JPH0338358U - - Google Patents
Info
- Publication number
- JPH0338358U JPH0338358U JP9689789U JP9689789U JPH0338358U JP H0338358 U JPH0338358 U JP H0338358U JP 9689789 U JP9689789 U JP 9689789U JP 9689789 U JP9689789 U JP 9689789U JP H0338358 U JPH0338358 U JP H0338358U
- Authority
- JP
- Japan
- Prior art keywords
- ring
- reaction vessel
- teflon material
- double
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 239000004809 Teflon Substances 0.000 claims description 2
- 229920006362 Teflon® Polymers 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 238000010574 gas phase reaction Methods 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9689789U JPH0338358U (it) | 1989-08-19 | 1989-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9689789U JPH0338358U (it) | 1989-08-19 | 1989-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0338358U true JPH0338358U (it) | 1991-04-12 |
Family
ID=31646070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9689789U Pending JPH0338358U (it) | 1989-08-19 | 1989-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0338358U (it) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005296346A (ja) * | 2004-04-12 | 2005-10-27 | Newgin Corp | 遊技機用透明板ユニット |
| JP2005296345A (ja) * | 2004-04-12 | 2005-10-27 | Newgin Corp | 遊技機 |
| JP2009176822A (ja) * | 2008-01-22 | 2009-08-06 | Tokyo Electron Ltd | シール機構、シール溝、シール部材及び基板処理装置 |
| JP2009253161A (ja) * | 2008-04-09 | 2009-10-29 | Tokyo Electron Ltd | プラズマ処理容器およびプラズマ処理装置 |
| JP2019145655A (ja) * | 2018-02-20 | 2019-08-29 | 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ | 基板処理装置、半導体装置の製造方法、プログラム |
-
1989
- 1989-08-19 JP JP9689789U patent/JPH0338358U/ja active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005296346A (ja) * | 2004-04-12 | 2005-10-27 | Newgin Corp | 遊技機用透明板ユニット |
| JP2005296345A (ja) * | 2004-04-12 | 2005-10-27 | Newgin Corp | 遊技機 |
| JP4526858B2 (ja) * | 2004-04-12 | 2010-08-18 | 株式会社ニューギン | 遊技機用透明板ユニット |
| JP4531434B2 (ja) * | 2004-04-12 | 2010-08-25 | 株式会社ニューギン | 遊技機 |
| JP2009176822A (ja) * | 2008-01-22 | 2009-08-06 | Tokyo Electron Ltd | シール機構、シール溝、シール部材及び基板処理装置 |
| JP2009253161A (ja) * | 2008-04-09 | 2009-10-29 | Tokyo Electron Ltd | プラズマ処理容器およびプラズマ処理装置 |
| JP2019145655A (ja) * | 2018-02-20 | 2019-08-29 | 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ | 基板処理装置、半導体装置の製造方法、プログラム |
| US11124872B2 (en) | 2018-02-20 | 2021-09-21 | Kokusai Electric Corporation | Substrate processing apparatus |