JPH0347671U - - Google Patents
Info
- Publication number
- JPH0347671U JPH0347671U JP1989108222U JP10822289U JPH0347671U JP H0347671 U JPH0347671 U JP H0347671U JP 1989108222 U JP1989108222 U JP 1989108222U JP 10822289 U JP10822289 U JP 10822289U JP H0347671 U JPH0347671 U JP H0347671U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- laser beam
- workpiece
- focusing means
- oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009966 trimming Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Description
第1図は本考案の実施例によるレーザトリミン
グ装置の概略構成図、第2図は従来のレーザトリ
ミング装置の概略構成図である。
主要部分の符号の説明、1……レーザ発振器、
6……ビームエキスパンダ、8……ガルバノメー
タ、14……モータ。
FIG. 1 is a schematic diagram of a laser trimming device according to an embodiment of the present invention, and FIG. 2 is a schematic diagram of a conventional laser trimming device. Explanation of symbols of main parts, 1... Laser oscillator,
6...beam expander, 8...galvanometer, 14...motor.
Claims (1)
ザ発振器から射出されたレーザ光を被加工物に集
光させる集光手段と、前記集光手段によつて集光
された前記レーザ光の焦点位置を前記被加工物の
表面から深さ方向に移動制御する制御手段とを有
することを特徴とするレーザトリミング装置。 a laser oscillator that emits a laser beam; a focusing means that focuses the laser beam emitted from the laser oscillator on a workpiece; and a focal position of the laser beam that is focused by the focusing means. 1. A laser trimming device comprising a control means for controlling movement in a depth direction from the surface of a workpiece.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989108222U JPH0347671U (en) | 1989-09-14 | 1989-09-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989108222U JPH0347671U (en) | 1989-09-14 | 1989-09-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0347671U true JPH0347671U (en) | 1991-05-02 |
Family
ID=31656874
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989108222U Pending JPH0347671U (en) | 1989-09-14 | 1989-09-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0347671U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4705437B2 (en) * | 2005-08-31 | 2011-06-22 | 株式会社キーエンス | Laser processing apparatus and focal position indication method of laser processing apparatus |
JP2018159815A (en) * | 2017-03-23 | 2018-10-11 | ファナック株式会社 | Galvano scanner |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5284748A (en) * | 1976-01-05 | 1977-07-14 | Toshiba Corp | Device for finely adjusting position at which laser light is focused |
-
1989
- 1989-09-14 JP JP1989108222U patent/JPH0347671U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5284748A (en) * | 1976-01-05 | 1977-07-14 | Toshiba Corp | Device for finely adjusting position at which laser light is focused |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4705437B2 (en) * | 2005-08-31 | 2011-06-22 | 株式会社キーエンス | Laser processing apparatus and focal position indication method of laser processing apparatus |
JP2018159815A (en) * | 2017-03-23 | 2018-10-11 | ファナック株式会社 | Galvano scanner |
US10414001B2 (en) | 2017-03-23 | 2019-09-17 | Fanuc Corporation | Galvanometer scanner |
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