JPH0338717Y2 - - Google Patents

Description

[Detailed Description of the Invention] Technical Field The present invention relates to a vibration isolation table for use with measuring instruments, precision instruments, etc. mounted thereon, and in particular, an object to be measured or a workpiece to be mounted on the vibration isolation table. This makes it easy to load and unload the vehicle.

Conventional Description Fig. 3 is a partial schematic side view showing an example of a vibration isolation table to which the present invention is applied. In the figure, 1 is a mounting plate on which precision equipment is mounted, 2 is an air spring chamber, and 3 is an air An auxiliary air reservoir communicating with the spring chamber 2; 4 a probe fixed to the mounting plate 1; 5 a compressed air supply pipe; 6 a control valve; 7 a pipe connecting the control valve 6 and the auxiliary air reservoir 3; As is well known, when a precision instrument is mounted on the mounting plate 1 and used, the mounting plate 1 is attached to an air spring 2 in order to prevent external vibrations from being transmitted to the precision instrument. It has elastic support. However, in the above-mentioned vibration isolation table, there is a problem in that the level of the mounting plate 1 varies depending on the weight of the precision equipment mounted on the mounting plate 1. The probe 4 and the control valve 6 are provided to solve such problems. For example, when the precision equipment is heavy, the mounting plate 1
The level of the probe 4 decreases, and accordingly, the level of the probe 4 also decreases, but when the probe 4 decreases, the supply valve of the control valve 6 operates, and compressed air from a compressed air source (not shown) is supplied to the pipe 5, the control valve 6, It is supplied to the auxiliary air reservoir 3 through the pipe 7 and increases the pressure in the air spring 2. In this way, when the pressure in the air spring 2 rises, the mounting plate 1 rises, and the probe 4 rises accordingly, and when the probe 4 reaches a predetermined level, the supply valve of the control valve 6 operates. The supply of air into the air spring 2 is stopped and the mounting plate 1 and thus the precision equipment are maintained at their predetermined level. On the other hand, if the weight of the precision equipment mounted on the mounting plate 1 is light, the mounting plate 1 and the probe 4 will rise, the exhaust valve of the control valve 6 will open, and the air in the auxiliary air reservoir 3 will be discharged from the pipe 7. It is exhausted to the atmosphere through the exhaust valve of the control valve 6, and the air pressure in the air spring 2 is reduced. In this way, when the air pressure in the air spring 2 decreases, the mounting plate 1 descends, and the probe 4 also descends accordingly. When the probe 4 reaches a predetermined level, the exhaust valve of the control valve 6 is closed and the air is discharged. The discharge of the mounting plate 1 and therefore the precision equipment is maintained at its predetermined level.

FIG. 4 shows the air spring 2 and the auxiliary air reservoir 3.
In the figure, 8 is a receiving member for receiving the mounting plate 1, 9 is a diaphragm, and 10 is a small diameter communication hole that communicates the air spring chamber 2 and the auxiliary air chamber 3, as described above. A mounting plate 1 is placed on the receiving member 8, and a precision instrument or a precision processing machine is mounted on the mounting plate 1, so that external vibrations are not transmitted to the precision instrument. to, or
The mounting plate 1 is elastically supported by air springs so that vibrations from the precision processing machine are not transmitted to the outside. Of course, it is also possible to use one vibration isolation table as described above and place the mounting plate 1 on the receiving member 8, but in reality, the receiving member 8 is suspended by the diaphragm 9. Therefore, since the receiving member 8 is likely to tilt, at least three vibration isolating tables as described above are used to support the mounting plate 1.

FIG. 5 is a diagram showing an example of the air spring height control device 6 shown in FIG.
2 is provided with a lever or swing plate 14 pivotally connected to its upper end by a pin 13, and the swing plate 14 is always urged upwardly by a spring 15 so as to always engage the probe 4. has been done. Inside the main body 12 is a lifting body 16 (i.e., a valve assembly).
A port 18 is provided in one side of the main body 12 and communicates with the chamber 17 through a communication path 19. The air pipe 5 is connected to the port 18
port 2 is now connected, and port 2
0 is connected to an air pipe 7.
Therefore, an air source (not shown) is connected to the port 18 via the air pipe 5, and an auxiliary air reservoir 3 is connected to the port 20 via the air pipe 7. The elevating body 16 housed in the chamber 17 has a spring 21
The guide pin 22 is guided by a guide pin 22 projecting into the chamber 17 so as to be able to move vertically. The elevating body 16 is provided with a valve seat 23 that opens and closes the communication passage 19.
is fixed, and the valve seat 23 and the communication passage 19 constitute a supply valve for supplying operating air into the air spring 2. The center of the upper part of the elevating body 16 is a valve head 24 formed in a nozzle shape.
A passageway 25 is provided which opens to 4. A sealing member 26 is attached to the lower surface of the rocking plate 14 as a valve seat through the valve head 24, and the sealing member 26, the rocking plate 14, and the valve head 24 are connected to the air spring 2.
It constitutes a discharge valve for discharging working air from inside. Therefore, if a part of the mounting plate 1 now moves to a higher position than the illustrated equilibrium state (if the equipment to be mounted is light), the swing plate 14 will move toward the probe 4.
According to the rise of the air pressure, the passage 25 of the valve head 24 is opened by being pushed up by the spring 15, and the air in the air spring 2 passes through the auxiliary air reservoir 3 and the air pipe 7 to the port 2.
0 and is further discharged into the atmosphere through the passage 25 of the valve head 24. Therefore, the air spring 2 is pushed down, the mounting plate 1 is lowered, and the probe 4 is also lowered, so that the swing plate 14 is pushed down. the result,
The passage 25 of the valve head 24 is closed and the release of air from within the air spring 2 is stopped, and the lowering of the mounting plate 1 no longer progresses and stops at the equilibrium state shown.
On the other hand, if the mounting plate is displaced below the equilibrium state shown in the figure (if the mounted equipment is heavy), the swinging plate 14 is pushed down by the lowering of the probe 4, and the valve head 24 is pushed down. , the valve seat 23 integrated with the elevating body 16 also moves downward. As a result, the communication path 19
is opened, the chamber 17 and the port 18 communicate with each other, and compressed air is fed into the chamber 17 from the air source communicating with the port 18 via the air pipe 5, and further into the air spring 2 via the air pipe 7. inserted into. For this reason,
The air spring 2 is pushed up and the mounting plate 1 is lifted upward. Therefore, the probe 4 integrated with the mounting plate 1 rises, the swinging plate 14 is also pushed up by the spring 15 and follows the probe 4, and the elevating body 16 also moves up and down by the spring 2.
1, the valve seat 23 closes the communication passage 19 and enters the equilibrium state shown in the figure.

In the above-mentioned vibration isolation table, a precision measuring machine, a precision processing machine, etc. are mounted on the mounting plate 1 to inspect the workpiece, process the workpiece, etc. An object to be measured or a workpiece to be processed is placed on and off the mounting plate 1. However, according to the above-mentioned conventional technology, when an object is placed on or off the mounting plate 1, if the load applied to the mounting plate 1 changes, the mounting plate 1 moves up and down, making the work very difficult. , it was dangerous.

Purpose The present invention was developed in view of the above-mentioned circumstances, and in particular, the purpose of this invention is to make it easier to place objects on and off the vibration isolating table using an air spring type vibration isolating table. This was done as a.

Configuration Figure 1 is a block diagram for explaining one embodiment of the vibration isolating table according to the present invention, and in the figure, the vibration isolating table has the same structure as the vibration isolating table shown in Figures 3 to 5. Parts are provided with the same reference numerals as in FIGS. 3-5. In FIG. 1, 31 is an air source, 32 is a stop valve, 33 is a regulator with a filter, 34 is a check valve, and 35 is an exhaust stop valve.
When loading or unloading an object, the valve is operated to reduce the air pressure in the air spring 2 to eliminate the action of the air spring, thereby making it easier to load or unload the object and to maintain the desired air pressure after loading. It is. That is, in FIG. 1, when an object is placed on or off the air spring 2, the stop valve 32 is closed and the exhaust-like stop valve 35 is opened. The air is discharged through the check valve 34 and the exhaust stop valve 35, and the pedestal 8 of the air spring 2 is lowered, so when the pedestal 8 reaches the lowest position and the exhaust stop valve 35 is closed, the auxiliary air reservoir 3 Moreover, an object can be placed on the mounting plate 1 and an object can be taken off from the mounting plate 1 with the pedestal 8 in a stable state without wasting much of the air in the air spring chamber 2. However, in this embodiment, the air in the auxiliary air reservoir 3 and the air spring chamber 2
Since the air in the auxiliary air reservoir 3 is exhausted, the amount of exhausted air is large, resulting in a lot of wasteful use of compressed air.Furthermore, after exhausting air, a large amount of air remains in the auxiliary air reservoir 3. Even when the platform 8 is lowered to the lowest position, if an object is removed from the mounting plate 1 and the weight on the mounting plate 1 becomes lighter, the air pressure remaining in the auxiliary air reservoir 3 and the air spring chamber 2 will be increased. As a result, the mounting plate 1 is lifted up to some extent, and it is not necessarily possible to completely fix the mounting plate in a stable state.

FIG. 2 is a diagram for explaining an embodiment that solves the drawbacks of the embodiment shown in FIG. The same reference numbers as in FIG. 1 are provided. Therefore, in this embodiment, a stop valve 36 is provided between the auxiliary air reservoir 3 and the air spring chamber 2.
In this case, after closing the stop valve 36, the exhaust stop valve 35 is opened to exhaust only the air inside the air spring chamber 2, thereby reducing the amount of exhausted air. In addition, even if the load on the mounting plate 1 becomes lighter, the mounting plate 1 hardly rises due to the residual air pressure. Furthermore, as mentioned above,
After placing the object on the mounting plate 1 or removing the object from the mounting plate 1 with the mounting plate 1 in the lowest stable position, the exhaust valve is closed and the stop valve 36 is opened (as shown in the embodiment shown in FIG. 2). case), when the air supply stop valve 32 is opened, compressed air is supplied from the air source 31 into the auxiliary air reservoir 3 and the air spring chamber 2,
The air spring 2 is in its normal operating state.

Effects As is clear from the above explanation, according to the present invention, in an air spring-type vibration isolating table, an object can be completely and easily mounted on the vibration isolating table, or an object can be safely removed from the vibration isolating table. It can be easily lowered.

[Brief explanation of the drawing]

1 and 2 are block diagrams for explaining an embodiment of the vibration isolating device according to the present invention, respectively;
3 to 5 are diagrams for explaining an example of a vibration isolation table to which the present invention is applied. 1... Mounting plate, 2... Air spring (chamber), 3... Auxiliary air reservoir, 4... Probe, 6... Control valve, 8... Rest, 9... Diaphragm, 10... Orifice, 32
...Air supply stop valve, 34...Check valve, 35...
Exhaust stop valve, 36...stop valve.

Claims (1)

[Scope of utility model registration request] It has a mounting plate for placing objects such as equipment, and a pneumatic spring device supporting the mounting plate, and the amount of supply and exhaust of working air to the pneumatic spring device is adjusted according to the height of the mounting plate. In the vibration isolating device configured to maintain the mounting plate at a reference height by controlling the air pressure spring device, an exhaust stop valve is connected to the pneumatic spring device via a check valve, and the exhaust stop valve is connected to the air pressure spring device via a check valve. A vibration isolating device characterized in that the mounting plate can be brought into a stable state at the lowest position by using the vibration isolating device.