JPH0334830B2 - - Google Patents
Info
- Publication number
- JPH0334830B2 JPH0334830B2 JP13257185A JP13257185A JPH0334830B2 JP H0334830 B2 JPH0334830 B2 JP H0334830B2 JP 13257185 A JP13257185 A JP 13257185A JP 13257185 A JP13257185 A JP 13257185A JP H0334830 B2 JPH0334830 B2 JP H0334830B2
- Authority
- JP
- Japan
- Prior art keywords
- test
- chamber
- measurement
- partition wall
- device under
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13257185A JPS61290374A (ja) | 1985-06-18 | 1985-06-18 | 試験装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13257185A JPS61290374A (ja) | 1985-06-18 | 1985-06-18 | 試験装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61290374A JPS61290374A (ja) | 1986-12-20 |
| JPH0334830B2 true JPH0334830B2 (cs) | 1991-05-24 |
Family
ID=15084420
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13257185A Granted JPS61290374A (ja) | 1985-06-18 | 1985-06-18 | 試験装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61290374A (cs) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH072933U (ja) * | 1993-06-11 | 1995-01-17 | 住友電気工業株式会社 | 半導体レ−ザ信頼性試験装置 |
| US20110063608A1 (en) * | 2009-09-14 | 2011-03-17 | Star Technologies Inc. | Sensing Module for Light-Emitting Devices and Testing Apparatus Using the Same |
| JP5747697B2 (ja) * | 2011-07-08 | 2015-07-15 | 富士通セミコンダクター株式会社 | 試験装置、試験方法および試験ボード |
-
1985
- 1985-06-18 JP JP13257185A patent/JPS61290374A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61290374A (ja) | 1986-12-20 |
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