JP2017092430A - Anisotropic conductive sheet storage cartridge and integrated circuit test device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cartridge including an inversion preventing mechanism and a relaxation preventing mechanism and capable of being easily replaced and storing an anisotropic conductive sheet, and also to provide a test device including the cartridge and capable of winding the anisotropic conductive sheet and continuing a test using an unused portion of the anisotropic conductive sheet by moving the cartridge in a longitudinal direction of the anisotropic conductive sheet.SOLUTION: A cartridge 100 comprises an end detecting mechanism which detects an end of an anisotropic conductive sheet 110, a relaxation preventing mechanism which prevents the relaxation of the anisotropic conductive sheet 110, and an inversion preventing mechanism which prevents the inversion of the anisotropic conductive sheet 110. An integrated circuit test device 200 comprises moving means for moving the cartridge 100 by a prescribed distance when the number of tests reaches a prescribed number of times.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a cartridge for storing an anisotropic conductive sheet and an integrated circuit test apparatus using the cartridge.

  The electrical characteristics of the integrated circuit are tested by electrically connecting the integrated circuit and the test apparatus. However, there is no exchange between the integrated circuit and the test apparatus. A configuration in which possible electrical contacts are arranged is common. One reason for arranging replaceable electrical contacts is that the solder of the integrated circuit to be tested adheres to the test apparatus. As the integrated circuit solder adheres to the electrical contacts of the test equipment, the electrical resistance increases and test accuracy is compromised.

  In testing integrated circuits, expensive test equipment is used. As an example of a device for reducing the test cost, it is possible to shorten the test time by devising the control of the test apparatus. Various other attempts have been made. For example, there is an improvement for reducing noise of a socket-type probe used as an electrical contact (Patent Document 1). The reduction of probe noise stabilizes the performance of electrical contacts, brings about constant test conditions, and contributes to improvement of test accuracy.

  Solder adheres to the probe. In order to maintain the accuracy of the test, it is necessary to frequently clean the probe and remove the attached solder. In addition, the integrated circuit and the probe oxidize the solder when energized. The probe deteriorates due to the oxidation of the solder. Deteriorated probes need to be replaced. Each time the replacement is performed, the test apparatus is stopped, and if the stop time becomes longer, the test apparatus needs to be calibrated. To reduce test costs, it is important to reduce probe maintenance and replacement to reduce test equipment downtime.

  However, deterioration of the probe due to solder oxidation is inevitable, and there is a limit to improving the durability. Therefore, a sheet-like anisotropic conductor may be used as an electrical contact instead of the probe. An anisotropic conductor has a property of energizing only a pressed portion, and can cope with downsizing, multi-pinning, and narrowing of an integrated circuit. However, generally, the sheet-like anisotropic conductor is inferior to the socket-type probe in terms of durability.

  In the case of using an anisotropic conductor in an integrated circuit test, it is possible to take advantage of the characteristics of being in the form of a sheet. As an example of an invention for efficiently performing maintenance and replacement of an anisotropic conductor and shortening a stop time of a test apparatus, an invention of appropriately winding a roll-like anisotropic conductive sheet can be given ( Patent Documents 2 to 6).

  The roll-shaped anisotropic conductive sheet is wound after a predetermined number of tests, and the test is continued using unused portions of the anisotropic conductor.

JP 2009-129877 A JP-A-11-326446 JP 2008-157681 A JP 2009-109405 A JP 2013-24684 A JP-A-9-43308

When the roll-shaped anisotropic conductive sheet reaches the end by winding, it is necessary to replace the roll. In such a configuration, a contrivance that facilitates replacement for each roll is required.
The roll-shaped anisotropic conductive sheet is repeatedly pressed during the test. Therefore, the roll-shaped anisotropic conductive sheet may be relaxed and inverted. It is conceivable that the test is performed on the used part of the anisotropic conductor due to relaxation and inversion, or the test is performed without overlapping the anisotropic conductor. If this happens, the conditions will be different for each test, and the accuracy of the test will be impaired.

  Also, the size of the integrated circuit to be tested varies. Therefore, in order to cope with the size of any integrated circuit, it is conceivable to widen the roll-shaped anisotropic conductive sheet. However, when a wide roll-shaped anisotropic conductive sheet is mass-produced and used for a test, the unused portion of the anisotropic conductor becomes large when testing a small integrated circuit, and efficiency is lacking.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a cartridge that has a mechanism for preventing inversion and relaxation, can be easily replaced, and can store a roll-shaped anisotropic conductive sheet. In addition to the winding of the roll-shaped anisotropic conductive sheet, the cartridge is moved in the short direction of the roll-shaped anisotropic conductive sheet, so that the anisotropic conductive sheet is not removed. It is an object of the present invention to provide a test apparatus that allows a test to be continued using a used part.

  That is, the present invention is intended to achieve the above-mentioned object, and the means of claim 1 is the cartridge according to the present invention, wherein the cartridge of the present invention is electrically conductive only in a pressed portion, and the anisotropic conductive sheet. A cartridge comprising: a case that stores a sheet; a supply unit that supplies the anisotropic conductive sheet; and a winding unit that winds the anisotropic conductive sheet; and the case includes the supply unit of the case A guide hole, a latch groove, and a sheet exposed portion are provided in an intermediate portion of the winding portion.

  According to a second aspect of the present invention, the case of the cartridge of the present invention includes an anisotropic conductive sheet that produces conductivity only in a pressed portion, a case that stores the anisotropic conductive sheet, and the anisotropic conductive sheet. A cartridge including a supply unit that supplies a sheet and a winding unit that winds the anisotropic conductive sheet includes an end detection mechanism that detects an end of the anisotropic conductive sheet.

  According to a third aspect of the present invention, the cartridge supply unit of the present invention includes an anisotropic conductive sheet that produces conductivity only in a pressed portion, a case storing the anisotropic conductive sheet, and the anisotropic A cartridge including a supply unit that supplies a conductive sheet and a winding unit that winds up the anisotropic conductive sheet includes a loosening prevention mechanism that prevents the anisotropic conductive sheet from loosening.

  According to a fourth aspect of the present invention, the winding portion of the cartridge of the present invention includes an anisotropic conductive sheet that produces conductivity only in a pressed portion, a case storing the anisotropic conductive sheet, and the anisotropic A cartridge including a supply unit that supplies a conductive conductive sheet and a winding unit that winds up the anisotropic conductive sheet includes a reversal prevention mechanism that prevents the anisotropic conductive sheet from reversing. .

  According to a fifth aspect of the present invention, there is provided the integrated circuit test apparatus according to the present invention, wherein the integrated circuit test apparatus is a rotating means for winding an anisotropic conductive sheet that produces conductivity only in a pressed portion when the number of tests reaches a predetermined number. An integrated circuit test apparatus comprising: moving means for moving the cartridge by a predetermined distance when the number of tests reaches a predetermined number.

  According to a sixth aspect of the present invention, in the moving means of the integrated circuit test apparatus of the present invention, the moving direction is a short direction of the anisotropic conductive sheet.

  According to the configuration of the first aspect, the cartridge of the present invention has an effect of efficiently executing the replacement of the anisotropic conductive sheet in the test of the integrated circuit and minimizing the stop time of the integrated circuit test apparatus.

  According to the second aspect of the present invention, the cartridge of the present invention can detect the end of the anisotropic conductive sheet. By detecting the end of the anisotropic conductive sheet, it becomes possible for the test manager to prepare for replacement of the cartridge in advance, and there is an effect that the stop time of the integrated circuit test apparatus can be minimized.

  Further, according to the third aspect of the present invention, the cartridge of the present invention can prevent the anisotropic conductive sheet from loosening. By preventing the relaxation of the anisotropic conductive sheet, the cartridge keeps the tension of the anisotropic conductive sheet constant, guarantees the stability of the performance as an electrical contact of the anisotropic conductive sheet, and the accuracy of the test There is an effect to contribute to.

  Further, according to the configuration of the fourth aspect, the cartridge of the present invention can prevent the anisotropic conductive sheet from being reversed. By preventing the reversal of the anisotropic conductive sheet, the cartridge prevents the reuse of the used part of the anisotropic conductive sheet and ensures the stability of the performance as the electrical contact of the anisotropic conductive sheet. This has the effect of contributing to the accuracy of the test.

  Further, according to the configurations of the fifth and sixth aspects, the integrated circuit test apparatus of the present invention controls the movement of the cartridge in the same manner as the winding of the anisotropic conductive sheet, so that the anisotropic conductive sheet is not moved in the short direction. There is an effect that the used portion can be minimized. Thereby, there is an effect that the down time of the integrated circuit test apparatus can be minimized.

FIG. 2 is an anisotropic conductive sheet storage cartridge according to the present invention, in which (a) and (b) are perspective views, (c) is a plan view, (d) is a front view, and (e) is a right side view. . It is an exploded view of the anisotropic conductive sheet storage cartridge of this invention in an Example. It is a part of integrated circuit test apparatus of this invention in an Example, Comprising: It is explanatory drawing which attaches a cartridge to an integrated circuit test apparatus, (a) And (b) is a perspective view. 1 is an overall view of an integrated circuit test apparatus of the present invention in an embodiment. It is a flowchart of control by the control apparatus of the integrated circuit test apparatus of this invention in an Example.

  Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings.

FIG. 1 is a cartridge of the present invention, (a) and (b) are perspective views, (c) is a plan view, (d) is a front view, and (e) is a right side view.
The cartridge 100 includes an anisotropic conductive sheet 110 that generates conductivity only in a pressed portion, a case 120 that stores the anisotropic conductive sheet 110, a supply unit 130 that supplies the anisotropic conductive sheet 110, an anisotropic A winding unit 140 for winding the conductive conductive sheet 110.

The case 120 that stores the anisotropic conductive sheet 110 includes a guide hole 121, a latch groove 122, and a sheet exposure part 123 in the middle part of the supply unit 130 and the winding unit 140 of the case 120. In addition, the case 120 includes a supply unit cover 124 and a winding unit cover 125.
Since the cartridge 100 includes the guide hole 121 and the latch groove 122, the cartridge 100 can be easily mounted and replaced with the integrated circuit test apparatus.
With this configuration, the cartridge 100 has an effect of efficiently executing the replacement of the anisotropic conductive sheet 110 in the test of the integrated circuit and minimizing the stop time of the integrated circuit test apparatus.

  Here, the anisotropic conductive sheet 110 which produces conductivity only in the pressed portion is preferably a dispersed metal particle type. The anisotropic conductive sheet 110 is preferably in a roll shape.

FIG. 2 is an exploded view of the cartridge 100 of the present invention. Please refer to FIG.
The anisotropic conductive sheet 110 is attached to the winding unit 140 from the supply unit 130 via the sheet exposure unit 123. The case 120 is covered with a supply unit cover 124 and a winding unit cover 125. The used anisotropic conductive sheet 110 stored in the cartridge 100 can be replaced with a new anisotropic conductive sheet 110 by removing the supply unit cover 124 and the winding unit cover 125. It is also possible to replace the cartridge 100 with a new anisotropic conductive sheet 110 without reusing the cartridge 100.

The case 120 includes an end detection mechanism that detects the end of the anisotropic conductive sheet 110. Specifically, the case 120 includes a termination detection port 126 on the side surface of the supply unit 130 as a termination detection mechanism. Please refer to FIG.
The case 120 can detect the end of the anisotropic conductive sheet 110 by including the end detection port 126. Specifically, the sensing tape 111 is attached to the supply-side end of the anisotropic conductive sheet 110, and the sensing tape 111 is detected from the end detection port 126. When the sensing tape 111 is detected, the test manager can recognize that the end of the anisotropic conductive sheet 110 is near.
With this configuration, it is possible for the test administrator to prepare for replacement of the cartridge in advance, and there is an effect that the stop time of the integrated circuit test apparatus can be minimized.
The end detection mechanism is not limited to the one provided with the end detection port 126.

The supply unit 130 that supplies the anisotropic conductive sheet 110 includes a relaxation prevention mechanism that prevents the anisotropic conductive sheet 110 from relaxing. Specifically, the supply unit 130 includes a supply reel 131 and a supply shaft 132 that generates a frictional resistance between the supply reel 131 and the loosening prevention mechanism.
By providing the supply reel 131 and the supply shaft 132, the supply unit 130 can prevent the anisotropic conductive sheet 110 from loosening. Specifically, with the force when the anisotropic conductive sheet 110 is pressed from above, the frictional resistance exceeds and the supply reel 131 does not rotate. However, the force when the winding unit 140 winds the anisotropic conductive sheet 110 exceeds the frictional resistance, and the supply reel 131 rotates. As described above, by adjusting the frictional resistance between the supply reel 131 and the supply shaft 132, the anisotropic conductive sheet 110 can be prevented from loosening.
With this configuration, the cartridge 100 has an effect of keeping the tension of the anisotropic conductive sheet 110 constant, ensuring the stability of the performance of the anisotropic conductive sheet 110 as an electrical contact, and contributing to the accuracy of the test. .
The anisotropic conductive sheet 110 and the supply reel 131 are preferably connected by a sensing tape 111.
Note that the relaxation preventing mechanism is not limited to the one based on frictional resistance.

The winding unit 140 that winds up the anisotropic conductive sheet 110 includes a reversal prevention mechanism that prevents the anisotropic conductive sheet 110 from reversing. Specifically, the winding unit 140 includes a winding reel 141 that includes a shell-type one-way clutch mechanism and a winding shaft 142 that includes a ratchet mechanism that rotates only in a certain direction as a reverse prevention mechanism.
The winding unit 140 includes the winding reel 141 and the winding shaft 142, thereby preventing the anisotropic conductive sheet 110 from being reversed. Specifically, when the take-up shaft 142 rotates in the direction to take up the anisotropic conductive sheet 110, the take-up reel 141 receives power from the take-up shaft 142 by the one-way clutch mechanism and moves in the same direction. Rotate and wind up the anisotropic conductive sheet 110. Here, when the take-up reel 141 rotates in a direction to rewind the anisotropic conductive sheet 110, the take-up reel 141 similarly transmits power to the take-up shaft 142 by the one-way clutch mechanism. At this time, since the winding shaft 142 does not rotate in the reverse direction by the ratchet mechanism, the winding reel 141 cannot rotate in the direction in which the winding reel 141 rewinds the anisotropic conductive sheet 110. In other words, the take-up reel 141 cannot reverse the anisotropic conductive sheet 110.
With this configuration, the cartridge 100 prevents reuse of a used portion of the anisotropic conductive sheet 110, ensures stability of performance as an electrical contact of the anisotropic conductive sheet 110, and improves test accuracy. There is a contributing effect.
The anti-reverse mechanism is not limited to the one-way clutch mechanism and the ratchet mechanism.

The one-way clutch mechanism in this embodiment is realized by mounting a shell-type one-way clutch inside the take-up reel 141 and interlocking with the take-up reel 141. The one-way clutch includes a rotating body and a shell that stores the rotating body and supports the rotating body with a spring. The rotating body comes into contact with the winding shaft 142 serving as a shaft by the spring. When the shaft rotates in a certain direction, the shaft pushes the rotating body and the spring, and the rotating body and the cam portion of the shell mesh with each other, thereby transmitting power. When the shaft rotates in the opposite direction, the rotator moves away from the cam portion of the shell in conjunction with the elastic force of the spring and the rotation of the shaft, so that no power is transmitted between the shaft and the cam surface.
The one-way clutch is not shown.

Moreover, the ratchet mechanism in a present Example is implement | achieved by providing a pawl and a nail | claw. The ratchet mechanism of the present embodiment is provided with a pawl having an inclination on the outer side of the winding shaft 142 serving as a shaft. Further, a pawl for pawl is provided. When the shaft rotates in one direction, the pawl easily exceeds the pawl due to the inclination of the pawl, but when the shaft rotates in the opposite direction, the pawl does not cross the pawl and rotates the shaft. To prevent.
Note that the ratchet mechanism is not shown.

The take-up reel 141 includes a sheet winding part 143 and a knob 144.
In the sheet winding portion 143, three cylinders are arranged on the circumference of the take-up reel 141. The anisotropic conductive sheet 110 is fixed by winding an end portion on the winding side around the sheet winding portion 143. The fixing of the anisotropic conductive sheet 110 is not limited to using three cylinders, and a clamp structure may be arranged on the circumference of the take-up reel 141.
When relaxation occurs in the anisotropic conductive sheet 110, the test manager can eliminate the relaxation by rotating the knob 144 in the direction in which the anisotropic conductive sheet 110 is wound. When the knob 144 rotates in the direction of winding the anisotropic conductive sheet 110, the winding shaft 142 is not transmitted with power from the winding reel 141 by the one-way clutch mechanism, and the winding reel 141 and the winding shaft are not transmitted. 142 idles. As described above, even if the knob 144 tries to rotate in the direction of rewinding the anisotropic conductive sheet 110, the take-up reel 141 including the knob 144 cannot rotate in the direction of rewinding the anisotropic conductive sheet 110.

FIG. 3 is an explanatory view showing a part of the integrated circuit test apparatus according to the present invention, in which the cartridge is attached to the integrated circuit test apparatus, and (a) and (b) are perspective views.
The integrated circuit test apparatus 200 includes a holder 210 for mounting the cartridge 100 and a test substrate 220 placed under the holder 210.

The holder 210 includes a latch lever 211 and a guide pin 212.
The latch lever 211 includes a spring mechanism. While pushing the latch lever 211, the cartridge 100 is inserted into the holder 210 so that the guide hole 121 follows the guide pin 212. When the insertion is completed, the latch lever 211 is engaged with the latch groove 122 by the spring mechanism of the latch lever 211, and the holder 210 fixes the cartridge 100.

FIG. 4 is an overall view of the integrated circuit test apparatus 200 of the present invention. Hereinafter, in this embodiment, an integrated circuit to be tested is referred to as a device under test.
The integrated circuit test apparatus 200 is different from the handler driving apparatus 230 that controls the suction and transfer of the device under test 300, the test signal transmission / reception apparatus 240 that sends test signals to the test board 220 and receives test signals from the test board 220. A sheet take-up device 250 that controls the take-up of the isotropic conductive sheet 110; a holder move device 260 that controls the movement of the holder 210; a handler drive device 230; a test signal sending / receiving device 240; A control device 270 that controls the sheet winding device 250 and the holder moving device 260 is provided.
The handler driving device 230 includes a handler. The handler includes a suction nozzle 231. Under the control of the handler driving device 230, the suction nozzle 231 sucks the device under test 300, and the handler carries the sucked device under test 300. Note that the illustration of the handler is omitted.
The test signal transmission / reception device 240 acquires the electrical characteristics of the device under test 300 by transmitting a test signal to the test substrate 220, energizing the device under test 300, and receiving the test signal from the test substrate 220.
The control device 270 includes a rotating unit that winds the anisotropic conductive sheet 110 that produces conductivity only in a pressed portion when the number of tests reaches a predetermined number, and a time when the number of tests reaches the predetermined number. Control means including movement means for moving the cartridge 100 by a predetermined distance.

Here, the rotating means for winding the anisotropic conductive sheet 110 by a predetermined distance is realized by rotating the winding shaft 142 of the winding unit 140 for winding the anisotropic conductive sheet 110 by the sheet winding device 250. To do. The moving means for moving the cartridge 100 by a predetermined distance is realized by moving the holder 210 to which the cartridge 100 is fixed by the holder moving device 260. The moving direction of the holder 210 is the short direction of the anisotropic conductive sheet 110.
The predetermined number of times and the predetermined distance will be described later.
With this configuration, the integrated circuit test apparatus 200 controls the movement of the cartridge 100 and minimizes the unused portion of the anisotropic conductive sheet 110 in the short direction, similarly to the winding of the anisotropic conductive sheet 110. There is an effect that can be stopped. Thereby, there is an effect that the stop time of the integrated circuit test apparatus 200 can be minimized.

An outline of the test will be described.
The cartridge 100 is fixed by a holder 210 and is disposed above the test substrate 220. The anisotropic conductive sheet 110 is exposed from the sheet exposed portion 123 above the test substrate 220. A test electrode pattern is disposed on the upper surface of the test substrate 220. The control device 270 causes the upper surface of the device under test 300 to be sucked by the suction nozzle 231 via the handler driving device 230, conveys the device under test 300 to the upper side of the test substrate 220, and overlaps the anisotropic conductive sheet. 110 and the test electrode pattern. At this time, the control device 270 sends the test signal to the test substrate 220 via the test signal transmission / reception device 240, energizes the device under test 300, and receives the test signal from the test substrate 220. The electrical characteristics of the device 300 are acquired.

FIG. 5 is a flowchart of control by the control device 270 of the integrated circuit test device 200 of the present invention.
The test manager attaches the cartridge 100 to the holder 210, inputs information necessary for control, and starts a test (S1). The test manager inputs the device size to be inspected, the sheet usable width, and the number of times that the sheet can be continuously tested on the same surface as information necessary for control. The control device 270 includes, as control means, first storage means for storing the device size to be inspected, the usable sheet width, and the number of sheets that can be continuously tested on the same surface.
The inspected device size is the width and depth of the inspected device 300, and is a value within the width and depth of the sheet exposed portion 123.
The sheet usable width is the length of the anisotropic conductive sheet 110 in the short direction.
The number of sheets that can be continuously tested on the same surface is the number of times that the anisotropic conductive sheet 110 can be used, and is the number of times from the start of use of an unused portion until the use limit is reached.

Here, the number of sheets that can be continuously tested on the same surface corresponds to a predetermined number of times in the rotating means and moving means. Specifically, the control device 270 moves the anisotropic conductive sheet 110 to a predetermined distance when the number of tests reaches the number of times that the sheet can be continuously tested on the same surface via the sheet winding device 250 or the holder moving device 260. The holder 210 to which the cartridge 100 is fixed is moved by a predetermined distance.
The device size to be inspected corresponds to a predetermined distance between the rotating means and the moving means. Specifically, the control device 270 winds the anisotropic conductive sheet 110 to the depth of the device under test 300 or fixes the cartridge 100 via the sheet winding device 250 or the holder moving device 260. The holder 210 is moved by a width of the device under test 300 as a predetermined distance.

  The initial position of the holder 210 is adjusted so that the test is started at a portion closest to the holder 210 among usable portions of the anisotropic conductive sheet 110 before the test is started. The virtual conductive use number is assigned to the anisotropic conductive sheet 110 in FIG. 4, and when the test is started from the first position, the unused portion of the anisotropic conductive sheet 110 becomes the smallest.

  The control device 270 includes a handler driving unit that transports the device under test 300 via the handler driving device 230 as a control unit. Under the control of the handler driving device 230, the suction nozzle 231 sucks the device under test 300, and the handler carries the sucked device under test 300. When the test manager inputs information necessary for control and performs an operation for starting the test, the control device 270 drives the handler and starts the test.

The control device 270 manages and stores information necessary for control. Specifically, the control device 270 includes, as control means, second storage means for storing the number of times the handler is pressed, the number of times that the same sheet use limit has been reached, and the end detection flag.
The number of times the handler is pressed is the number of times that the handler carrying the device under test 300 has pressed the stacked anisotropic conductive sheet 110 and the test electrode pattern. In addition, when the number of times of pressing is counted, the control device 270 determines whether or not the number of times of pressing the handler exceeds the number of sheets that can be continuously tested on the same surface (S2).
The number of times that the same-surface usage limit has been reached is 0 when the initial value is reached, and increases when the number of times the handler is pressed exceeds the possible number of continuous tests on the same-surface surface stored by the first storage means.
The end detection flag is a Boolean value consisting of true / false, and its initial value is false. The control device 270 includes an end detection unit that detects the end of the anisotropic conductive sheet 110. Specifically, the sensing tape 111 is detected from the end detection port 126 by a sensor. When the sensing tape 111 is detected, the control device 270 sets the end detection flag to true.
Either value returns to the initial value when the cartridge 100 is replaced.

  When the number of times that the same-sheet usage limit has been reached increases, the control device 270 returns the handler pressing number to the initial value, and temporarily stops driving the handler (S3). The control device 270 includes, as control means, handler suspension means for temporarily stopping the handler drive via the handler drive device 230.

When the driving of the handler is temporarily stopped, the control device 270 calculates a determination value (p) for determining whether to move the holder 210 or wind up the anisotropic conductive sheet 110 (S4). The control device 270 includes determination value calculation means for calculating p as a control means.
If the sheet usable width is more than twice the width of the device to be inspected, test using the unused portion of the anisotropic conductive sheet 110 by moving the holder 210 by the width of the device to be inspected. Can do. A value (r) obtained by rounding down the decimal point of the ratio of the sheet usable width and the width of the device size to be inspected is the number of portions that can be used for the test in the short direction of the anisotropic conductive sheet 110.
The virtual use order number of the anisotropic conductive sheet 110 in FIG. 4 is an example when r is 2.
The judgment value calculation means calculates p by dividing the number of times that the same-surface usage limit has been reached by r.

  The control device 270 branches the control depending on whether p is an integer (S5). The control device 270 assumes that the anisotropic conductive sheet 110 should be wound up if p is an integer, and the holder 210 should be moved if p is other than an integer.

When p is other than an integer, the control device branches control depending on whether the integer part of p is an even number or an odd number (S6). Here, the control device 270 moves the holder 210 by the moving means in a direction to pull the cartridge 100 if the integer part of p is an even number, and to push the cartridge 100 if the integer part of p is an odd number ( S7, S8). Speaking of virtual use order numbers of the anisotropic conductive sheet 110 in FIG. 4, the direction in which the cartridge 100 is pulled is the second to first direction, and the direction in which the cartridge 100 is pushed is the fourth to third direction. Direction. By moving in this way, the anisotropic conductive sheet 110 uses the second part after the first part is used, and the fourth part after the third part is used. Will be.
The moving distance of the holder 210 is equal to the width of the device size to be inspected stored by the first storage means.

The control device 270 winds up the anisotropic conductive sheet 110 when p is an integer (S9). The control device 270 rotates the take-up reel 141 by the rotating means, and takes up the anisotropic conductive sheet 110.
The rotation distance of the take-up reel 141 is equal to the depth of the device size to be inspected stored by the first storage means. Here, the rotation amount of the sheet winding device 250 can be calculated from the depth of the device to be inspected and the diameter of the winding reel. It is preferable to consider the thickness of the wound anisotropic conductive sheet 110 as the diameter of the winding reel. However, since the thickness of the anisotropic conductive sheet 110 is extremely small with respect to the diameter of the take-up reel, it may be ignored.

  Further, when p is an integer, the control device 270 determines whether or not the anisotropic conductive sheet 110 has reached the end (S10). The control device 270 includes sheet end notification means as control means. Specifically, when the termination detection flag is true, the control device 270 notifies the test manager that the termination of the anisotropic conductive sheet 110 is near (S11).

  When the holder 210 is moved or the anisotropic conductive sheet 110 is taken up, the control device 270 resumes driving of the handler by the handler driving unit (S12).

  The control device 270 confirms the presence or absence of a signal for stopping the handler drive (S13). The control device 270 includes a handler stopping unit that stops the driving of the handler via the handler driving device 230 as a control unit. The test manager can stop driving the handler at any time by sending a signal to stop the driving of the handler to the control device 270 (S14).

  The determination of whether the anisotropic conductive sheet 110 should be wound or the cartridge 100 should be moved is not limited to the procedure shown in FIG. As an example, when p is an integer, there is a procedure of winding the anisotropic conductive sheet 110 and simultaneously moving the cartridge 100 to the initial position of the holder 210. When this procedure is adopted, it is not necessary to determine the odd or even number of p. If p is not an integer, the cartridge 100 may be moved in the pulling direction.

DESCRIPTION OF SYMBOLS 100 ... Cartridge, 110 ... Anisotropic conductive sheet, 111 ... Sensing tape, 120 ... Case, 121 ... Guide hole, 122 ... Latch groove, 123 ... Sheet exposed part, 124 ... Supply part cover, 125 ... Winding part cover, 126 ... Terminal detection port, 130 ... Supply unit, 131 ... Supply reel, 132 ... Supply shaft, 140 ... Take-up unit, 141 ... Take-up reel, 142 ... Take-up shaft, 143 ... Sheet winding unit, 144 ... Knob.
DESCRIPTION OF SYMBOLS 200 ... Integrated circuit test apparatus, 210 ... Holder, 211 ... Latch lever, 212 ... Guide pin, 220 ... Test board, 230 ... Handler drive device, 231 ... Adsorption nozzle, 240 ... Test signal transmission / reception device, 250 ... Sheet winding device 260 ... Holder moving device, 270 ... Control device.
300: Device to be inspected.

Claims (6)

An anisotropic conductive sheet that produces conductivity only in the pressed part;
A case for storing the anisotropic conductive sheet;
A supply unit for supplying the anisotropic conductive sheet;
In a cartridge comprising a winding unit that winds up the anisotropic conductive sheet,
The cartridge includes a guide hole, a latch groove, and a sheet exposure portion at an intermediate portion between the supply portion and the winding portion of the case. An anisotropic conductive sheet that produces conductivity only in the pressed part;
A case for storing the anisotropic conductive sheet;
A supply unit for supplying the anisotropic conductive sheet;
In a cartridge comprising a winding unit that winds up the anisotropic conductive sheet,
The cartridge according to claim 1, wherein the case includes a termination detection mechanism that detects a termination of the anisotropic conductive sheet. An anisotropic conductive sheet that produces conductivity only in the pressed part;
A case for storing the anisotropic conductive sheet;
A supply unit for supplying the anisotropic conductive sheet;
In a cartridge comprising a winding unit that winds up the anisotropic conductive sheet,
The cartridge according to claim 1, wherein the supply unit includes a relaxation prevention mechanism that prevents the anisotropic conductive sheet from relaxing. An anisotropic conductive sheet that produces conductivity only in the pressed part;
A case for storing the anisotropic conductive sheet;
A supply unit for supplying the anisotropic conductive sheet;
In a cartridge comprising a winding unit that winds up the anisotropic conductive sheet,
The cartridge according to claim 1, wherein the winding unit includes an inversion prevention mechanism for preventing inversion of the anisotropic conductive sheet. In an integrated circuit test apparatus comprising a rotating means for winding an anisotropic conductive sheet that produces conductivity only in a pressed portion when the number of tests reaches a predetermined number, by a predetermined distance,
5. An integrated circuit test apparatus comprising: moving means for moving the cartridge according to any one of claims 1 to 4 by a predetermined distance when the number of tests reaches a predetermined number. 6. The integrated circuit test apparatus according to claim 5, wherein the moving means has a moving direction in a short direction of the anisotropic conductive sheet.

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