JPH0337290U - - Google Patents
Info
- Publication number
- JPH0337290U JPH0337290U JP9949089U JP9949089U JPH0337290U JP H0337290 U JPH0337290 U JP H0337290U JP 9949089 U JP9949089 U JP 9949089U JP 9949089 U JP9949089 U JP 9949089U JP H0337290 U JPH0337290 U JP H0337290U
- Authority
- JP
- Japan
- Prior art keywords
- evacuation system
- vacuum
- control device
- vacuum evacuation
- system control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図は本考案に係る真空排気系制御装置の構
成を示すブロツク図、第２図〜第５図はその制御
手順を示すフローチヤート、第６図は従来装置の
構成を示すブロツク図である。
３……真空排気系、４……真空槽、１１ａ〜１
１ｄ……ＴＴＬ回路基板、３１ａ〜３１ｇ……バ
ルブ、３２……クライオポンプ、３３……ロータ
リポンプ。なお、図中、同一符号は同一、又は相
当部分を示す。
FIG. 1 is a block diagram showing the configuration of the vacuum evacuation system control device according to the present invention, FIGS. 2 to 5 are flowcharts showing the control procedure, and FIG. 6 is a block diagram showing the configuration of the conventional device. . 3... Vacuum exhaust system, 4... Vacuum chamber, 11a-1
1d...TTL circuit board, 31a-31g...Valve, 32...Cryopump, 33...Rotary pump. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
Claims (1)
成される真空排気系を制御して真空槽を排気する
真空排気系制御装置において、 前記真空排気系の制御を複数のデイジタルＩＣ
基板にて行う構成としてあること を特徴とする真空排気系制御装置。[Scope of Claim for Utility Model Registration] A vacuum evacuation system control device that controls a vacuum evacuation system composed of a pump and valves connected to a vacuum chamber to evacuate the vacuum chamber, comprising: digital IC
A vacuum evacuation system control device characterized by having a configuration in which control is performed on a board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9949089U JPH0337290U (en) | 1989-08-24 | 1989-08-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9949089U JPH0337290U (en) | 1989-08-24 | 1989-08-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0337290U true JPH0337290U (en) | 1991-04-11 |
Family
ID=31648541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9949089U Pending JPH0337290U (en) | 1989-08-24 | 1989-08-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0337290U (en) |
-
1989
- 1989-08-24 JP JP9949089U patent/JPH0337290U/ja active Pending
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