JPH0344365B2 - - Google Patents
Info
- Publication number
- JPH0344365B2 JPH0344365B2 JP21254081A JP21254081A JPH0344365B2 JP H0344365 B2 JPH0344365 B2 JP H0344365B2 JP 21254081 A JP21254081 A JP 21254081A JP 21254081 A JP21254081 A JP 21254081A JP H0344365 B2 JPH0344365 B2 JP H0344365B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- substrate
- high permeability
- main
- bonding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000035699 permeability Effects 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 20
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 239000010408 film Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 7
- 239000000696 magnetic material Substances 0.000 claims description 3
- 238000001259 photo etching Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Description
【発明の詳細な説明】
本発明は主磁極部の製造方法に特徴を有する垂
直磁気記録用の主磁極補助磁極タイプの磁気ヘツ
ドの製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing a main pole auxiliary pole type magnetic head for perpendicular magnetic recording, which is characterized by a method of manufacturing a main pole portion.
本発明の目的は前記主磁極部を効率的に製造す
る方法を確立することにあり、構造的にも信頼性
が高いヘツドを製造することである。 An object of the present invention is to establish a method for efficiently manufacturing the main pole part, and to manufacture a head with high structural reliability.
現在、垂直磁気異方性を有する記録媒体と主磁
極補助磁極タイプのヘツドを組み合わせた垂直磁
気記録方式は記録密度を従来の磁気記録方式に較
べて飛躍的に高めることができるため研究が進め
られてきており実用化が検討される段階に至つて
いる。そのヘツドの概略を第１図に示す。記録媒
体４を間にはさんで対向する高透磁率膜からなる
主磁極部１及びコイル３をそのまわりに巻いた高
透磁率磁性体２からなる補助磁極部とで構成され
るヘツドである。主磁極部は記録媒体４に対向し
て接しており、前述の高透磁率磁性膜の厚みある
いは端部で記録媒体に記録される。主磁極補助磁
極タイプのヘツドの実用化のポイントは主磁極部
にあり、実用化のためには耐久性の高い主磁極部
の効率的製造方法を案出する必要がある。 Currently, research is progressing on a perpendicular magnetic recording system that combines a recording medium with perpendicular magnetic anisotropy and a main magnetic pole auxiliary magnetic pole type head, as it can dramatically increase recording density compared to conventional magnetic recording systems. It has reached the stage where practical application is being considered. A schematic diagram of the head is shown in FIG. The head is composed of a main magnetic pole part 1 made of a high magnetic permeability film facing each other with a recording medium 4 in between, and an auxiliary magnetic pole part made of a high permeability magnetic material 2 around which a coil 3 is wound. The main magnetic pole portion faces and contacts the recording medium 4, and is recorded on the recording medium by the thickness or edge of the high permeability magnetic film described above. The key to putting a main pole auxiliary pole type head to practical use lies in the main pole part, and in order to put it into practical use, it is necessary to devise an efficient manufacturing method for a highly durable main pole part.
第２図に一般的な主磁極部の製造方法を示す。
まず基板５上に高透磁率磁性膜６を所定厚みに形
成する（第２図ａ）。次に高透磁率磁性膜を、フ
オトエツチングプロセスを使つて所定のパターン
に形成する（第２図ｂ）。その後基板５と同一の
基板７を形成した高透磁率磁性膜を間にして貼り
合わせる。その後ヘツド先端の形状加工をして製
造される。この製造方法はフオトエツチング工程
を含んでいる点、量産性は劣る。本発明はこの点
に関して改善されており、フオトエツチング工程
を全く含んでいないので量産性に関してはるかに
優れている。 FIG. 2 shows a general method for manufacturing the main pole part.
First, a high permeability magnetic film 6 is formed to a predetermined thickness on a substrate 5 (FIG. 2a). Next, a high permeability magnetic film is formed into a predetermined pattern using a photoetching process (FIG. 2b). Thereafter, the substrate 5 and the same substrate 7 are bonded together with a high permeability magnetic film formed therebetween. The tip of the head is then shaped and manufactured. This manufacturing method includes a photoetching process, and is therefore inferior in mass productivity. The present invention is an improvement in this respect and is far superior in terms of mass productivity since it does not include any photoetching step.
第３図に本発明による主磁極部の製造方法の一
例を示す。まず非磁性基板すなわち基板８上にパ
ーマロイなどの高透磁率磁性膜９を所定厚みにス
パツタリング、あるいは真空蒸着、イオンプレー
テイング、無電解メツキなどの方法で形成する
（第３図ａ）。次に基板１０を基板８と高透磁率磁
性膜を間にして接着剤あるいは低融点ガラスを使
つて貼り合わせる（第３図ｂ）。そして貼り合わ
せた基板を記録トラツク幅寸法ｔに合わせて切断
する（第３図ｃ）。次に切断された板の両側に保
持材１１を貼り付け（第３図ｄ）、所定厚みに切
断して先端を加工研磨して主磁極部が出来上が
る。 FIG. 3 shows an example of a method for manufacturing a main pole portion according to the present invention. First, a high permeability magnetic film 9 such as permalloy is formed on a non-magnetic substrate 8 to a predetermined thickness by sputtering, vacuum deposition, ion plating, electroless plating, etc. (FIG. 3a). Next, the substrate 10 is bonded to the substrate 8 with a high permeability magnetic film in between using an adhesive or low melting point glass (FIG. 3b). Then, the bonded substrates are cut to match the recording track width dimension t (FIG. 3c). Next, holding materials 11 are attached to both sides of the cut plate (FIG. 3d), the plate is cut to a predetermined thickness, and the tip is processed and polished to complete the main pole part.
本例から明らかなようにフオトエツチング工程
を完全に省いており、量産性ははるかに向上して
いる。従来の主磁極部の構造では主磁極部先端の
基板と基板の貼り合わせ部分の隙間が高透磁率磁
性薄膜のある部分とない部分で異なり、後者の隙
間が広いため、劣下が速く、結果として主磁極部
先端全体の性能劣下を招いているが、本発明によ
る構造では主磁極部の磁気性能に関係する高透磁
率磁性薄膜のある貼り合わせ部全体に高透磁率磁
性薄膜が存在するため耐久性に秀れている。また
本発明の主磁極部の保持材として記録ビツトのト
リミング用の消去専用ヘツドを使用することもで
きる。また保持材と基板切片の材質を異なるもの
にしてもよい。例えば保持材は摩擦係数の小さい
摺動性の良いものを使用し、主磁極部のコア部基
板材質には耐摩耗性の良好なものを使用すれば、
ヘツドの摺動性、信頼性を高めることができる。 As is clear from this example, the photoetching process is completely omitted, and mass productivity is much improved. In the conventional structure of the main pole part, the gap between the bonded parts of the substrate and the substrate at the tip of the main pole part is different depending on the part with the high permeability magnetic thin film and the part without it, and because the latter gap is wide, deterioration occurs quickly, resulting in However, in the structure according to the present invention, a high permeability magnetic thin film exists in the entire bonded part where there is a high permeability magnetic thin film that is related to the magnetic performance of the main pole part. Therefore, it has excellent durability. Furthermore, an erase-only head for trimming recorded bits can also be used as the holding material for the main pole portion of the present invention. Further, the holding material and the substrate section may be made of different materials. For example, if you use a holding material with a low coefficient of friction and good sliding properties, and a material with good wear resistance for the core substrate of the main pole,
The slidability and reliability of the head can be improved.
以上述べてきたように本発明による主磁極部の
製造方法は量産性も高く構造的に信頼性も高くそ
の効果は大である。 As described above, the method of manufacturing the main magnetic pole part according to the present invention has high mass productivity, high structural reliability, and has great effects.
第１図は主磁極補助磁極タイプの磁気ヘツドを
使用する記録方式の概略図である。第２図は従来
の主磁極の製造方法を示す。第３図は本発明によ
る主磁極の製造方法を示す図。
１……主磁極部、２……高透磁率磁性体、３…
…コイル、４……垂直磁気記録媒体、５，７，
８，１０……基板、６，９……高透磁率磁性薄
膜、１１……保持材。
FIG. 1 is a schematic diagram of a recording system using a main pole auxiliary pole type magnetic head. FIG. 2 shows a conventional method of manufacturing a main pole. FIG. 3 is a diagram showing a method of manufacturing a main magnetic pole according to the present invention. 1...Main magnetic pole part, 2...High magnetic permeability magnetic material, 3...
... Coil, 4 ... Perpendicular magnetic recording medium, 5, 7,
8, 10... Substrate, 6, 9... High permeability magnetic thin film, 11... Holding material.
Claims (1)
磁性薄膜を有する主磁極部と、前記磁気記録媒体
の他方の面に対向しかつ前記主磁極部の端面に対
向するように設置された高透磁率磁性材及び前記
高透磁率性材のまわりに巻かれたコイルを有する
補助磁極部とを備える磁気ヘツドの製造方法にお
いて、 前記磁気ヘツドに用いられる前記主磁極部の製
造方法は、 第１の非磁性基板上に高透磁率磁性膜を形成す
る工程と、 前記高透磁率磁性膜が形成された前記第１の非
磁性基板に前記高透磁率磁性膜を介して第２の非
磁性基板を接合する工程と、 前記接合された前記第１の非磁性基板と前記高
透磁率磁性膜及び前記第２の非磁性基板とを切断
面が接合面に直角な方向で切断幅が磁気ヘツドの
記録幅となるように長片状に切断する工程と、 前記切断された前記非磁性基板の両側の切断面
に保持材を接合する工程と、 前記保持材が接合された前記第１と第２の非磁
性基板と前記高透磁率磁性薄膜と前記保持材とを
前記長片状の長手方向に対して直交するよう切断
する工程からなることを特徴とする磁気ヘツドの
製造方法。[Scope of Claims] 1. A main magnetic pole portion having a high magnetic permeability magnetic thin film facing one surface of a magnetic recording medium, and a main magnetic pole portion having a high permeability magnetic thin film facing the other surface of the magnetic recording medium and facing an end surface of the main magnetic pole portion. A method for manufacturing a magnetic head comprising a high magnetic permeability magnetic material and an auxiliary magnetic pole part having a coil wound around the high permeability material, comprising: a main magnetic pole part used in the magnetic head; The manufacturing method includes the steps of forming a high permeability magnetic film on a first non-magnetic substrate, and applying the high permeability magnetic film to the first non-magnetic substrate on which the high permeability magnetic film is formed. a step of bonding a second non-magnetic substrate; and a step of bonding the bonded first non-magnetic substrate, the high magnetic permeability magnetic film, and the second non-magnetic substrate so that a cut surface is perpendicular to the bonding surface. a step of cutting the non-magnetic substrate into a long piece so that the cutting width corresponds to a recording width of the magnetic head; a step of bonding a holding material to both cut surfaces of the cut non-magnetic substrate; and a step of bonding the holding material Manufacturing a magnetic head comprising the step of cutting the first and second nonmagnetic substrates, the high permeability magnetic thin film, and the holding material so as to be perpendicular to the longitudinal direction of the strip. Method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21254081A JPS58115625A (en) | 1981-12-28 | 1981-12-28 | Manufacture of magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21254081A JPS58115625A (en) | 1981-12-28 | 1981-12-28 | Manufacture of magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58115625A JPS58115625A (en) | 1983-07-09 |
| JPH0344365B2 true JPH0344365B2 (en) | 1991-07-05 |
Family
ID=16624361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21254081A Granted JPS58115625A (en) | 1981-12-28 | 1981-12-28 | Manufacture of magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58115625A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6555858B1 (en) * | 2000-11-15 | 2003-04-29 | Motorola, Inc. | Self-aligned magnetic clad write line and its method of formation |
-
1981
- 1981-12-28 JP JP21254081A patent/JPS58115625A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58115625A (en) | 1983-07-09 |
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