JPH0335977A - Work device of free abrasive grain injection type - Google Patents

Abstract

PURPOSE:To uniformly work finely the surface of the body to be worked by rotating at least one part of the body to be worked and the nozzles injecting solid air two phase current with the axial line of the nozzle or the axial line parallel thereto as the center. CONSTITUTION:A motor 41 is rotated and driven, and an injection nozzle 23 is rotated centering around the axial line thereof as shown by an arrow mark 51. A rotary table 11 is also rotated by driving a separate motor for driving a table. The body 10 to be worked can be finely worked with the free abrasive grain injected from the nozzle 23 together with a gasious body without any beat well by thus rotating both of the body 10 to be worked and nozzle 23 together at a low speed.

Description

[Detailed description of the invention] Indigo industry application field] Kikomei is concerned with a free abrasive injection type machining device, in particular a machine that processes a workpiece by injecting a solid-gas two-phase flow of Ti abrasive grains and gas onto the workpiece. The present invention relates to an apparatus suitable for use in microfabrication.

KSummary of the invention
By injecting abrasive grains onto the workpiece at high pressure through the nozzle, the surface of the workpiece is uniformly micro-machined, and the waviness and roughness of the surface of the workpiece are made uniform to obtain good machining accuracy. This is what I did.

[Prior Art] For example, as disclosed in Japanese Unexamined Patent Publication No. 63-22272, free abrasive grains are mixed with gas to form a solid-gas two-phase flow, and such a mixed flow is used to produce a material to be processed using a nozzle. A sandblasting device that sprays a jet onto objects is known.

(Problems to be Solved by the Invention) Sandblasting, in which a solid-gas two-phase flow is injected onto the workpiece using an injection nozzle, is unsuitable for micromachining, and the machining energy distribution is is also uneven,
At best, it is used only for deburring, removing rust for paint, and for decorative purposes. There is an ion milling method for microfabrication, but such a machining method has the disadvantage that it takes too much machining time and productivity is extremely low.

The present invention has been made in view of the above problems, and an object of the present invention is to provide an idle abrasive jetting type processing device that performs fine processing with high efficiency and enables uniform processing. The purpose is to

[Means for Solving the Problems] The present invention provides a method for processing the workpiece by exposing the workpiece to solid-gas two-phase particles of 3Im abrasive grains and gas. At least one of the nozzles that injects a gas two-phase flow is rotated around the axis of the nozzle or an axis parallel thereto.

Therefore, it is possible to achieve a uniform machined surface using a mill abrasive abrasive grain copper machining device which is capable of fine machining and has high efficiency.

K Embodiment 1 The drawing shows an outline of a free abrasive jet processing apparatus according to an embodiment of the present invention, in which a workpiece 10 is placed on a rotary table 11. A table shaft 12 is fixed to the lower surface of the rotary table 11.

The table shaft 12 is rotatably supported by a pair of upper and lower bearings 13,14. These bearings 13, 14 are held above and below inside the bearing housing 15, and a preload spring 21 is interposed between the upper and lower bearings 13, 14. The preload spring 21 is a bearing 13.14
The inner rings are pressed in a direction that separates them from each other. Bearing nuts 22 are attached to the upper and lower sides of the bearing housing 15, respectively, and these nuts 22 hold down the outer rings of the upper and lower bearings 13 and 14.

A bearing housing 15 housing and holding a pair of upper and lower bearings 13 and 14 is fixed to the lower surface of the stage 17 with fastening bolts 16. The table shaft 12 protrudes below the bearing housing 15.
A driven pulley 18 is fixed to the. A timing belt 20 is stretched between the driven pulley 18 and the drive pulley 19, and the rotary table 11 is rotationally driven by such a belt transmission mechanism.

A spray nozzle 23 is disposed above the rotary table 11 so as to face the workpiece 10 on the rotary table 11 . The injection nozzle 23 is fixed to the lower part of the straight pipe 24 on the rotating side. A straight pipe 25 is disposed coaxially above the straight pipe 24. The straight pipe 24 on the rotating side and the straight pipe 25 on the stationary side are connected by rotary couplings 26 and 27. In other words, the straight pipe 24 on the rotating side is the rotating part 2 of the rotary coupling.
6, and the M tube 25 on the fixed side is connected to the fixed part 27 of the rotary coupling. Further, a free abrasive supply pipe 28 is connected to the fixed side straight pipe 25 so as to join from the side. A suction nozzle 29 is provided at the upper part of the straight pipe 25 to suck the abrasive grains supplied from the supply pipe 28.

Next, the structure for rotationally driving the rotating M straight pipe 24 and the nozzle 23 will be explained. The straight pipe 24 is rotatably supported by a pair of upper and lower bearings 32 and 33. These bearings 32 and 33 are housed and held within a bearing housing 34, and the upper bearings 32 and 33 are pressed by a preload spring 35 in a direction that separates them from each other. Also bearing housing 3
Bearing nuts 36 are attached to the upper and lower sides of the bearing 4, respectively, and the outer rings of the upper and lower bearings 32 and 33 are held down by the bearing nuts 36.

A bearing housing 34 holding bearings 32,33 is attached to the underside of the frame 39 by fastening bolts 38. A driven pulley 4 is attached to the straight pipe 24.
0 is fixed, and this pulley 40 is connected to a motor 41.
The power is transmitted through a drive pulley 42 and a timing belt 43 that are fixed to the output shaft of the motor.

In the above configuration, when a high pressure gas of dry nitrogen is supplied from the suction nozzle 29 at the upper part of the straight pipe 25, Si C,Aj! Free abrasive grains such as z03 are mixed with dry nitrogen to form a solid-gas two-phase flow in the a-tube 25. The two-phase flow passes from the stationary side straight pipe 25 to the rotating side straight pipe 24, is injected from the nozzle 23, and is injected onto the surface of the workpiece 10.

Also, when the motor 41 is driven to rotate, a
=j' l]The rotation of the driving pulley 42 is transmitted to the driven pulley 40 via the timing bell mill 43, thereby causing the lower straight pipe 24 supported by the upper and lower bearings 32 and 33 to rotate. will be done. Therefore, the injection nozzle 23 attached to the lower end of this straight pipe 24
is rotated about its axis as shown by arrow 51.

Furthermore, when the table drive motor (not shown) is driven, the drive pulley 19 is driven to rotate, and the rotation is transmitted to the driven pulley 18 via the timing belt 20, and the table shaft 1
The rotary table 11 to which 2 is attached will be rotated. Therefore, the rotary table 11 on which the workpiece 10 is placed is rotated as shown by the arrow 52.

That is, in the apparatus according to this embodiment, the injection nozzle 23 and the workpiece 10 are rotated at low speeds as shown by arrows 51 and 52, respectively. Workpiece 1 as before
0 is fixed and the fixed nozzle 23 is used to inject one grain of loose 1llij to perform processing.
0 installation and injection nozzle 23 installation depending on the accuracy.
It is difficult to uniformly grind the surface quality of the machined surface of the workpiece 10, and variations in Tim abrasive grains have an adverse effect on the surface properties of the workpiece 10. However, by rotating both the workpiece 10 and the nozzle 23 at a low speed, the above-mentioned effects are improved, the surface properties are improved, and the waviness and roughness can be improved.

In this example, SiC abrasive grains with a grain size of approximately 1 μm were used, and Alf-Tsuku I4, which is a hard ceramic, was used.
The surface of the board 10 is ground and polished by 0.
Waviness of 1 .mu.m or less and surface roughness of 0.04 .mu.m or less were formed, and optimal results for microfabrication were obtained. In the above embodiment, the nozzle 23 and the workpiece 10 are both rotated around a common axis, but the nozzle 23 and the workpiece 10 are rotated around different axes. You can.

As described above, the T1M1 abrasive injection type addition and dew according to this embodiment rotates either or both of the workpiece 10 or the nozzle 23 of the free abrasive injection tJ4 mechanism, and By spraying it at high pressure from the nozzle 23 toward the workpiece 10, the surface of the workpiece can be uniformly micro-machined, and the waviness and roughness of the surface can be made uniform. Therefore, it is possible to carry out fine machining with waviness of 011μ or less and surface roughness of 0.04tim or less, and it is also possible to make the machined surface uniform by rotation. Also? ! It becomes possible to easily process the surface of rough shapes. In addition, since the machining process is performed by spraying abrasive grains, a machining efficiency of about 1,000,000 millimeters can be obtained compared to the ion milling method, making it an extremely high efficiency method for m-line milling.

Effects of the Invention] As described above, the present invention rotates the workpiece and at least one of the nozzle that injects the solid-gas two-phase flow around the nozzle axis or an axis parallel to the nozzle axis. be. Therefore, it is possible to provide a free a1 abrasive grain 111 injection type machining device that can uniformly finely machine the surface of a workpiece.

[Brief explanation of drawings]

The drawing is a longitudinal sectional view showing a free abrasive jet processing apparatus according to an embodiment of the present invention. The names of the main parts in the drawings are as follows. 10... Workpiece 11... Rotary table 18... Driven pulley 19... Drive pulley 20... Timing belt 23... Injection nozzle 28... Free abrasive supply pipe 29... Suction nozzle 40... Driven pulley 41... Motor 42... Drive pulley 43... Timing belt

Claims (1)

[Claims] 1. In an apparatus that performs processing by injecting a solid-gas two-phase flow of free abrasive grains and gas onto a workpiece, at least one of the workpiece and a nozzle that injects the solid-gas two-phase flow A free abrasive injection type machining device, characterized in that the abrasive is rotated around the axis of the nozzle or an axis parallel thereto.