JPH0337610U - - Google Patents

Info

Publication number

JPH0337610U

JPH0337610U JP8866389U JP8866389U JPH0337610U JP H0337610 U JPH0337610 U JP H0337610U JP 8866389 U JP8866389 U JP 8866389U JP 8866389 U JP8866389 U JP 8866389U JP H0337610 U JPH0337610 U JP H0337610U

Authority

JP

Japan

Prior art keywords

objective lens

inclination

position detection

detection element

light

Prior art date

1989-05-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000003287 optical effect Effects 0.000 claims description 11
• 238000001514 detection method Methods 0.000 claims description 7
• 230000010365 information processing Effects 0.000 claims description 3
• 238000005259 measurement Methods 0.000 claims description 2
• 238000010586 diagram Methods 0.000 description 2
• 238000007796 conventional method Methods 0.000 description 1