JPS60249209A - 酸化錫膜の電子回路パタ−ンの形成方法 - Google Patents

酸化錫膜の電子回路パタ−ンの形成方法

Info

Publication number
JPS60249209A
JPS60249209A JP10542284A JP10542284A JPS60249209A JP S60249209 A JPS60249209 A JP S60249209A JP 10542284 A JP10542284 A JP 10542284A JP 10542284 A JP10542284 A JP 10542284A JP S60249209 A JPS60249209 A JP S60249209A
Authority
JP
Japan
Prior art keywords
tin oxide
electronic circuit
circuit pattern
oxide film
boron trifluoride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10542284A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0345489B2 (https=
Inventor
健治 内田
畑野　東一
英典 坂内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute for Materials Science
Original Assignee
National Institute for Research in Inorganic Material
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute for Research in Inorganic Material filed Critical National Institute for Research in Inorganic Material
Priority to JP10542284A priority Critical patent/JPS60249209A/ja
Publication of JPS60249209A publication Critical patent/JPS60249209A/ja
Publication of JPH0345489B2 publication Critical patent/JPH0345489B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Crystal (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)
JP10542284A 1984-05-24 1984-05-24 酸化錫膜の電子回路パタ−ンの形成方法 Granted JPS60249209A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10542284A JPS60249209A (ja) 1984-05-24 1984-05-24 酸化錫膜の電子回路パタ−ンの形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10542284A JPS60249209A (ja) 1984-05-24 1984-05-24 酸化錫膜の電子回路パタ−ンの形成方法

Publications (2)

Publication Number Publication Date
JPS60249209A true JPS60249209A (ja) 1985-12-09
JPH0345489B2 JPH0345489B2 (https=) 1991-07-11

Family

ID=14407157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10542284A Granted JPS60249209A (ja) 1984-05-24 1984-05-24 酸化錫膜の電子回路パタ−ンの形成方法

Country Status (1)

Country Link
JP (1) JPS60249209A (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5670636A (en) * 1979-11-14 1981-06-12 Toshiba Corp Gas plasma etching of transparent conductive film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5670636A (en) * 1979-11-14 1981-06-12 Toshiba Corp Gas plasma etching of transparent conductive film

Also Published As

Publication number Publication date
JPH0345489B2 (https=) 1991-07-11

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term