JPS6399083U - - Google Patents

Info

Publication number
JPS6399083U
JPS6399083U JP19505186U JP19505186U JPS6399083U JP S6399083 U JPS6399083 U JP S6399083U JP 19505186 U JP19505186 U JP 19505186U JP 19505186 U JP19505186 U JP 19505186U JP S6399083 U JPS6399083 U JP S6399083U
Authority
JP
Japan
Prior art keywords
port
valve
passage
cylinder
bypass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19505186U
Other languages
Japanese (ja)
Other versions
JPH0325481Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19505186U priority Critical patent/JPH0325481Y2/ja
Publication of JPS6399083U publication Critical patent/JPS6399083U/ja
Application granted granted Critical
Publication of JPH0325481Y2 publication Critical patent/JPH0325481Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの考案に係る操作速度制御装置の回
路図、第2図は要部の断面図、第3〜5図は該要
部の異なつた作動状態を示す断面図、第6図はシ
リンダへの取付の一例を示す一部断面図、第7図
は従来の装置の回路図、第8図は従来の速度制御
弁の外観図、第9図は従来のバイパス弁の外観図
である。 1…弁、2…弁軸、3…シリンダ、4…ピスト
ン、5…方向切換弁、6…圧力源、7,8…速度
制御弁、9…スプリング、10…バイパス弁、1
1…ハンドル、12…フイルター、13…ストツ
プ弁、14…機体、15…第1ポート、16…第
2ポート、17…通路、18…第1ニードル弁、
19…第2ニードル弁、20…第1チエツク弁、
21…第2チエツク弁、22…受圧側、23…大
気圧側、24…第3ポート、25…バイパス通路
、26…シリンダブロツク、27…ガスケツト、
28,29…連通路。
Fig. 1 is a circuit diagram of the operating speed control device according to this invention, Fig. 2 is a sectional view of the main part, Figs. 3 to 5 are sectional views showing the main part in different operating states, and Fig. 6 is a cylinder. 7 is a circuit diagram of a conventional device, FIG. 8 is an external view of a conventional speed control valve, and FIG. 9 is an external view of a conventional bypass valve. DESCRIPTION OF SYMBOLS 1... Valve, 2... Valve shaft, 3... Cylinder, 4... Piston, 5... Directional switching valve, 6... Pressure source, 7, 8... Speed control valve, 9... Spring, 10... Bypass valve, 1
DESCRIPTION OF SYMBOLS 1...handle, 12...filter, 13...stop valve, 14...body, 15...first port, 16...second port, 17...passage, 18...first needle valve,
19...Second needle valve, 20...First check valve,
21...Second check valve, 22...Pressure receiving side, 23...Atmospheric pressure side, 24...Third port, 25...Bypass passage, 26...Cylinder block, 27...Gasket,
28, 29...Communication path.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 一つの機体14に第1ポート15、第2ポート
16並びに第3ポート24を形成し、第1ポート
15と第2ポート16を接続する通路17にニー
ドル弁18,19とチエツク弁20,21とから
なる2組の速度制御弁7,8を配設し、第2ポー
ト16と第3ポート24を接続するバイパス通路
5に該通路25を断続するバイパス弁10を配設
し、前記通路17を断続するストツプ弁13をバ
イパス弁10に一体に形成し、第1ポート15を
方向切換弁5に第2ポート16をシリンダ3の受
圧側に、第3ポート24をシリンダ3の大気圧側
にそれぞれ連結すると共に、流体圧力を受けてシ
リンダ3内を作動するピストン4を弁1の弁軸2
に連結したことを特徴とする弁の操作速度制御装
置。
A first port 15, a second port 16, and a third port 24 are formed in one body 14, and a passage 17 connecting the first port 15 and the second port 16 is provided with needle valves 18, 19 and check valves 20, 21. A bypass valve 10 is provided in the bypass passage 5 that connects the second port 16 and the third port 24 to connect the passage 25, and a bypass valve 10 is provided to connect the passage 25. An intermittent stop valve 13 is integrally formed with the bypass valve 10, the first port 15 is connected to the directional control valve 5, the second port 16 is connected to the pressure receiving side of the cylinder 3, and the third port 24 is connected to the atmospheric pressure side of the cylinder 3. The piston 4, which operates inside the cylinder 3 in response to fluid pressure, is connected to the valve shaft 2 of the valve 1.
A valve operation speed control device, characterized in that it is connected to a valve operating speed control device.
JP19505186U 1986-12-17 1986-12-17 Expired JPH0325481Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19505186U JPH0325481Y2 (en) 1986-12-17 1986-12-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19505186U JPH0325481Y2 (en) 1986-12-17 1986-12-17

Publications (2)

Publication Number Publication Date
JPS6399083U true JPS6399083U (en) 1988-06-27
JPH0325481Y2 JPH0325481Y2 (en) 1991-06-03

Family

ID=31152582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19505186U Expired JPH0325481Y2 (en) 1986-12-17 1986-12-17

Country Status (1)

Country Link
JP (1) JPH0325481Y2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7187011B2 (en) * 2018-09-07 2022-12-12 株式会社フジキン Actuators, valves, fluid supply systems, and semiconductor manufacturing equipment

Also Published As

Publication number Publication date
JPH0325481Y2 (en) 1991-06-03

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