JPH0333950U - - Google Patents
Info
- Publication number
- JPH0333950U JPH0333950U JP9388189U JP9388189U JPH0333950U JP H0333950 U JPH0333950 U JP H0333950U JP 9388189 U JP9388189 U JP 9388189U JP 9388189 U JP9388189 U JP 9388189U JP H0333950 U JPH0333950 U JP H0333950U
- Authority
- JP
- Japan
- Prior art keywords
- extraction
- electron
- electron extraction
- cathode
- current detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 15
- 230000001133 acceleration Effects 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 3
- 230000005684 electric field Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は本案の一実施例を説明するためのブロ
ツク図、第２図は電子の引出電圧の昇圧を時間軸
を横軸にして示した図、第３図は引出電圧の昇圧
により引出電流が流れる様子を時間軸を横軸にし
て示した図、第４図は引出電流が流れるまでは、
引出電圧ステツプを大きくなおかつ１ステツプ滞
在時間を小さくし、引出電流が流れ始めたら引出
電圧ステツプを小さくなおかつ１ステツプ滞在時
間を大きく制御している様子を示した図である。
１……陰極、２……陽極、３……初段加速電極
、４……陰極加熱フイラメント、５……真空容器
、６……引出電流検出手段、７……電子引出電源
、８……陰極加熱電源、９……初段加速電源、１
０……加速電源、１１……引出電源制御手段、１
２……分割抵抗、１３……加速電極。
Fig. 1 is a block diagram for explaining one embodiment of the present invention, Fig. 2 is a diagram showing the boosting of the electron extraction voltage with the time axis as the horizontal axis, and Fig. 3 is a diagram showing the extraction current due to the boosting of the extraction voltage. Figure 4 shows how the current flows, with the time axis as the horizontal axis, until the extraction current flows.
FIG. 6 is a diagram showing how the extraction voltage step is made large and the one-step residence time is made small, and when the extraction current starts flowing, the extraction voltage step is made small and the one-step residence time is controlled to be large. DESCRIPTION OF SYMBOLS 1... Cathode, 2... Anode, 3... First-stage accelerating electrode, 4... Cathode heating filament, 5... Vacuum vessel, 6... Extraction current detection means, 7... Electronic extraction power source, 8... Cathode heating Power supply, 9...First stage acceleration power supply, 1
0...Acceleration power supply, 11...Output power supply control means, 1
2...dividing resistor, 13...accelerating electrode.
Claims (1)
る電子引出電極と電子引出電源と電子を加速する
加速電極と加速電源と引出電流検出手段を有する
電界放射形電子顕微鏡において、電子引出電圧の
昇降電圧ステツプおよび昇降時間を前記引出電流
検出手段に連動して可変設定するよう構成した電
子引出電源制御手段を備えたことを特徴とする電
界放射形電子顕微鏡。 In a field emission electron microscope having a field emission cathode, an electron extraction electrode for emitting electrons from the cathode in an electric field, an electron extraction power source, an accelerating electrode for accelerating electrons, an acceleration power source, and an extraction current detection means, an increasing/lowering voltage step of an electron extraction voltage is provided. and an electron extraction power supply control means configured to variably set the raising/lowering time in conjunction with the extraction current detection means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9388189U JPH0333950U (en) | 1989-08-11 | 1989-08-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9388189U JPH0333950U (en) | 1989-08-11 | 1989-08-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0333950U true JPH0333950U (en) | 1991-04-03 |
Family
ID=31643241
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9388189U Pending JPH0333950U (en) | 1989-08-11 | 1989-08-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0333950U (en) |
-
1989
- 1989-08-11 JP JP9388189U patent/JPH0333950U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69115249D1 (en) | COLD CATHODE FIELD EMISSION ARRANGEMENT WITH POWER SOURCE. | |
| JPH0333950U (en) | ||
| JPS61183859A (en) | Method for equalizing distribution of dose from electron-beam irradiation device | |
| JPS5810354U (en) | Field emission cathode | |
| CN211125565U (en) | Novel cathode structure of ion source | |
| JPH02146751U (en) | ||
| JPS6149965U (en) | ||
| JPH0216555U (en) | ||
| JPH0244247U (en) | ||
| JPH0163062U (en) | ||
| JPS63137450U (en) | ||
| JPS61139562U (en) | ||
| JPS5790839A (en) | Electron gun | |
| JPS593469U (en) | flat fluorescent display tube | |
| JPH0326955U (en) | ||
| JPS63179644U (en) | ||
| JPS61136457U (en) | ||
| JPS6388897U (en) | ||
| JPS6013661U (en) | Charged particle beam generator | |
| JPS6373700U (en) | ||
| JPH0298450U (en) | ||
| JPH02110165U (en) | ||
| JPH01274348A (en) | High voltage power source for electron gun | |
| JPS62122038A (en) | Power supply for emitting charged particle beam | |
| JPH0455752U (en) |