JPH0337123B2 - - Google Patents

Info

Publication number
JPH0337123B2
JPH0337123B2 JP55180150A JP18015080A JPH0337123B2 JP H0337123 B2 JPH0337123 B2 JP H0337123B2 JP 55180150 A JP55180150 A JP 55180150A JP 18015080 A JP18015080 A JP 18015080A JP H0337123 B2 JPH0337123 B2 JP H0337123B2
Authority
JP
Japan
Prior art keywords
light
wavelength
wavelengths
film
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP55180150A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57103004A (en
Inventor
Akira Torao
Juichiro Asano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Original Assignee
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Steel Corp filed Critical Kawasaki Steel Corp
Priority to JP18015080A priority Critical patent/JPS57103004A/ja
Publication of JPS57103004A publication Critical patent/JPS57103004A/ja
Publication of JPH0337123B2 publication Critical patent/JPH0337123B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP18015080A 1980-12-19 1980-12-19 Method for measuring film thickness of surface Granted JPS57103004A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18015080A JPS57103004A (en) 1980-12-19 1980-12-19 Method for measuring film thickness of surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18015080A JPS57103004A (en) 1980-12-19 1980-12-19 Method for measuring film thickness of surface

Publications (2)

Publication Number Publication Date
JPS57103004A JPS57103004A (en) 1982-06-26
JPH0337123B2 true JPH0337123B2 (en, 2012) 1991-06-04

Family

ID=16078267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18015080A Granted JPS57103004A (en) 1980-12-19 1980-12-19 Method for measuring film thickness of surface

Country Status (1)

Country Link
JP (1) JPS57103004A (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2674325B1 (fr) * 1991-03-18 1995-05-05 Lorraine Laminage Procede et dispositif de mesure d'une epaisseur d'un revetement sur un substrat metallique.
JP2594773B2 (ja) * 1994-12-20 1997-03-26 財団法人韓国電子通信研究所 金属有機物の化学蒸着による膜のモニタリング装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49123060A (en, 2012) * 1973-03-28 1974-11-25

Also Published As

Publication number Publication date
JPS57103004A (en) 1982-06-26

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