JPH0345510U - - Google Patents

Info

Publication number
JPH0345510U
JPH0345510U JP1990088446U JP8844690U JPH0345510U JP H0345510 U JPH0345510 U JP H0345510U JP 1990088446 U JP1990088446 U JP 1990088446U JP 8844690 U JP8844690 U JP 8844690U JP H0345510 U JPH0345510 U JP H0345510U
Authority
JP
Japan
Prior art keywords
light
optical axis
reflective surface
microwaves
light irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1990088446U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0542416Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPH0345510U publication Critical patent/JPH0345510U/ja
Application granted granted Critical
Publication of JPH0542416Y2 publication Critical patent/JPH0542416Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21K—NON-ELECTRIC LIGHT SOURCES USING LUMINESCENCE; LIGHT SOURCES USING ELECTROCHEMILUMINESCENCE; LIGHT SOURCES USING CHARGES OF COMBUSTIBLE MATERIAL; LIGHT SOURCES USING SEMICONDUCTOR DEVICES AS LIGHT-GENERATING ELEMENTS; LIGHT SOURCES NOT OTHERWISE PROVIDED FOR
    • F21K99/00—Subject matter not provided for in other groups of this subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V13/00—Producing particular characteristics or distribution of the light emitted by means of a combination of elements specified in two or more of main groups F21V1/00 - F21V11/00
    • F21V13/02—Combinations of only two kinds of elements
    • F21V13/04—Combinations of only two kinds of elements the elements being reflectors and refractors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V7/00—Reflectors for light sources
    • F21V7/04—Optical design
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Microscoopes, Condenser (AREA)
  • Lenses (AREA)
  • Circuit Arrangements For Discharge Lamps (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP1990088446U 1985-07-23 1990-08-27 Expired - Lifetime JPH0542416Y2 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/757,976 US4812957A (en) 1985-07-23 1985-07-23 Optical system for uniform illumination of a plane surface

Publications (2)

Publication Number Publication Date
JPH0345510U true JPH0345510U (enExample) 1991-04-26
JPH0542416Y2 JPH0542416Y2 (enExample) 1993-10-26

Family

ID=25049958

Family Applications (2)

Application Number Title Priority Date Filing Date
JP61171935A Pending JPS6265014A (ja) 1985-07-23 1986-07-23 不均等な光源を像平面上に映すための光学的システム
JP1990088446U Expired - Lifetime JPH0542416Y2 (enExample) 1985-07-23 1990-08-27

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP61171935A Pending JPS6265014A (ja) 1985-07-23 1986-07-23 不均等な光源を像平面上に映すための光学的システム

Country Status (2)

Country Link
US (1) US4812957A (enExample)
JP (2) JPS6265014A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4975625A (en) * 1988-06-24 1990-12-04 Fusion Systems Corporation Electrodeless lamp which couples to small bulb
US6797971B2 (en) * 2002-07-18 2004-09-28 Fusion Uv Systems, Inc. Apparatus and method providing substantially two-dimensionally uniform irradiation
US6649921B1 (en) 2002-08-19 2003-11-18 Fusion Uv Systems, Inc. Apparatus and method providing substantially two-dimensionally uniform irradiation
US6717161B1 (en) 2003-04-30 2004-04-06 Fusion Uv Systems, Inc. Apparatus and method providing substantially uniform irradiation of surfaces of elongated objects with a high level of irradiance
US6967342B2 (en) * 2003-07-31 2005-11-22 Fusion Uv Systems, Inc. Method and apparatus for improved ultraviolet (UV) treatment of large three-dimensional (3D) objects
CN105223681A (zh) * 2015-11-11 2016-01-06 沈阳理工大学 一种医用电子内窥镜聚光系统

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5760695A (en) * 1980-09-27 1982-04-12 Mitsubishi Electric Corp Microwave discharge light source

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE305151C (enExample) *
US3296432A (en) * 1962-08-13 1967-01-03 Trw Inc Radiation beam forming apparatus
US3296923A (en) * 1965-01-04 1967-01-10 Gen Electric Lenticulated collimating condensing system
US3720460A (en) * 1971-04-19 1973-03-13 Optical Radiation Corp Projection light source and optical system
US3911318A (en) * 1972-03-29 1975-10-07 Fusion Systems Corp Method and apparatus for generating electromagnetic radiation
US3872349A (en) * 1973-03-29 1975-03-18 Fusion Systems Corp Apparatus and method for generating radiation
US3941475A (en) * 1974-07-01 1976-03-02 Tamarack Scientific Co., Inc. Optical microcircuit printing system
US4001632A (en) * 1975-04-21 1977-01-04 Gte Laboratories Incorporated High frequency excited electrodeless light source
US4042850A (en) * 1976-03-17 1977-08-16 Fusion Systems Corporation Microwave generated radiation apparatus
JPS5843416A (ja) * 1981-09-10 1983-03-14 Nippon Kogaku Kk <Nikon> ミラ−集光型逆エキスパンドアフオ−カル照明光学系
US4427921A (en) * 1981-10-01 1984-01-24 Gte Laboratories Inc. Electrodeless ultraviolet light source
DE3226580A1 (de) * 1981-12-08 1983-06-16 Robert Bosch Gmbh, 7000 Stuttgart Scheinwerfer fuer kraftfahrzeuge
US4485332A (en) * 1982-05-24 1984-11-27 Fusion Systems Corporation Method & apparatus for cooling electrodeless lamps
US4480213A (en) * 1982-07-26 1984-10-30 Gte Laboratories Incorporated Compact mercury-free fluorescent lamp
AU574435B2 (en) * 1984-03-02 1988-07-07 Mitsubishi Denki Kabushiki Kaisha Microwave discharge light source apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5760695A (en) * 1980-09-27 1982-04-12 Mitsubishi Electric Corp Microwave discharge light source

Also Published As

Publication number Publication date
JPS6265014A (ja) 1987-03-24
JPH0542416Y2 (enExample) 1993-10-26
US4812957A (en) 1989-03-14

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