JPH0345492B2 - - Google Patents
Info
- Publication number
- JPH0345492B2 JPH0345492B2 JP21406687A JP21406687A JPH0345492B2 JP H0345492 B2 JPH0345492 B2 JP H0345492B2 JP 21406687 A JP21406687 A JP 21406687A JP 21406687 A JP21406687 A JP 21406687A JP H0345492 B2 JPH0345492 B2 JP H0345492B2
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- bellows
- conductor
- double
- sealing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000919 ceramic Substances 0.000 claims description 49
- 239000004020 conductor Substances 0.000 claims description 23
- 238000007789 sealing Methods 0.000 claims description 23
- 238000010438 heat treatment Methods 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 7
- 230000008646 thermal stress Effects 0.000 claims description 6
- 238000006073 displacement reaction Methods 0.000 description 6
- 238000005219 brazing Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
Landscapes
- Insulators (AREA)
- Insulating Bodies (AREA)
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は二重封止形セラミツクブツシングの製
造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method for manufacturing double-sealed ceramic bushings.
［従来技術］
従来のセラミツクブツシングは、セラミツクス
リーブに貫通導体を貫通させ、該セラミツクスリ
ーブの一方の端部で該セラミツクスリーブと貫通
導体との間を封止金属で封止したものが一般的で
あり、このような構造では万一封止部が破壊する
と、リークが発生する問題点があつた。[Prior Art] Conventional ceramic bushings generally have a through conductor passed through a ceramic sleeve, and a sealing metal seals between the ceramic sleeve and the through conductor at one end of the ceramic sleeve. However, in this structure, if the sealing part were to break, there was a problem that leakage would occur.
これを避けるため、封止部をセラミツクスリー
ブの両端に設けて二重封止する場合には、セラミ
ツクスリーブと貫通導体との線膨張率の違いによ
り封止部に熱応力が発生するため一方の封止部に
ベロー（変位吸収体）で封止することが信頼性向
上のために有益である。 In order to avoid this, when sealing parts are provided at both ends of the ceramic sleeve for double sealing, thermal stress is generated in the sealing part due to the difference in linear expansion coefficient between the ceramic sleeve and the through conductor. It is useful to seal the sealing portion with a bellows (displacement absorber) to improve reliability.
［発明が解決しようとする問題点］
しかしながら、二重封止部のうちの一方の封止
部でベローを用いる二重封止形セラミツクブツシ
ングの製造方法では、ロー付け工程で該セラミツ
クブツシングを加熱炉内に入れて例えば800℃ま
で加熱することによりロー付けし、これを室温ま
で下げる間にベローが実使用で受ける変位の数倍
の変位を受けてしまうため、繰返し寿命が著しく
低下する等の問題点があつた。[Problems to be Solved by the Invention] However, in the method of manufacturing a double-sealed ceramic bushing using a bellows in one of the double-sealed parts, the ceramic bushing is The bellows is brazed by placing it in a heating furnace and heating it to, for example, 800℃, and while it is cooled down to room temperature, the bellows is subjected to a displacement several times that which it would receive in actual use, resulting in a significant reduction in its repeatable life. There were other problems.
本発明の目的は、ロー付け時にベローにかかる
変位を軽減できる二重封止形セラミツクブツシン
グの製造方法を提供することにある。 An object of the present invention is to provide a method for manufacturing a double-sealed ceramic bushing that can reduce the displacement of the bellows during brazing.
［問題点を解決するための手段］
上記の目的を達成するための本発明の手段を、
実施例に対応する第１図及び第２図は参照して説
明すると、本発明はセラミツクスリーブ２の中に
貫通導体３が通され、前記セラミツクスリーブ２
の両端で該セラミツクスリーブ２と前記貫通導体
３との封止が封止部６，１２でそれぞれ行われ、
これら二重の封止部６，１２の一方にベロー７を
用いている二重封止形セラミツクブツシングの製
造方法において、前記ベロー７を前記セラミツク
スリーブ２と前記貫通導体３とに加熱炉内でロー
付けする際に、前記貫通導体３と前記セラミツク
スリーブ２間の熱応力を前記ベロー７に加えない
ようにするための固定具１５を前記ベロー７の両
端の封着金具８，９間に取付けて加熱を行うこと
を特徴とする。[Means for solving the problems] The means of the present invention for achieving the above object are as follows:
Referring to FIGS. 1 and 2, which correspond to embodiments, the present invention will be described. A through conductor 3 is passed through a ceramic sleeve 2, and the ceramic sleeve 2
The ceramic sleeve 2 and the through conductor 3 are sealed at both ends by sealing portions 6 and 12, respectively;
In a method for manufacturing a double-sealed ceramic bushing in which a bellows 7 is used in one of the double-sealed parts 6 and 12, the bellows 7 is attached to the ceramic sleeve 2 and the through conductor 3 in a heating furnace. A fixing device 15 is installed between the sealing fittings 8 and 9 at both ends of the bellows 7 in order to prevent thermal stress between the through conductor 3 and the ceramic sleeve 2 from being applied to the bellows 7 during soldering. The feature is that it can be attached and heated.
［作用］
このようにベロー７の両端を固定具１５で固定
して加熱炉内でロー付け加熱を行うと、ベロー７
にセラミツクスリーブ２と貫通導体３の線膨張率
の違いによる熱応力が作用するのを回避できる。[Function] When both ends of the bellows 7 are fixed with the fixtures 15 in this way and brazed heating is performed in the heating furnace, the bellows 7
Thermal stress due to the difference in linear expansion coefficient between the ceramic sleeve 2 and the through conductor 3 can be avoided.
［実施例］
以下本発明の実施例を第１図を参照して詳細に
説明する。二重封止形セラミツクブツシング１
は、セラミツクスリーブ２の中に銅等の貫通導体
３が貫通されている。セラミツクスリーブ２の一
端では、セラミツクスリーブ２と貫通導体３と
が、封着金具４を両者に跨らせてロー５付けによ
り封止して、一方の封止部６が形成されている。
セラミツクスリーブ２の他端では、セラミツクス
リーブ２と貫通導体３とが、ベロー７を両者に跨
らせ、該ベロー７の両端の封着金具８，９をロー
１０，１１付けすることにより封止して、他方の
封止部１２が形成されている。[Example] Hereinafter, an example of the present invention will be described in detail with reference to FIG. Double sealed ceramic bushing 1
A through conductor 3 made of copper or the like is passed through the ceramic sleeve 2. At one end of the ceramic sleeve 2, the ceramic sleeve 2 and the through conductor 3 are sealed by brazing 5 with a sealing fitting 4 extending over both to form one sealing portion 6.
At the other end of the ceramic sleeve 2, the ceramic sleeve 2 and the through conductor 3 are sealed by placing a bellows 7 across them and attaching sealing fittings 8, 9 at both ends of the bellows 7 with rows 10, 11. Thus, the other sealing portion 12 is formed.
なお、１３はこの二重封止形セラミツクブツシ
ング１を貫通させているフランジ、１４はセラミ
ツクスリーブ２とフランジ１３との間をロー付け
等で封止している封着金具である。 In addition, 13 is a flange that penetrates this double-sealed ceramic bushing 1, and 14 is a sealing fitting that seals between the ceramic sleeve 2 and the flange 13 by brazing or the like.
このような二重封止形セラミツクブツシング１
の製造工程で、該セラミツクブツシング１を加熱
炉内に入れてロー付けするに際しては、ベロー７
の両端の封着金具８，９間にカーボン製等の固定
具１５を取付ける。この取付は、封着金具８，９
の凹部に固定具１５の両端を嵌めることにより行
つている。かかる状態で、該二重封止形セラミツ
クブツシング１を加熱炉内に入れ、炉内を水素な
どの還元ガス雰囲気にして、第２図に示すよう
に、温度を上昇させ、ロー５，１０，１１の溶融
温度以上に加熱する。例えば、ロー５，１０，１
１が銀ローならば、その溶融温度780℃より高い
温度である800℃まで加熱する。この800℃の最高
温度を10〜20分間保持し、次いで降温させる。炉
内温度が、セラミツクブツシング１の実使用時の
最高温度（例えば、100℃）まで降下した時点で
固定具１５をベロー７から取り外す。 Such a double-sealed ceramic bushing 1
In the manufacturing process, when the ceramic bushing 1 is placed in a heating furnace and brazed, the bellows 7
A fixing member 15 made of carbon or the like is attached between the sealing fittings 8 and 9 at both ends. This installation requires sealing fittings 8 and 9.
This is done by fitting both ends of the fixture 15 into the recesses. In this state, the double-sealed ceramic bushing 1 is placed in a heating furnace, the inside of the furnace is made into a reducing gas atmosphere such as hydrogen, the temperature is raised as shown in FIG. , 11. For example, row 5, 10, 1
If No. 1 is silver solder, heat it to 800°C, which is higher than its melting temperature of 780°C. This maximum temperature of 800° C. is maintained for 10 to 20 minutes, and then the temperature is lowered. The fixture 15 is removed from the bellows 7 when the temperature inside the furnace drops to the maximum temperature of the ceramic bushing 1 during actual use (for example, 100° C.).
従つて、800℃より固定具１５を取り外す迄の
温度差による熱応力は、貫通導体３によるセラミ
ツクスリーブ２への圧縮力として発生するが、セ
ラミツクスリーブ２の耐圧縮強度よりも貫通導体
３の引張強度の方がはるかに小さいので、貫通導
体３が降伏して伸びてしまうことになる。即ち、
ベロー７にかかるはずの変位を貫通導体３を伸ば
してしまうことで吸収させることがこの発明の特
徴点である。 Therefore, the thermal stress due to the temperature difference from 800°C until the fixture 15 is removed is generated as a compressive force on the ceramic sleeve 2 by the through conductor 3, but the tensile strength of the through conductor 3 is greater than the compressive strength of the ceramic sleeve 2. Since the strength is much lower, the through conductor 3 will yield and stretch. That is,
A feature of the present invention is that the displacement that would otherwise be applied to the bellows 7 is absorbed by stretching the through conductor 3.
この後は、ベロー７の変位吸収限界内の範囲で
使用するような温度条件をとれば、ベロー７の繰
返し変位寿命は著しく伸び、信頼性の高い二重封
止形セラミツクブツシングが得られる。 After this, if the temperature conditions are such that the bellows 7 are used within the displacement absorption limit, the repeated displacement life of the bellows 7 will be significantly extended, and a highly reliable double-sealed ceramic bushing can be obtained.
使用例
中心導体 ：無酸素銅、
線膨張係数 17×10-6
セラミツクスリーブ：アルミナセラミツク、
線膨張係数 ５〜６×10-6
無酸素銅は、ロー付を還元ガス（水素など）雰
囲気中で行うため水素ゼイ化を発生しない金属で
あり、電流容量的にも有利である。Usage example Center conductor: Oxygen-free copper, coefficient of linear expansion 17×10 -6 Ceramic Sleeve: Alumina ceramic, coefficient of linear expansion 5 to 6×10 -6 Oxygen-free copper is brazed in a reducing gas (hydrogen, etc.) atmosphere. It is a metal that does not generate hydrogen zeification and is advantageous in terms of current capacity.
アルミナセラミツクは、メタライズと称してセ
ラミツクスリーブ２の表面に金属面を形成させ、
これに封着金具８，９を銀ロー付けする封止作業
上、メタライズ性が良好であるから好ましい。 Alumina ceramic is produced by forming a metal surface on the surface of the ceramic sleeve 2, which is called metallization.
This is preferable because it has good metallization properties for the sealing work in which the sealing fittings 8 and 9 are soldered with silver.
［発明の効果］
以上説明するように本発明に係る二重封止形セ
ラミツクブツシングの製造方法は、ベローの両端
をセラミツクスリーブと貫通導体とにロー付けす
る際に、ベローの両端を固定具で固定して加熱炉
内でロー付け加熱を行うので、ベローにセラミツ
クスリーブと貫通導体の線膨張率の違いによる熱
応力が作用するのを回避することができる。従つ
て、ベローの寿命をのばすことができる。[Effects of the Invention] As explained above, in the method for manufacturing a double-sealed ceramic bushing according to the present invention, when brazing both ends of the bellows to a ceramic sleeve and a through conductor, both ends of the bellows are attached to a fixture. Since the bellows is fixed in place and brazed and heated in a heating furnace, it is possible to avoid thermal stress from acting on the bellows due to the difference in linear expansion coefficient between the ceramic sleeve and the through conductor. Therefore, the life of the bellows can be extended.
第１図は本発明に係る二重封止形セラミツクブ
ツシングの製造方法の一例を示す縦断面図、第２
図は本発明での加熱の昇温、降温の例を示す温度
曲線図である。
１…二重封止形セラミツクブツシング、２…セ
ラミツクスリーブ、３…貫通導体、６…封止部、
７…ベロー、８，９…封着金具、１０，１１…ロ
ー、１２…封止部、１５…固定具。
FIG. 1 is a longitudinal cross-sectional view showing an example of the method for manufacturing a double-sealed ceramic bushing according to the present invention, and FIG.
The figure is a temperature curve diagram showing an example of heating and cooling in the present invention. DESCRIPTION OF SYMBOLS 1...Double sealed ceramic bushing, 2...Ceramic sleeve, 3...Through conductor, 6...Sealing part,
7... Bellows, 8, 9... Sealing metal fittings, 10, 11... Rows, 12... Sealing portion, 15... Fixing tool.
Claims (1)
れ、前記セラミツクスリーブの両端で該セラミツ
クスリーブと前記貫通導体との封止が封止部でそ
れぞれ行われ、これら二重の封止部の一方にベロ
ーを用いている二重封止形セラミツクブツシング
の製造方法において、前記ベローを前記セラミツ
クスリーブと前記貫通導体とに加熱炉内でロー付
けする際に、前記貫通導体と前記セラミツクスリ
ーブ間の熱応力を前記ベローに加えないようにす
るための固定具を前記ベローの両端の封着金具間
に取付けて加熱を行うことを特徴とする二重封止
形セラミツクブツシングの製造方法。 ２ 前記固定具は該セラミツクブツシングの実使
用の最高温度で取り外すこを特徴とする特許請求
の範囲第１項記載の二重封止形セラミツクブツシ
ングの製造方法。[Scope of Claims] 1. A through conductor is passed through a ceramic sleeve, and sealing between the ceramic sleeve and the through conductor is performed at sealing portions at both ends of the ceramic sleeve, and these double seals In a method for manufacturing a double-sealed ceramic bushing in which a bellows is used on one of the parts, when the bellows is brazed to the ceramic sleeve and the through conductor in a heating furnace, the through conductor and the ceramic bushing are soldered together. A method for manufacturing a double-sealed ceramic bushing, characterized in that heating is performed by attaching a fixing device between the sealing fittings at both ends of the bellows to prevent thermal stress between the sleeves from being applied to the bellows. . 2. The method of manufacturing a double-sealed ceramic bushing according to claim 1, wherein the fixture is removed at the highest temperature at which the ceramic bushing is actually used.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21406687A JPS6457537A (en) | 1987-08-27 | 1987-08-27 | Manufacture of double-sealed type ceramic bushing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21406687A JPS6457537A (en) | 1987-08-27 | 1987-08-27 | Manufacture of double-sealed type ceramic bushing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6457537A JPS6457537A (en) | 1989-03-03 |
| JPH0345492B2 true JPH0345492B2 (en) | 1991-07-11 |
Family
ID=16649688
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21406687A Granted JPS6457537A (en) | 1987-08-27 | 1987-08-27 | Manufacture of double-sealed type ceramic bushing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6457537A (en) |
-
1987
- 1987-08-27 JP JP21406687A patent/JPS6457537A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6457537A (en) | 1989-03-03 |
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