JPH0348525Y2 - - Google Patents
Info
- Publication number
- JPH0348525Y2 JPH0348525Y2 JP8336685U JP8336685U JPH0348525Y2 JP H0348525 Y2 JPH0348525 Y2 JP H0348525Y2 JP 8336685 U JP8336685 U JP 8336685U JP 8336685 U JP8336685 U JP 8336685U JP H0348525 Y2 JPH0348525 Y2 JP H0348525Y2
- Authority
- JP
- Japan
- Prior art keywords
- screen
- light
- inspected
- defect inspection
- line sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007547 defect Effects 0.000 claims description 30
- 238000007689 inspection Methods 0.000 claims description 25
- 238000002834 transmittance Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 238000009826 distribution Methods 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 6
- 239000005337 ground glass Substances 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 3
- 230000000295 complement effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8336685U JPH0348525Y2 (US07709020-20100504-C00041.png) | 1985-06-04 | 1985-06-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8336685U JPH0348525Y2 (US07709020-20100504-C00041.png) | 1985-06-04 | 1985-06-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61199661U JPS61199661U (US07709020-20100504-C00041.png) | 1986-12-13 |
| JPH0348525Y2 true JPH0348525Y2 (US07709020-20100504-C00041.png) | 1991-10-16 |
Family
ID=30631932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8336685U Expired JPH0348525Y2 (US07709020-20100504-C00041.png) | 1985-06-04 | 1985-06-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0348525Y2 (US07709020-20100504-C00041.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6759869B2 (ja) * | 2016-08-31 | 2020-09-23 | 株式会社リコー | 検査装置 |
-
1985
- 1985-06-04 JP JP8336685U patent/JPH0348525Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61199661U (US07709020-20100504-C00041.png) | 1986-12-13 |
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