JPH0338689Y2 - - Google Patents

Description

[Detailed Description of the Invention] Detailed Description of the Invention The present invention relates to an apparatus for analyzing the surface of a sample, such as an Augier electron analyzer or a SIMS apparatus.

In an Augier electron analyzer or SIMS (secondary ion mass spectrometer), secondary electrons (Auger electrons) or secondary ions generated by irradiation with a primary charged particle beam are guided to an analyzer and their energy analysis is performed. However, since the secondary charged particle beam is generated only from the surface layer of the sample,
Analysis by these devices is surface analysis. Therefore, contamination on the surface of a sample is absolutely prohibited in a surface analysis device, and polishing of the sample surface is required to remove the contamination and to enable analysis in the depth direction of the sample. To meet this demand, conventional methods have been put into practice in which an ion gun is installed in the sample chamber, and etching is performed by ion shower from the ion gun, and mechanical polishing is performed using a grindstone. However, in the former case, etching takes a long time, and since the etching depth varies depending on the surface composition, the linearity in the depth direction is extremely poor.Also, only compositions that are difficult to etch remain, so as the depth direction analysis progresses, the etching process becomes more difficult. This has the problem of increased errors.
In addition, the latter method requires many hours of polishing, which takes time to prepare the sample, and in the case of oblique polishing, there is a limit to how small the inclination angle can be, making it impractical.

The present invention aims to solve the above-mentioned drawbacks, and its configuration is characterized by a sample chamber containing a test sample, a means for irradiating the sample with a primary charged particle beam or radiation, and a means for irradiating the sample with a primary charged particle beam or radiation. In an apparatus equipped with an analyzer that analyzes secondary charged particles generated from a sample by irradiation with a particle beam or the like, a tool with a cutting blade is placed in the sample chamber, and the tool and the sample are placed relative to each other. A means for moving the cutting blade is provided, and the cutting blade has a surface whose depth changes continuously by pressing the blade against the specimen and moving the tool and the specimen relative to each other. The present invention resides in a sample surface analysis device characterized by having a shape that allows scratches to be formed.

An embodiment of the present invention will be explained in detail below based on the drawings.

FIG. 1 is a sectional view of a main part of an embodiment of the present invention, and 1 indicates a sample chamber. A sample moving mechanism 2 is installed in the sample chamber, and the sample 3 is placed on it. The sample moving mechanism is normally capable of X-Y movement as well as vertical movement, and is connected to an external drive device 5 via a shaft 4 (an axis in the X direction).
An electron beam irradiation lens system 7 including an objective lens 6 and an electron gun (not shown) are mounted in the upper part of the sample chamber 1. The electron beam emitted from the electron gun is narrowed down by an irradiation lens system and irradiated onto the sample 3, and at the same time is scanned one-dimensionally or two-dimensionally over the sample by an electron beam deflector (not shown). Further, in the sample chamber, for example, a cylindrical mirror type electron beam energy analyzer 8 is installed, and is configured to analyze the energy of Auger electrons generated from the sample by irradiation with the electron beam. Although not shown, the Auger electron signal spectrally spectrally and detected by the analyzer is introduced into a conventionally well-known display or recording device and displayed or recorded as a spectrum. Reference numeral 9 denotes a tool for scraping the sample surface, and is attached to the holder 10. The holder is rotatably held by a holder 12 attached to the tip of the shaft 11. Numeral 13 is a screw for fixing the tool holder to the holding body, and the screw is fixed after adjusting the angle of the holder (tool). The shaft 11 is taken out to the outside via a spherical bearing 14, and a knob 1 is attached to the end thereof.
8 is fixed, and an adjustment screw 15 is further provided near the end.
is engaged. A spring 16 is engaged on the opposite side of the screw, and cooperates with the screw to determine the position of the shaft. The tool has a cutting edge having a considerable width in a direction perpendicular to the axis of the shaft 11 and forming a constant angle Θ with respect to the sample surface, as shown in FIG. 2a.
This angle Θ is determined by the angle at which the holder is attached to the holding body and can be arbitrarily varied.

In such a configuration, after adjusting the angle of the blade of the tool, the screw 15 is operated to adjust the inclination of the shaft and the tool is pushed into the surface of the sample 3 (Fig. 2 a).
condition). After that, when the knob 18 is moved in the direction perpendicular to the plane of the paper in FIG. Figure 2b
Scratches 17 are formed as shown in FIG. The state of this scratch can be easily observed using a scanning electron microscope, and edge portions A and B can be confirmed. Then,
If the irradiation electron beam is scanned from point A to point B in the direction perpendicular to the scratching direction, or vice versa, and line analysis or step-like analysis using Auger electrons is performed, the profile of the depth direction analysis of the sample can be obtained. can get.

3 and 4 show variations in the shape of the blade portion of the tool. In FIG. 3a, the blade portion is circular or has an arbitrary curvature, and scratches as shown in b are formed.
In addition, Fig. 4a shows the blade part formed in a chevron shape, and b
An angular, valley-shaped scar is formed. When such a shape is used, it is no longer necessary to adjust the angle between the sample surface and the tool blade so precisely.

Incidentally, no matter what shape of tool is used, it is preferable to repeat the scraping operation with the knob 18 a plurality of times to perform analysis at slightly different depths.

With the configuration described above, it is possible to form a scratch having a surface whose depth continuously changes in a very short time without being affected by the composition of the sample. Therefore, by scanning an electron beam along this scar, depth-dependent analysis can be performed with extremely high precision, and the drawbacks of conventional ion etching and mechanical polishing can be completely eliminated. be. Furthermore, due to surface roughness in ion etching,
The limit was about 1 μm, but in the present invention, even 10 μm is sufficient and the degree of application can be increased.

Note that the above is an example of the present invention, and various changes can be made when implementing the invention. For example, the means for moving the tool is not limited to what is illustrated,
Alternatively, the sample may be moved instead of moving the tool. Further, although the above description uses an Auger electron analyzer as an example, it can be similarly applied to other surface analyzers such as SIMS and ESCA.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view of the main parts of an embodiment of the present invention, and FIGS. 2 to 4 are diagrams showing examples of the shape of the tool used in FIG. 1. 1: Sample chamber, 2: Movement mechanism, 3: Sample, 4:
Axis, 5: Drive device, 6: Objective lens, 7: Irradiation lens system, 8: Energy analyzer, 9: Tool, 10: Holder, 11: Shaft, 12: Holder, 13: Screw, 14: Spherical bearing, 15 : screw, 16: spring, 18: knob.

Claims (1)

[Scope of utility model registration request] In an apparatus equipped with a sample chamber containing a test sample, a means for irradiating the sample with a primary charged particle beam or radiation, and an analyzer for analyzing secondary charged particles generated from the sample by irradiation with the charged particle beam, etc. A tool having a cutting blade is disposed in the sample chamber, and a means for moving the tool and the sample relative to each other is provided, and the shape of the cutting blade is changed by pressing the blade against the sample. 1. An apparatus for analyzing the surface of a sample, characterized in that the surface of the sample is shaped such that a scratch having a surface whose depth continuously changes is formed on the sample by relatively moving the sample.