JPH0345954Y2 - - Google Patents

Info

Publication number

JPH0345954Y2

JPH0345954Y2 JP1670985U JP1670985U JPH0345954Y2 JP H0345954 Y2 JPH0345954 Y2 JP H0345954Y2 JP 1670985 U JP1670985 U JP 1670985U JP 1670985 U JP1670985 U JP 1670985U JP H0345954 Y2 JPH0345954 Y2 JP H0345954Y2

Authority

JP

Japan

Prior art keywords

bell gear

metal

gear

susceptor

vapor phase

Prior art date

1985-02-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

• Espacenet
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• 229910052751 metal Inorganic materials 0.000 claims description 28
• 239000002184 metal Substances 0.000 claims description 28
• 239000010453 quartz Substances 0.000 claims description 19
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 19
• 238000001947 vapour-phase growth Methods 0.000 claims description 9
• 235000012431 wafers Nutrition 0.000 description 14
• 238000001816 cooling Methods 0.000 description 4
• 239000012495 reaction gas Substances 0.000 description 4
• 239000004065 semiconductor Substances 0.000 description 3
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
• 239000013078 crystal Substances 0.000 description 2
• 230000007423 decrease Effects 0.000 description 2
• 230000007547 defect Effects 0.000 description 2
• 229910001873 dinitrogen Inorganic materials 0.000 description 2
• 239000000463 material Substances 0.000 description 2
• 238000000034 method Methods 0.000 description 2
• 239000000758 substrate Substances 0.000 description 2
• 238000007740 vapor deposition Methods 0.000 description 2
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
• 229910052782 aluminium Inorganic materials 0.000 description 1
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
• 239000012159 carrier gas Substances 0.000 description 1
• 239000011248 coating agent Substances 0.000 description 1
• 239000011247 coating layer Substances 0.000 description 1
• 238000000576 coating method Methods 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 239000007789 gas Substances 0.000 description 1
• PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
• 239000010931 gold Substances 0.000 description 1
• 229910052737 gold Inorganic materials 0.000 description 1
• 230000017525 heat dissipation Effects 0.000 description 1
• 230000020169 heat generation Effects 0.000 description 1
• 238000010438 heat treatment Methods 0.000 description 1
• 239000012212 insulator Substances 0.000 description 1
• 238000012423 maintenance Methods 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 150000002739 metals Chemical class 0.000 description 1
• 230000003449 preventive effect Effects 0.000 description 1
• 230000005855 radiation Effects 0.000 description 1
• 229910052709 silver Inorganic materials 0.000 description 1
• 239000004332 silver Substances 0.000 description 1