JPH0347684B2 - - Google Patents

Info

Publication number
JPH0347684B2
JPH0347684B2 JP18782284A JP18782284A JPH0347684B2 JP H0347684 B2 JPH0347684 B2 JP H0347684B2 JP 18782284 A JP18782284 A JP 18782284A JP 18782284 A JP18782284 A JP 18782284A JP H0347684 B2 JPH0347684 B2 JP H0347684B2
Authority
JP
Japan
Prior art keywords
abnormality
voltage
analog detection
displacement
analog
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18782284A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6166113A (ja
Inventor
Makoto Nagai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP18782284A priority Critical patent/JPS6166113A/ja
Publication of JPS6166113A publication Critical patent/JPS6166113A/ja
Publication of JPH0347684B2 publication Critical patent/JPH0347684B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP18782284A 1984-09-07 1984-09-07 変位検出装置の異常検出方法及び回路 Granted JPS6166113A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18782284A JPS6166113A (ja) 1984-09-07 1984-09-07 変位検出装置の異常検出方法及び回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18782284A JPS6166113A (ja) 1984-09-07 1984-09-07 変位検出装置の異常検出方法及び回路

Publications (2)

Publication Number Publication Date
JPS6166113A JPS6166113A (ja) 1986-04-04
JPH0347684B2 true JPH0347684B2 (enrdf_load_stackoverflow) 1991-07-22

Family

ID=16212839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18782284A Granted JPS6166113A (ja) 1984-09-07 1984-09-07 変位検出装置の異常検出方法及び回路

Country Status (1)

Country Link
JP (1) JPS6166113A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9013681B2 (en) 2007-11-06 2015-04-21 Nikon Corporation Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method
US9256140B2 (en) 2007-11-07 2016-02-09 Nikon Corporation Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method with measurement device to measure movable body in Z direction
US8665455B2 (en) 2007-11-08 2014-03-04 Nikon Corporation Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method
US8422015B2 (en) 2007-11-09 2013-04-16 Nikon Corporation Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method
JP5641746B2 (ja) * 2010-02-12 2014-12-17 株式会社ミツトヨ 光電式エンコーダ
JP2013190327A (ja) * 2012-03-14 2013-09-26 Omron Corp ロータリーエンコーダの監視装置および監視方法

Also Published As

Publication number Publication date
JPS6166113A (ja) 1986-04-04

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees