publication number Publication date
AT392537B (de) 1991-04-25
ATA65289A (de) 1990-09-15
EP0422143A1 (de) 1991-04-17
WO1990011484A1 (de) 1990-10-04

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