JPH0335932U - - Google Patents
Info
- Publication number
- JPH0335932U JPH0335932U JP9597589U JP9597589U JPH0335932U JP H0335932 U JPH0335932 U JP H0335932U JP 9597589 U JP9597589 U JP 9597589U JP 9597589 U JP9597589 U JP 9597589U JP H0335932 U JPH0335932 U JP H0335932U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transports
- floats
- large number
- injection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002347 injection Methods 0.000 claims description 5
- 239000007924 injection Substances 0.000 claims description 5
- 230000032258 transport Effects 0.000 claims 4
- 239000012530 fluid Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9597589U JPH0335932U (OSRAM) | 1989-08-16 | 1989-08-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9597589U JPH0335932U (OSRAM) | 1989-08-16 | 1989-08-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0335932U true JPH0335932U (OSRAM) | 1991-04-08 |
Family
ID=31645204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9597589U Pending JPH0335932U (OSRAM) | 1989-08-16 | 1989-08-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0335932U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014010862A (ja) * | 2012-06-29 | 2014-01-20 | Fujitsu Ltd | ライブラリ装置 |
-
1989
- 1989-08-16 JP JP9597589U patent/JPH0335932U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014010862A (ja) * | 2012-06-29 | 2014-01-20 | Fujitsu Ltd | ライブラリ装置 |
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