JPH0335431Y2 - - Google Patents

Info

Publication number

JPH0335431Y2

JPH0335431Y2 JP3258487U JP3258487U JPH0335431Y2 JP H0335431 Y2 JPH0335431 Y2 JP H0335431Y2 JP 3258487 U JP3258487 U JP 3258487U JP 3258487 U JP3258487 U JP 3258487U JP H0335431 Y2 JPH0335431 Y2 JP H0335431Y2

Authority

JP

Japan

Prior art keywords

organic solvent

tank

cleaning

cleaning tank

solvent vapor

Prior art date

1987-03-07

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 239000003960 organic solvent Substances 0.000 claims description 54
• 238000004140 cleaning Methods 0.000 claims description 37
• 238000001816 cooling Methods 0.000 claims description 22
• 238000010438 heat treatment Methods 0.000 claims description 7
• 238000004781 supercooling Methods 0.000 claims description 7
• 238000011084 recovery Methods 0.000 description 5
• YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
• 239000002904 solvent Substances 0.000 description 3
• 238000010586 diagram Methods 0.000 description 2
• 230000000694 effects Effects 0.000 description 2
• 238000000034 method Methods 0.000 description 2
• 238000005192 partition Methods 0.000 description 2
• BIIBYWQGRFWQKM-JVVROLKMSA-N (2S)-N-[4-(cyclopropylamino)-3,4-dioxo-1-[(3S)-2-oxopyrrolidin-3-yl]butan-2-yl]-2-[[(E)-3-(2,4-dichlorophenyl)prop-2-enoyl]amino]-4,4-dimethylpentanamide Chemical compound CC(C)(C)C[C@@H](C(NC(C[C@H](CCN1)C1=O)C(C(NC1CC1)=O)=O)=O)NC(/C=C/C(C=CC(Cl)=C1)=C1Cl)=O BIIBYWQGRFWQKM-JVVROLKMSA-N 0.000 description 1
• AJDIZQLSFPQPEY-UHFFFAOYSA-N 1,1,2-Trichlorotrifluoroethane Chemical compound FC(F)(Cl)C(F)(Cl)Cl AJDIZQLSFPQPEY-UHFFFAOYSA-N 0.000 description 1
• CYTYCFOTNPOANT-UHFFFAOYSA-N Perchloroethylene Chemical group ClC(Cl)=C(Cl)Cl CYTYCFOTNPOANT-UHFFFAOYSA-N 0.000 description 1
• XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 1
• 238000007796 conventional method Methods 0.000 description 1
• BAPZCSMFCUVUHW-UHFFFAOYSA-N dichloro(fluoro)methane Chemical compound F[C](Cl)Cl BAPZCSMFCUVUHW-UHFFFAOYSA-N 0.000 description 1
• 238000010981 drying operation Methods 0.000 description 1
• 239000000428 dust Substances 0.000 description 1
• 238000005516 engineering process Methods 0.000 description 1
• 239000007788 liquid Substances 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 239000003507 refrigerant Substances 0.000 description 1
• 230000000630 rising effect Effects 0.000 description 1
• 239000004065 semiconductor Substances 0.000 description 1
• 238000002791 soaking Methods 0.000 description 1
• 229950011008 tetrachloroethylene Drugs 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1