JPH0343771B2 - - Google Patents
Info
- Publication number
- JPH0343771B2 JPH0343771B2 JP58058733A JP5873383A JPH0343771B2 JP H0343771 B2 JPH0343771 B2 JP H0343771B2 JP 58058733 A JP58058733 A JP 58058733A JP 5873383 A JP5873383 A JP 5873383A JP H0343771 B2 JPH0343771 B2 JP H0343771B2
- Authority
- JP
- Japan
- Prior art keywords
- container
- cluster beam
- silicon
- nozzle
- deposited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/24—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using chemical vapour deposition [CVD]
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58058733A JPS59184519A (ja) | 1983-04-05 | 1983-04-05 | イオン化クラスタビーム発生方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58058733A JPS59184519A (ja) | 1983-04-05 | 1983-04-05 | イオン化クラスタビーム発生方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59184519A JPS59184519A (ja) | 1984-10-19 |
| JPH0343771B2 true JPH0343771B2 (online.php) | 1991-07-03 |
Family
ID=13092704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58058733A Granted JPS59184519A (ja) | 1983-04-05 | 1983-04-05 | イオン化クラスタビーム発生方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59184519A (online.php) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0527504Y2 (online.php) * | 1988-09-19 | 1993-07-13 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50105550A (online.php) * | 1973-12-11 | 1975-08-20 | ||
| JPS5121472A (online.php) * | 1974-08-16 | 1976-02-20 | Hitachi Ltd | |
| JPS5132423A (en) * | 1974-09-14 | 1976-03-19 | Nissan Chemical Ind Ltd | Igata no sakuseiho |
| AT360350B (de) * | 1978-07-27 | 1980-01-12 | Cremer Klaus | Vorrichtung zum ueberpruefen der geschwindigkeit eines kraftfahrzeuges |
-
1983
- 1983-04-05 JP JP58058733A patent/JPS59184519A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59184519A (ja) | 1984-10-19 |
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