JPH0346544A - Automatic inspecting device for bandlike body - Google Patents

Abstract

PURPOSE:To improve the work efficiency by guiding selectively a visual observation inspecting means and an image pickup means to a detected part of a defect of a bandlike body (TAB tape), based on information from an inspecting means. CONSTITUTION:While a bandlike body 3 is fed out of a supply reel 1 and wound to a take-up reel 11, whether its defect exists or not is inspected at every prescribed area by an automatic inspecting part 31. In this case, a verification part 41 for bringing the bandlike body 3 to image pickup and sending an image pickup signal to an image display means, and a visual observation inspecting part 51 for bringing the same bandlike body 3 to visual observation are guided selectively to a detected part of the defect of the bandlike body 3 by a moving means, for instance, a rack base using an XY table, based on information of the inspecting part 31. Accordingly, a worker observes a video signal of a defect part sent from a verification part 41 at all times, through an image display means, and can execute the observation directly by switching to a microscope of the inspecting part 51 by the moving means in accordance with necessity.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an automatic strip inspection device, such as a TA
TA used for mounting integrated circuits (IC) using B method
The present invention relates to an automatic strip inspection device that is particularly suitable for use in a TAB tape inspection device that automatically inspects whether a B tape has defects such as damage or missing patterns.

[Conventional technology]

'rAB　(Tape Automated　B.

The nding method is known as one of the IC chip mounting techniques, and is widely used because of its high processing accuracy and ability to perform bulk bonding. The TAB tape (also called "film carrier tape") used in this TAB method is made of a film made of, for example, polygon, on which copper leads are formed for bonding ICs. Each frame is continuously wound around a reel like the frames of a movie film.

Before actually bonding an IC, this TAB tape must be inspected for defects such as damage or missing copper leads. TAB tape inspection devices that perform such inspections are known, such as TAB tape inspection devices that automatically inspect each frame using image recognition technology such as pattern matching (for example, TAB film carrier/lead inspection system). , MV-5100, manufactured by Toshi Co., Ltd.) However, the inspection results obtained by the above-mentioned device may not always be complete due to recognition accuracy issues, and the operator must actually observe the TAB tape to detect defects. For this reason, with normal TAB tape inspection equipment, a TV camera is installed after the automatic inspection unit to show the defective part on the TV monitor, or if there is a defect. A microscope is installed to magnify a certain area for direct visual observation by humans.

[Problem to be solved by the invention]

However, although television cameras have the advantage of being easy to view because they display images on a television monitor, the resolution may not be sufficient to discern small defects. On the other hand, although a microscope has a sufficient function to magnify a defective area, it has the problem that it is inferior to a television monitor in terms of ease of viewing because it requires placing the eye against the eyepiece for observation.

An object of the present invention is to provide an automatic strip inspection device that can solve the above problems.

[Means to solve the problem]

To achieve the above-mentioned object, the present invention provides a belt-shaped body in which the presence or absence of defects in the belt-shaped body is inspected for each predetermined region by an inspection means while the belt-shaped body is sent out from a supplying means and wound up by a winding means. The automatic inspection device includes: an imaging means that images the strip and sends an imaging signal to an image display means; a visual inspection means for visually observing the strip imaged by the imaging means; and a visual inspection means. and a guide means for selectively guiding the imaging means to a location on the strip where a flaw is detected based on information from the inspection means.

[Effect]

In the present invention, with the above configuration, the imaging means and the microscope are moved by the same moving means, for example, X
A stand using a Y table selectively guides the operator to the location where defects are detected on the TAB tape.
Normally, the video signal of the defective part sent from the imaging means is observed through an image display means, such as a television monitor, and if necessary, the same defective part is directly observed by switching from the imaging means to the microscope using the moving means. be able to.

〔Example〕

An embodiment of the present invention will be described below with reference to FIGS. 1 and 2. FIG. 2 is a basic configuration diagram of a TAB tape inspection device according to an embodiment of the present invention, and FIG. 1 is a schematic diagram of its verification section and visual inspection section. 1 and 2, this device includes a supply reel (supply means) 1 that supplies a TAB tape (band-shaped body) 3, and a TAB tape 3.
It has a take-up reel (winding means) 11 for winding up.

Further, between the supply reel 1 and the take-up reel 11, there is a position detection device fi21, an automatic inspection section (inspection means) 31, a verification section 41, and a visual inspection section (visual inspection means) 51.
, the puncher 61, splicer 81, etc. are attached to the TAB tape 3.
are provided in order from the supply side. Furthermore, it also has an operation section 71 for manually operating these devices.

The supply reel 1 on which the TAB tape 3 is being rotated has a T
An interleaver 5, which serves as a protective film to prevent damage caused by contact between the AB tapes, is also wound at the same time. The reel 7 is for winding the interleaver 5 separately from the TAB tape 3. On the other hand, the TAB that has been inspected
When winding tape 3 with take-up reel 11, reel 1
Another interleaver 15 is sent out from 7, and again TAB
It is wound together with the tape 3 onto a take-up reel 11.

The position detection device W21 includes two sets of detectors 23 and 25. Both of the detectors 23 and 25 emit light from light emitting means on the lower side of the TAB tape 3, and are provided at the edge of the TAB tape 3. The position of the TAB tape 3 is detected by receiving the light passing through the sprocket hole with the light receiving means on the upper side of the TAB tape 3. The detector 23 is used to know the position of the frame of the TAB tape 3 currently being inspected, and
It is used to detect the end of the B tape 3.

On the other hand, the detector 25 detects T
It is used to detect whether or not the AB tape 3 has stopped at a predetermined position in the automatic inspection section 31, and to correct the position if there is a deviation in the stopped position.

The automatic inspection section 3, which serves as the inspection means, is a section that uses image recognition technology to automatically inspect each frame for defects such as damage and pattern deviation. The obtained frame image is sent to the signal processing device 35, and the presence or absence of a defect is determined by performing pattern matching between this image and a reference image stored in advance.

The position of the defective frame on the TAB tape 3 is stored in a storage device (not shown) via the signal processing device 35. The offline dialog system 101 connected to the automatic inspection section 31 allows the automatic inspection section 31 to arbitrarily change the criteria for determining damage and the like. - There are various types of damage and dimensional deviations, and the criteria for determining defects differ depending on the accuracy required for the IC to be mounted. Therefore, by providing this offline dialogue system 101, it is possible to flexibly respond to the uses and required quality of the TAB tape 3.

The verification section 41 captures the defective parts inspected by the automatic inspection section 31 with a television camera 45 serving as an imaging means and displays them on a television monitor 47, and the visual inspection section 51 similarly detects defects. A certain part is magnified with an optical microscope 53 (for example, a stereomicroscope) so that it can be directly observed.These are parts that allow an operator to actually see and confirm the clothing flaws detected by the automatic inspection section 31. In addition, the automatic inspection section 31
To enable an operator to inspect the TAB tape 3 when the TAB tape 3 is out of order or cannot be used for some reason.

The moving means (guiding means) is a television camera 45 and a microscope 5.
3, an xy table 93 that movably supports the pedestal 91, and a switching unit (not shown) that switches the positions of the television camera 45 and the microscope 53 on the pedestal 91. . The position control unit 43 of the verification unit 41 also includes a control unit for the moving means, and upon receiving the position information of the TH defect portion detected by the signal processing word W35 of the automatic inspection unit 31, the position control unit 43 of the verification unit 41 is moved two-dimensionally on the XY table 93, and the objective lens of the television camera 45 or microscope 53 is aligned with the position of the flawed portion. Furthermore, the television camera 45 and the microscope 53 are configured to be switchable on the pedestal 91 by a switching unit in order to observe the same scratched portion on the TAB tape 3. For example, as shown in FIG. 3(a), with the television camera 45 aligned on the point
As shown in b), the objective lens of the microscope 53 is configured to automatically align with the X point.

Although not shown, the television camera 45 and the microscope 53 may be switched by rotating them by 90 degrees or 180 degrees. By providing the switching unit in the moving means in this way, it is possible to quickly switch between the television camera 45 and the microscope 53.

Generally, the video displayed on the television monitor 47 has the advantage of being easy to view, but the resolution may not be sufficient for small defects. On the other hand, the optical microscope 53 has the advantage of providing high resolution, although it is difficult to see because it requires placing your eye on the eyepiece. According to this embodiment, by switching between the television camera 45 and the microscope 53 using the input button 73 of the operation unit 71, the operator can inspect the same flawed part on the TAB tape 3 with either of them as necessary. It can be observed freely.

Since no IC is mounted on a frame in which a defect has been detected, the frame is essentially unnecessary.

However, unless a defect is detected over a large number of consecutive frames, frames with defects are not deleted and the IC
At the mounting stage, the frame is skipped and the IC is mounted.

When the puncher 61 receives information that a weir flaw has been detected from the signal processing device 35 of the automatic inspection section 31, it waits until the frame with the flaw is transferred to the position of the puncher 61, and then operates to remove the TAB tape. Drill a hole in 3. The diameter of the hole provided at this time is such that it can be easily recognized with the naked eye, for example, 5I11.

Furthermore, if the automatic inspection section 31 has a function of not only identifying the presence or absence of defects but also the type of defects, marking may be performed accordingly.

Instead of operating the puncher 61 under the control of the signal processing device 35 as described above, punching can also be stopped by the input button 73 of the operation unit 71. In this way, even if the automatic inspection section 31 determines that the part is defective, the operator can check it in the helification section 41 or the visual inspection section 51 and ultimately determine that it is possible to mount the IC. If so, it is possible to avoid drilling holes in the frame. In this case as well, multiple types of markings are possible depending on the type of scratch. Although the puncher 61 is used in this embodiment, other punches may be used as long as they can be recognized with the naked eye.For example, special characters or symbols may be attached to a defective frame.

The splicer 81 is a device that, when a large number of defects are detected across consecutive frames of the TAB tape 3, cuts out several consecutive frames and rejoins the front and back of the part. FIG. 4 is a schematic perspective view of this splicer 81. When a defect is continuously detected on the TAB tape 3 over a predetermined number of frames or more (for example, 10 frames or more), information about the defective frames is transmitted from the signal processing device 35 of the automatic inspection section 31 to the splicer. Sent to 81. Based on this information, the splicer 81 continuously cuts the flawed part using a special cutter 83, and cuts the end face of the front part 3a and the end face of the rear part 3b of this cut part as shown in FIG. They are butted together and spliced with splicing tape 85. Thereafter, by rotating and tilting the forming cutter 87 in the direction of arrow Y in FIG. 4, the portion of the splicing tape 83 protruding from the TAB tape 3 is canted, and at the same time, a sprocket hole is made in the splicing tape 83. In this way, it is possible to remove a predetermined number or more consecutive frames with MTK from the inspected TAB tape 3.

In the above embodiment, a case was explained in which the switching unit is provided in the moving means, but the moving means does not use a switching unit and switches between the television camera and the IJ microscope using a mount and an XY table. Good too.

Furthermore, although the above embodiments have been described using an inspection apparatus for TAB tape as an example, the present invention is not limited to the above embodiments, but can be widely applied to inspection apparatuses for general long articles.

〔Effect of the invention〕

As explained above, according to the present invention, a defective portion on a strip where a defect has been detected by the inspection means is observed by arbitrarily selecting either the image display means or the visual inspection means, whichever is suitable for observation. Therefore, it is possible to provide an automatic strip inspection device that can improve work efficiency. Further, according to the present invention, since the image display means and the visual inspection means are provided, even if one of them becomes unusable due to a failure or the like, the defective part can be inspected without stopping the inspection line. It is possible to provide an automatic strip inspection device that can observe the following.

[Brief explanation of drawings]

Fig. 1 is a schematic structural diagram of a verification section and a visual inspection section, Fig. 2 is a schematic structural diagram of an apparatus showing an embodiment of the present invention, and Fig. 3 shows a state in which a television camera and a microscope are switched. FIG. 4 is a perspective view schematically showing the splicer. 1... Supply reel, 3... TAB tape, 5.15
...Interleaver, 7.17..Reel, 11..Take-up reel, 21..
...Position detection device, 23, 25...Detector, 31...
・Automatic inspection section・ 41... Verification section, 51... Visual inspection section, 53... Microscope, 61...
Puncher, 71... operation unit, 81... splicer,
91... Frame, 93... XY table, 0 Offline dialogue system.

Claims (1)

[Scope of Claims] In an automatic strip inspection device for inspecting the presence or absence of defects in the strip in each predetermined area by inspection means while the strip is sent out from the supply means and wound up by the winding means, an imaging means for imaging a strip and sending an imaging signal to an image display means; a visual inspection means for visually observing the strip imaged by the imaging means; and the visual inspection means and the imaging means 1. An automatic inspection device for a strip, comprising a guide means for selectively guiding the guide to a location where a defect is detected on the strip based on information from the inspection means.