JPH03125060U - - Google Patents
Info
- Publication number
- JPH03125060U JPH03125060U JP3047790U JP3047790U JPH03125060U JP H03125060 U JPH03125060 U JP H03125060U JP 3047790 U JP3047790 U JP 3047790U JP 3047790 U JP3047790 U JP 3047790U JP H03125060 U JPH03125060 U JP H03125060U
- Authority
- JP
- Japan
- Prior art keywords
- target part
- vapor deposition
- deposition apparatus
- cover
- arc vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 238000007664 blowing Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3047790U JPH03125060U (es) | 1990-03-27 | 1990-03-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3047790U JPH03125060U (es) | 1990-03-27 | 1990-03-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03125060U true JPH03125060U (es) | 1991-12-18 |
Family
ID=31533188
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3047790U Pending JPH03125060U (es) | 1990-03-27 | 1990-03-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03125060U (es) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08283933A (ja) * | 1995-04-07 | 1996-10-29 | Nissin Electric Co Ltd | アーク式蒸発源 |
-
1990
- 1990-03-27 JP JP3047790U patent/JPH03125060U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08283933A (ja) * | 1995-04-07 | 1996-10-29 | Nissin Electric Co Ltd | アーク式蒸発源 |