JPH0334307Y2 - - Google Patents

Info

Publication number
JPH0334307Y2
JPH0334307Y2 JP1986061691U JP6169186U JPH0334307Y2 JP H0334307 Y2 JPH0334307 Y2 JP H0334307Y2 JP 1986061691 U JP1986061691 U JP 1986061691U JP 6169186 U JP6169186 U JP 6169186U JP H0334307 Y2 JPH0334307 Y2 JP H0334307Y2
Authority
JP
Japan
Prior art keywords
wall
cleaned
rotary table
cleaning
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986061691U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62174684U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986061691U priority Critical patent/JPH0334307Y2/ja
Publication of JPS62174684U publication Critical patent/JPS62174684U/ja
Application granted granted Critical
Publication of JPH0334307Y2 publication Critical patent/JPH0334307Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP1986061691U 1986-04-25 1986-04-25 Expired JPH0334307Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986061691U JPH0334307Y2 (enExample) 1986-04-25 1986-04-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986061691U JPH0334307Y2 (enExample) 1986-04-25 1986-04-25

Publications (2)

Publication Number Publication Date
JPS62174684U JPS62174684U (enExample) 1987-11-06
JPH0334307Y2 true JPH0334307Y2 (enExample) 1991-07-19

Family

ID=30895266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986061691U Expired JPH0334307Y2 (enExample) 1986-04-25 1986-04-25

Country Status (1)

Country Link
JP (1) JPH0334307Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5234864Y2 (enExample) * 1973-02-07 1977-08-09

Also Published As

Publication number Publication date
JPS62174684U (enExample) 1987-11-06

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