JPH0343730U - - Google Patents
Info
- Publication number
- JPH0343730U JPH0343730U JP10424789U JP10424789U JPH0343730U JP H0343730 U JPH0343730 U JP H0343730U JP 10424789 U JP10424789 U JP 10424789U JP 10424789 U JP10424789 U JP 10424789U JP H0343730 U JPH0343730 U JP H0343730U
- Authority
- JP
- Japan
- Prior art keywords
- flow channel
- tray
- vapor
- substrate
- portable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000001947 vapour-phase growth Methods 0.000 claims description 7
- 230000007723 transport mechanism Effects 0.000 claims 2
- 230000032258 transport Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10424789U JP2505425Y2 (ja) | 1989-09-05 | 1989-09-05 | 気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10424789U JP2505425Y2 (ja) | 1989-09-05 | 1989-09-05 | 気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0343730U true JPH0343730U (es) | 1991-04-24 |
| JP2505425Y2 JP2505425Y2 (ja) | 1996-07-31 |
Family
ID=31653048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10424789U Expired - Lifetime JP2505425Y2 (ja) | 1989-09-05 | 1989-09-05 | 気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2505425Y2 (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013026429A (ja) * | 2011-07-21 | 2013-02-04 | Toshiba Corp | 半導体製造装置 |
-
1989
- 1989-09-05 JP JP10424789U patent/JP2505425Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013026429A (ja) * | 2011-07-21 | 2013-02-04 | Toshiba Corp | 半導体製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2505425Y2 (ja) | 1996-07-31 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term | ||
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R323531 |
|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R323533 |
|
| R370 | Written measure of declining of transfer procedure |
Free format text: JAPANESE INTERMEDIATE CODE: R370 |