JPH0339835U - - Google Patents

Info

Publication number
JPH0339835U
JPH0339835U JP10170589U JP10170589U JPH0339835U JP H0339835 U JPH0339835 U JP H0339835U JP 10170589 U JP10170589 U JP 10170589U JP 10170589 U JP10170589 U JP 10170589U JP H0339835 U JPH0339835 U JP H0339835U
Authority
JP
Japan
Prior art keywords
susceptor
thin film
vapor phase
phase growth
growth apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10170589U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0735382Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10170589U priority Critical patent/JPH0735382Y2/ja
Publication of JPH0339835U publication Critical patent/JPH0339835U/ja
Application granted granted Critical
Publication of JPH0735382Y2 publication Critical patent/JPH0735382Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP10170589U 1989-08-30 1989-08-30 薄膜気相成長装置 Expired - Fee Related JPH0735382Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10170589U JPH0735382Y2 (ja) 1989-08-30 1989-08-30 薄膜気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10170589U JPH0735382Y2 (ja) 1989-08-30 1989-08-30 薄膜気相成長装置

Publications (2)

Publication Number Publication Date
JPH0339835U true JPH0339835U (US20020051482A1-20020502-M00012.png) 1991-04-17
JPH0735382Y2 JPH0735382Y2 (ja) 1995-08-09

Family

ID=31650641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10170589U Expired - Fee Related JPH0735382Y2 (ja) 1989-08-30 1989-08-30 薄膜気相成長装置

Country Status (1)

Country Link
JP (1) JPH0735382Y2 (US20020051482A1-20020502-M00012.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006043531A1 (ja) * 2004-10-19 2006-04-27 Canon Anelva Corporation 基板支持・搬送用トレイ
JP2007211336A (ja) * 2006-01-12 2007-08-23 Sharp Corp 気相成長装置および気相成長方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006043531A1 (ja) * 2004-10-19 2006-04-27 Canon Anelva Corporation 基板支持・搬送用トレイ
US7780440B2 (en) 2004-10-19 2010-08-24 Canon Anelva Corporation Substrate supporting/transferring tray
US8147242B2 (en) 2004-10-19 2012-04-03 Canon Anelva Corporation Substrate supporting/transferring tray
JP2007211336A (ja) * 2006-01-12 2007-08-23 Sharp Corp 気相成長装置および気相成長方法

Also Published As

Publication number Publication date
JPH0735382Y2 (ja) 1995-08-09

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Legal Events

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