JPH02110165U - - Google Patents
Info
- Publication number
- JPH02110165U JPH02110165U JP1849789U JP1849789U JPH02110165U JP H02110165 U JPH02110165 U JP H02110165U JP 1849789 U JP1849789 U JP 1849789U JP 1849789 U JP1849789 U JP 1849789U JP H02110165 U JPH02110165 U JP H02110165U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- voltage
- elements
- power supply
- supply device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は本考案の適用例を示す、電子線照射装
置の電子源用フイラメントの電源装置の概要構成
図、第２図イは電子流の対時間関係図、同図ロは
フイラメント電圧の対時間関係図、第３図は従来
の電子源用フイラメントの電源装置の概要構成図
、第４図イは従来の電子源用フイラメントの電源
装置における電子流の対時間関係図、同図ロはフ
イラメント電圧の対時間関係図である。
１……フイラメント、２……フイラメントトラ
ンス、３……発電機、４……加速管、５……直流
高電圧発生装置、６……電流検出回路、７……プ
ロセス制御回路、８……電動機、９……フイラメ
ント電圧計、１０……フイラメントの電源装置、
１１……電子流、１２……切替制御回路、１３…
…中間タツプ、１４……フイラメント素子。
Figure 1 is a schematic configuration diagram of a power supply device for a filament for an electron source in an electron beam irradiation device, showing an application example of the present invention. Figure 2A is a graph of the electron flow versus time. Figure 3 is a schematic configuration diagram of a conventional power supply device for a filament for an electron source, Figure 4A is a diagram of an electron flow versus time in a conventional power supply device for a filament for an electron source, and Figure 3B is a diagram for a filament. FIG. 3 is a voltage versus time relationship diagram. 1... Filament, 2... Filament transformer, 3... Generator, 4... Accelerator tube, 5... DC high voltage generator, 6... Current detection circuit, 7... Process control circuit, 8... Electric motor , 9... filament voltmeter, 10... filament power supply device,
11...Electron flow, 12...Switching control circuit, 13...
...middle tap, 14... filament element.
Claims (1)
源用フイラメントの電源装置において、前記フイ
ラメントの中間点から引き出した中間端子によつ
て電気的に２分割されたフイラメント素子と、こ
れら２つのフイラメント素子を、フイラメント電
圧が一定値に達するまでは、前記電気的に２分割
されたフイラメント素子を並列接続してフイラメ
ント電圧を印加し、前記フイラメント電圧が前記
一定値と等しいか、より大となつた時に、前記２
つのフイラメント素子を直列接続してフイラメン
ト電圧を印加するように切り替える切替装置とか
らなることを特徴とする電子線照射装置の電子源
用フイラメントの電源装置。 In a power supply device for a filament for an electron source that generates thermoelectrons by Joule heating, a filament element electrically divided into two by an intermediate terminal drawn out from the middle point of the filament, and these two filament elements, Until the filament voltage reaches a certain value, the electrically divided filament elements are connected in parallel and the filament voltage is applied, and when the filament voltage becomes equal to or larger than the certain value, the filament voltage is applied. 2
1. A power supply device for a filament for an electron source in an electron beam irradiation device, comprising a switching device for connecting two filament elements in series and applying a filament voltage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1849789U JPH02110165U (en) | 1989-02-20 | 1989-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1849789U JPH02110165U (en) | 1989-02-20 | 1989-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02110165U true JPH02110165U (en) | 1990-09-04 |
Family
ID=31233200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1849789U Pending JPH02110165U (en) | 1989-02-20 | 1989-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02110165U (en) |
-
1989
- 1989-02-20 JP JP1849789U patent/JPH02110165U/ja active Pending
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