JPH0345489B2 - - Google Patents
Info
- Publication number
- JPH0345489B2 JPH0345489B2 JP59105422A JP10542284A JPH0345489B2 JP H0345489 B2 JPH0345489 B2 JP H0345489B2 JP 59105422 A JP59105422 A JP 59105422A JP 10542284 A JP10542284 A JP 10542284A JP H0345489 B2 JPH0345489 B2 JP H0345489B2
- Authority
- JP
- Japan
- Prior art keywords
- tin oxide
- boron trifluoride
- electronic circuit
- trifluoride gas
- oxide film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Liquid Crystal (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10542284A JPS60249209A (ja) | 1984-05-24 | 1984-05-24 | 酸化錫膜の電子回路パタ−ンの形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10542284A JPS60249209A (ja) | 1984-05-24 | 1984-05-24 | 酸化錫膜の電子回路パタ−ンの形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60249209A JPS60249209A (ja) | 1985-12-09 |
| JPH0345489B2 true JPH0345489B2 (https=) | 1991-07-11 |
Family
ID=14407157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10542284A Granted JPS60249209A (ja) | 1984-05-24 | 1984-05-24 | 酸化錫膜の電子回路パタ−ンの形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60249209A (https=) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5670636A (en) * | 1979-11-14 | 1981-06-12 | Toshiba Corp | Gas plasma etching of transparent conductive film |
-
1984
- 1984-05-24 JP JP10542284A patent/JPS60249209A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60249209A (ja) | 1985-12-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |