JPH0345413Y2 - - Google Patents

Info

Publication number
JPH0345413Y2
JPH0345413Y2 JP14834886U JP14834886U JPH0345413Y2 JP H0345413 Y2 JPH0345413 Y2 JP H0345413Y2 JP 14834886 U JP14834886 U JP 14834886U JP 14834886 U JP14834886 U JP 14834886U JP H0345413 Y2 JPH0345413 Y2 JP H0345413Y2
Authority
JP
Japan
Prior art keywords
emitter
temperature
liquid
gas
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14834886U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6354236U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14834886U priority Critical patent/JPH0345413Y2/ja
Publication of JPS6354236U publication Critical patent/JPS6354236U/ja
Application granted granted Critical
Publication of JPH0345413Y2 publication Critical patent/JPH0345413Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Electron Sources, Ion Sources (AREA)
JP14834886U 1986-09-26 1986-09-26 Expired JPH0345413Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14834886U JPH0345413Y2 (enrdf_load_stackoverflow) 1986-09-26 1986-09-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14834886U JPH0345413Y2 (enrdf_load_stackoverflow) 1986-09-26 1986-09-26

Publications (2)

Publication Number Publication Date
JPS6354236U JPS6354236U (enrdf_load_stackoverflow) 1988-04-12
JPH0345413Y2 true JPH0345413Y2 (enrdf_load_stackoverflow) 1991-09-25

Family

ID=31062531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14834886U Expired JPH0345413Y2 (enrdf_load_stackoverflow) 1986-09-26 1986-09-26

Country Status (1)

Country Link
JP (1) JPH0345413Y2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5086105B2 (ja) * 2008-01-07 2012-11-28 株式会社日立ハイテクノロジーズ ガス電界電離イオン源
JP5134439B2 (ja) * 2008-05-30 2013-01-30 株式会社日立ハイテクノロジーズ イオンビーム装置
JP5677365B2 (ja) * 2012-05-11 2015-02-25 株式会社日立ハイテクノロジーズ 荷電粒子顕微鏡

Also Published As

Publication number Publication date
JPS6354236U (enrdf_load_stackoverflow) 1988-04-12

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