JPH0426684U - - Google Patents
Info
- Publication number
- JPH0426684U JPH0426684U JP1990065714U JP6571490U JPH0426684U JP H0426684 U JPH0426684 U JP H0426684U JP 1990065714 U JP1990065714 U JP 1990065714U JP 6571490 U JP6571490 U JP 6571490U JP H0426684 U JPH0426684 U JP H0426684U
- Authority
- JP
- Japan
- Prior art keywords
- stepping motor
- laser
- lens
- controller
- trimming device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009966 trimming Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Description
第１図は本考案のレーザトリミング装置の概略
構成図、第２図は混成集積回路の外観図、第３図
は従来のレーザトリミング装置の概略構成図であ
る。
１……レーザ装置、２おビームエキスパンダ、
３……ステツピングモータ、４……ビームポジシ
ヨナ、５……集光レンズ。
FIG. 1 is a schematic diagram of a laser trimming device according to the present invention, FIG. 2 is an external view of a hybrid integrated circuit, and FIG. 3 is a schematic diagram of a conventional laser trimming device. 1... Laser device, 2 Beam expander,
3... Stepping motor, 4... Beam positioner, 5... Condensing lens.
Claims (1)
元走査型ビームポジシヨナと、集光レンズと、光
軸を変換するダイクロイツクミラーにより構成さ
れるレーザトリミング装置において、ステツピン
グモータを駆動源として用い、一方のレンズを駆
動するように構成されたビームエキスパンダと、
ステツピングモータを制御する制御器とを具備し
、前記制御器より出力される、前記ステツピング
モータへの入力パルスにより前記集光レンズから
出射されるレーザ光の焦点面を移動するようにし
たことを特徴とするレーザトリミング装置。 In a laser trimming device consisting of a laser device, a two-dimensional scanning beam positioner using a galvanometer, a condensing lens, and a dichroic mirror that converts the optical axis, a stepping motor is used as the drive source, and one lens is a beam expander configured to drive;
a controller for controlling a stepping motor, and the focal plane of the laser beam emitted from the condenser lens is moved by an input pulse to the stepping motor output from the controller. A laser trimming device featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990065714U JPH0426684U (en) | 1990-06-21 | 1990-06-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990065714U JPH0426684U (en) | 1990-06-21 | 1990-06-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0426684U true JPH0426684U (en) | 1992-03-03 |
Family
ID=31597787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990065714U Pending JPH0426684U (en) | 1990-06-21 | 1990-06-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0426684U (en) |
-
1990
- 1990-06-21 JP JP1990065714U patent/JPH0426684U/ja active Pending