JPH0339691Y2 - - Google Patents
Info
- Publication number
- JPH0339691Y2 JPH0339691Y2 JP1989132140U JP13214089U JPH0339691Y2 JP H0339691 Y2 JPH0339691 Y2 JP H0339691Y2 JP 1989132140 U JP1989132140 U JP 1989132140U JP 13214089 U JP13214089 U JP 13214089U JP H0339691 Y2 JPH0339691 Y2 JP H0339691Y2
- Authority
- JP
- Japan
- Prior art keywords
- carrier sheet
- measuring
- temperature
- resistor
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000001419 dependent effect Effects 0.000 claims description 19
- 239000002985 plastic film Substances 0.000 claims description 12
- 239000004020 conductor Substances 0.000 claims description 11
- 239000000523 sample Substances 0.000 claims description 10
- 239000010410 layer Substances 0.000 claims description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- 238000005259 measurement Methods 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 238000005260 corrosion Methods 0.000 claims description 4
- 230000007797 corrosion Effects 0.000 claims description 4
- 230000002209 hydrophobic effect Effects 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 239000011241 protective layer Substances 0.000 claims description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 3
- 238000002485 combustion reaction Methods 0.000 claims description 2
- 238000011156 evaluation Methods 0.000 claims description 2
- 239000000446 fuel Substances 0.000 claims description 2
- HCDGVLDPFQMKDK-UHFFFAOYSA-N hexafluoropropylene Chemical group FC(F)=C(F)C(F)(F)F HCDGVLDPFQMKDK-UHFFFAOYSA-N 0.000 claims description 2
- UQEAIHBTYFGYIE-UHFFFAOYSA-N hexamethyldisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)C UQEAIHBTYFGYIE-UHFFFAOYSA-N 0.000 claims description 2
- 239000004033 plastic Substances 0.000 claims description 2
- 229920003023 plastic Polymers 0.000 claims description 2
- 229920000642 polymer Polymers 0.000 claims description 2
- 229920002457 flexible plastic Polymers 0.000 claims 1
- 150000003481 tantalum Chemical class 0.000 claims 1
- 239000012528 membrane Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 238000005530 etching Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 239000012876 carrier material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
- G01F1/692—Thin-film arrangements
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19792919433 DE2919433A1 (de) | 1979-05-15 | 1979-05-15 | Messonde zur messung der masse und/oder temperatur eines stroemenden mediums und verfahren zu ihrer herstellung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02120026U JPH02120026U (US20020051482A1-20020502-M00012.png) | 1990-09-27 |
| JPH0339691Y2 true JPH0339691Y2 (US20020051482A1-20020502-M00012.png) | 1991-08-21 |
Family
ID=6070713
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6289980A Pending JPS564014A (en) | 1979-05-15 | 1980-05-14 | Probe for measuring mass and*or temperature of flowing medium and manufacturing method of said probe |
| JP1989132140U Expired JPH0339691Y2 (US20020051482A1-20020502-M00012.png) | 1979-05-15 | 1989-11-15 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6289980A Pending JPS564014A (en) | 1979-05-15 | 1980-05-14 | Probe for measuring mass and*or temperature of flowing medium and manufacturing method of said probe |
Country Status (4)
Families Citing this family (52)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3111948A1 (de) * | 1981-03-26 | 1982-10-07 | Robert Bosch Gmbh, 7000 Stuttgart | Schneller temperatursensor fuer eine brennkraftmaschine |
| DE3115654A1 (de) * | 1981-04-18 | 1982-11-04 | Robert Bosch Gmbh, 7000 Stuttgart | Vorrichtung zur messung der masse eines stroemenden mediums, insbesondere zur messung der brennkraftmaschinen zugefuehrten kraftstoffmasse |
| DE3127081C2 (de) * | 1981-07-09 | 1985-01-24 | Degussa Ag, 6000 Frankfurt | Vorrichtung zur Messung der Strömungsgeschwindigkeit von Gasen und Flüssigkeiten |
| DE3138910A1 (de) * | 1981-09-30 | 1983-04-14 | Siemens AG, 1000 Berlin und 8000 München | Mengendurchflussmesser |
| DE3279831D1 (en) * | 1981-10-09 | 1989-08-24 | Honeywell Inc | Integrated semiconductor device and method of fabricating said device |
| DE3208096A1 (de) * | 1982-03-06 | 1983-09-15 | Robert Bosch Gmbh, 7000 Stuttgart | Messsonde zur bestimmung der masse und/oder temperatur eines stroemenden mediums |
| DE3208145C2 (de) * | 1982-03-06 | 1986-10-09 | Viscotherm AG, Hinteregg, Zürich | Sender- bzw. Empfängerelement für eine nach dem Wärmeimpfverfahren arbeitende Durchfluß-Meßvorrichtung und unter Verwendung dieser Elemente gebaute Vorrichtung |
| DE3231345C3 (de) * | 1982-08-24 | 1994-11-17 | Bosch Gmbh Robert | Verfahren zur Herstellung von Sonden zur Messung der Masse und/oder Temperatur eines strömenden Mediums |
| DE3328852A1 (de) * | 1983-08-10 | 1985-02-28 | Robert Bosch Gmbh, 7000 Stuttgart | Vorrichtung zur messung der masse eines stroemenden mediums |
| GB2145229B (en) * | 1983-08-19 | 1987-01-14 | Emi Ltd | Heat detecting arrangement |
| US4542650A (en) * | 1983-08-26 | 1985-09-24 | Innovus | Thermal mass flow meter |
| EP0134859A1 (en) * | 1983-09-21 | 1985-03-27 | Honeywell Inc. | Fluid flow sensors |
| US4790181A (en) * | 1983-12-01 | 1988-12-13 | Aine Harry E | Thermal mass flow meter and method of making same |
| US4691566A (en) * | 1984-12-07 | 1987-09-08 | Aine Harry E | Immersed thermal fluid flow sensor |
| US4633578A (en) * | 1983-12-01 | 1987-01-06 | Aine Harry E | Miniature thermal fluid flow sensors and batch methods of making same |
| JPS60236024A (ja) * | 1984-05-09 | 1985-11-22 | Nippon Soken Inc | 直熱型空気流量センサ |
| DE3417305A1 (de) * | 1984-05-10 | 1985-11-14 | Robert Bosch Gmbh, 7000 Stuttgart | Vorrichtung zur messung der masse eines stroemenden mediums |
| DE3422690A1 (de) * | 1984-06-19 | 1985-12-19 | Wolfgang Dipl.-Ing. 1000 Berlin Merkel | Thermischer durchflussmesser |
| US4576050A (en) * | 1984-08-29 | 1986-03-18 | General Motors Corporation | Thermal diffusion fluid flow sensor |
| DE3504082A1 (de) * | 1985-02-07 | 1986-08-07 | Robert Bosch Gmbh, 7000 Stuttgart | Verfahren und vorrichtung zur messung der masse eines stroemenden mediums |
| DE3604202C2 (de) * | 1985-02-14 | 1997-01-09 | Nippon Denso Co | Direkt beheizte Strömungsmeßvorrichtung |
| JPS61188901A (ja) * | 1985-02-16 | 1986-08-22 | 株式会社日本自動車部品総合研究所 | 流量センサ用膜式抵抗 |
| US4685331A (en) * | 1985-04-10 | 1987-08-11 | Innovus | Thermal mass flowmeter and controller |
| SE447318B (sv) * | 1985-05-21 | 1986-11-03 | Nils Goran Stemme | Integrerad halvledarkrets med fog av termiskt isolerande fogemne, sett att framstella kretsen samt dess anvendning i en flodesmetare |
| JPS61274222A (ja) * | 1985-05-30 | 1986-12-04 | Sharp Corp | 流量センサ |
| US4776214A (en) * | 1985-08-09 | 1988-10-11 | Motorola, Inc. | Mass air flow sensor |
| GB2179748B (en) * | 1985-08-20 | 1989-09-06 | Sharp Kk | Thermal flow sensor |
| US4771271A (en) * | 1987-03-11 | 1988-09-13 | Ford Motor Company | Silicon based low level liquid sensor having a fast response time |
| US4854167A (en) * | 1987-09-09 | 1989-08-08 | Motorola Inc. | Mass fluid flow sensor |
| DE3829195A1 (de) * | 1988-08-29 | 1990-03-08 | Bosch Gmbh Robert | Temperaturfuehler |
| DE3833967A1 (de) * | 1988-10-06 | 1990-04-12 | Hiss Eckart | Messgehaeuse |
| DE4009833C2 (de) * | 1989-03-31 | 1996-09-26 | Aisan Ind | Luftmengenmeßeinrichtung für Ansaugluft |
| DE4025715C1 (US20020051482A1-20020502-M00012.png) * | 1990-08-14 | 1992-04-02 | Robert Bosch Gmbh, 7000 Stuttgart, De | |
| JPH05215583A (ja) * | 1992-02-04 | 1993-08-24 | Mitsubishi Electric Corp | 感熱式流量センサ |
| KR100223504B1 (ko) * | 1992-08-28 | 1999-10-15 | 다카노 야스아키 | 혼성 집적 회로 장치 |
| JP2908942B2 (ja) * | 1992-08-28 | 1999-06-23 | 三菱電機株式会社 | 感熱式流量センサ |
| JP3196395B2 (ja) * | 1993-02-18 | 2001-08-06 | 株式会社村田製作所 | 抵抗温度センサ |
| US5576488A (en) * | 1994-11-21 | 1996-11-19 | The United States Of America As Represented By The United States National Aeronautics And Space Administration | Micro-sensor thin-film anemometer |
| DE19504572C2 (de) * | 1995-02-11 | 1999-02-04 | Hella Kg Hueck & Co | Temperaturfühleranordnung |
| DE19719010C2 (de) * | 1996-05-24 | 2003-04-30 | Ifm Electronic Gmbh | Wärmeübergangskontroll- und/oder -meßgerät |
| DE19621000C2 (de) * | 1996-05-24 | 1999-01-28 | Heraeus Sensor Nite Gmbh | Temperatur-Sensor mit einem Meßwiderstand |
| DE19904419B4 (de) * | 1998-02-08 | 2008-06-26 | Paul Rüster & Co. Inhaber Uwe Nowak GmbH | Nutenwiderstandsthermometer |
| SE511682C2 (sv) * | 1998-03-05 | 1999-11-08 | Etchtech Sweden Ab | Motstånd i elektriska ledare på eller i mönsterkort, substrat och halvledarbrickor |
| DE19847303B4 (de) * | 1998-10-14 | 2006-11-30 | Robert Bosch Gmbh | Sensorelement mit antiadhäsiver Oberflächenbeschichtung |
| DE19905384A1 (de) * | 1999-02-10 | 2000-08-17 | Holzschuh Gmbh & Co Kg | Sensor und Verfahren zu dessen Herstellung |
| DE19957991C2 (de) * | 1999-12-02 | 2002-01-31 | Daimler Chrysler Ag | Anordnung einer Heizschicht für einen Hochtemperaturgassensor |
| US6631638B2 (en) | 2001-01-30 | 2003-10-14 | Rosemount Aerospace Inc. | Fluid flow sensor |
| DE10124964B4 (de) * | 2001-05-21 | 2004-02-05 | Forschungszentrum Karlsruhe Gmbh | Sensor zur Messung von Strömungsgeschwindigkeiten und Verfahren zu dessen Betrieb |
| DE102006022290B4 (de) * | 2006-05-11 | 2009-07-23 | Heraeus Sensor Technology Gmbh | Heizer mit integriertem Temperatursensor auf Träger |
| DE102008006831A1 (de) * | 2008-01-30 | 2009-08-13 | Eads Deutschland Gmbh | Heißfilmsensor |
| MX343584B (es) | 2009-11-04 | 2016-11-10 | Ssw Holding Co Inc | Superficies de equipos de coccion que tienen una estructura para la contencion de derrames y metodos de fabricarlas. |
| DE102012204817B4 (de) | 2012-03-12 | 2020-09-10 | PGT Thermprozesstechnik GmbH | Temperatursensor |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49103686A (US20020051482A1-20020502-M00012.png) * | 1973-02-02 | 1974-10-01 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2389915A (en) * | 1942-01-29 | 1945-11-27 | Bell Telephone Labor Inc | Resistor device |
| US3201736A (en) * | 1962-05-28 | 1965-08-17 | Energy Conversion Devices Inc | Temperature responsive resistance device |
| US3343114A (en) * | 1963-12-30 | 1967-09-19 | Texas Instruments Inc | Temperature transducer |
| DE1270864B (de) * | 1963-12-31 | 1968-06-20 | Martin Hornig | Einrichtung zur Messung der Stroemungsgeschwindigkeit eines Mediums |
| US3575053A (en) * | 1968-07-11 | 1971-04-13 | Mc Donnell Douglas Corp | Cryogenic linear temperature sensor |
| US3748174A (en) * | 1968-12-30 | 1973-07-24 | Gen Electric | Thin film nickel temperature sensor |
| DE1904029A1 (de) * | 1969-01-28 | 1970-08-06 | Mueller Dipl Ing W K | Thermisches Volumenstrommessverfahren fuer Fluessigkeiten und Gase |
| CH510873A (de) * | 1969-07-08 | 1971-07-31 | Mettler Instrumente Ag | Elektrisches Widerstandsthermometer |
| US3992940A (en) * | 1973-11-02 | 1976-11-23 | Chrysler Corporation | Solid state fluid flow sensor |
| US3966578A (en) * | 1974-01-17 | 1976-06-29 | Ceramic Magnetics, Inc. | Method of making thin film thermistor |
| DE2408246C3 (de) * | 1974-02-21 | 1981-10-15 | Bopp & Reuther Gmbh, 6800 Mannheim | Durchflußmeßgerät |
| US3931736A (en) * | 1974-06-28 | 1976-01-13 | Rca Corporation | Improved fluid flow sensor configuration |
| JPS5189135U (US20020051482A1-20020502-M00012.png) * | 1975-01-09 | 1976-07-16 | ||
| US3991613A (en) * | 1975-03-10 | 1976-11-16 | Corning Glass Works | Sensing element for flow meter |
| US3996799A (en) * | 1975-09-29 | 1976-12-14 | Putten Antonius Ferdinandus Pe | Device for measuring the flow velocity of a medium |
| US4079350A (en) * | 1976-11-11 | 1978-03-14 | Gte Sylvania Incorporated | Thermistor sensors |
| US4160969A (en) * | 1976-12-27 | 1979-07-10 | The Garrett Corporation | Transducer and method of making |
-
1979
- 1979-05-15 DE DE19792919433 patent/DE2919433A1/de active Granted
-
1980
- 1980-04-28 DE DE8080102295T patent/DE3066137D1/de not_active Expired
- 1980-04-28 EP EP80102295A patent/EP0019135B1/de not_active Expired
- 1980-05-08 US US06/147,713 patent/US4345465A/en not_active Expired - Lifetime
- 1980-05-14 JP JP6289980A patent/JPS564014A/ja active Pending
-
1989
- 1989-11-15 JP JP1989132140U patent/JPH0339691Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49103686A (US20020051482A1-20020502-M00012.png) * | 1973-02-02 | 1974-10-01 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2919433C2 (US20020051482A1-20020502-M00012.png) | 1987-01-22 |
| JPS564014A (en) | 1981-01-16 |
| JPH02120026U (US20020051482A1-20020502-M00012.png) | 1990-09-27 |
| DE2919433A1 (de) | 1980-12-04 |
| EP0019135A2 (de) | 1980-11-26 |
| EP0019135A3 (en) | 1981-01-14 |
| EP0019135B1 (de) | 1984-01-18 |
| US4345465A (en) | 1982-08-24 |
| DE3066137D1 (en) | 1984-02-23 |
