JPH0334830B2 - - Google Patents

Info

Publication number
JPH0334830B2
JPH0334830B2 JP13257185A JP13257185A JPH0334830B2 JP H0334830 B2 JPH0334830 B2 JP H0334830B2 JP 13257185 A JP13257185 A JP 13257185A JP 13257185 A JP13257185 A JP 13257185A JP H0334830 B2 JPH0334830 B2 JP H0334830B2
Authority
JP
Japan
Prior art keywords
test
chamber
measurement
partition wall
device under
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13257185A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61290374A (ja
Inventor
Seiji Onozawa
Hitoshi Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chino Corp
Original Assignee
Chino Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chino Corp filed Critical Chino Corp
Priority to JP13257185A priority Critical patent/JPS61290374A/ja
Publication of JPS61290374A publication Critical patent/JPS61290374A/ja
Publication of JPH0334830B2 publication Critical patent/JPH0334830B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP13257185A 1985-06-18 1985-06-18 試験装置 Granted JPS61290374A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13257185A JPS61290374A (ja) 1985-06-18 1985-06-18 試験装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13257185A JPS61290374A (ja) 1985-06-18 1985-06-18 試験装置

Publications (2)

Publication Number Publication Date
JPS61290374A JPS61290374A (ja) 1986-12-20
JPH0334830B2 true JPH0334830B2 (enrdf_load_stackoverflow) 1991-05-24

Family

ID=15084420

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13257185A Granted JPS61290374A (ja) 1985-06-18 1985-06-18 試験装置

Country Status (1)

Country Link
JP (1) JPS61290374A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH072933U (ja) * 1993-06-11 1995-01-17 住友電気工業株式会社 半導体レ−ザ信頼性試験装置
US20110063608A1 (en) * 2009-09-14 2011-03-17 Star Technologies Inc. Sensing Module for Light-Emitting Devices and Testing Apparatus Using the Same
JP5747697B2 (ja) * 2011-07-08 2015-07-15 富士通セミコンダクター株式会社 試験装置、試験方法および試験ボード

Also Published As

Publication number Publication date
JPS61290374A (ja) 1986-12-20

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