JPH0347752U - - Google Patents
Info
- Publication number
- JPH0347752U JPH0347752U JP10887089U JP10887089U JPH0347752U JP H0347752 U JPH0347752 U JP H0347752U JP 10887089 U JP10887089 U JP 10887089U JP 10887089 U JP10887089 U JP 10887089U JP H0347752 U JPH0347752 U JP H0347752U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- gear
- double
- sided polishing
- sun gear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 2
- 238000005498 polishing Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Description
第１図は本考案の第１実施例を示す要部断面図
、第２図は従来例の概略構成図である。
１……上定盤、２……下定盤、３……太陽歯車
、４……内歯歯車、５……キヤリヤ、６……ワー
ク、２３……液槽、２９……電源装置、３０……
絶縁物。
FIG. 1 is a sectional view of essential parts showing a first embodiment of the present invention, and FIG. 2 is a schematic configuration diagram of a conventional example. DESCRIPTION OF SYMBOLS 1...Upper surface plate, 2...Lower surface plate, 3...Sun gear, 4...Internal gear, 5...Carrier, 6...Workpiece, 23...Liquid tank, 29...Power supply device, 30... …
Insulator.
Claims (1)
星歯車状に駆動する太陽歯車及び内歯歯車と、キ
ヤリヤに保持されたワークを両側から挾んで研磨
する上下の定盤とを備えた両面研磨装置において
、 下定盤と内歯歯車及び太陽歯車との間を液密に
シールすることにより電解ドレツシング用クーラ
ント液を充填するための液槽を形成し、上下の定
盤を電源装置の一方の電極に接続すると共に、キ
ヤリヤを内歯歯車又は太陽歯車のうち少なくとも
一つを介して他方の電極に接続し、該キヤリヤと
下定盤との間に絶縁物を介在させたことを特徴と
する電解ドレツシング両面研磨装置。[Scope of claim for utility model registration] A carrier that holds a workpiece, a sun gear and an internal gear that drive the carrier like a planetary gear, and upper and lower surface plates that grip and polish the workpiece held by the carrier from both sides. In a double-sided polishing machine equipped with the The device is connected to one electrode of the device, and a carrier is connected to the other electrode via at least one of an internal gear or a sun gear, and an insulator is interposed between the carrier and the lower surface plate. Features: Electrolytic dressing double-sided polishing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10887089U JPH0347752U (en) | 1989-09-18 | 1989-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10887089U JPH0347752U (en) | 1989-09-18 | 1989-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0347752U true JPH0347752U (en) | 1991-05-07 |
Family
ID=31657486
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10887089U Pending JPH0347752U (en) | 1989-09-18 | 1989-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0347752U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006053965A (en) * | 2004-08-10 | 2006-02-23 | Fuji Electric Device Technology Co Ltd | Manufacturing method of substrate for magnetic recording medium, and both-surface polisher and carrier for substrate polishing used in the method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01188266A (en) * | 1988-01-22 | 1989-07-27 | Rikagaku Kenkyusho | Electrolytic dressing for electric conductive grindstone and device thereof |
-
1989
- 1989-09-18 JP JP10887089U patent/JPH0347752U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01188266A (en) * | 1988-01-22 | 1989-07-27 | Rikagaku Kenkyusho | Electrolytic dressing for electric conductive grindstone and device thereof |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006053965A (en) * | 2004-08-10 | 2006-02-23 | Fuji Electric Device Technology Co Ltd | Manufacturing method of substrate for magnetic recording medium, and both-surface polisher and carrier for substrate polishing used in the method |
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