JPH0332863Y2 - - Google Patents

Info

Publication number
JPH0332863Y2
JPH0332863Y2 JP1986085285U JP8528586U JPH0332863Y2 JP H0332863 Y2 JPH0332863 Y2 JP H0332863Y2 JP 1986085285 U JP1986085285 U JP 1986085285U JP 8528586 U JP8528586 U JP 8528586U JP H0332863 Y2 JPH0332863 Y2 JP H0332863Y2
Authority
JP
Japan
Prior art keywords
piezoelectric element
ceramic layer
air nozzle
metal substrate
movable part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986085285U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62196973U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986085285U priority Critical patent/JPH0332863Y2/ja
Publication of JPS62196973U publication Critical patent/JPS62196973U/ja
Application granted granted Critical
Publication of JPH0332863Y2 publication Critical patent/JPH0332863Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
JP1986085285U 1986-06-03 1986-06-03 Expired JPH0332863Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986085285U JPH0332863Y2 (OSRAM) 1986-06-03 1986-06-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986085285U JPH0332863Y2 (OSRAM) 1986-06-03 1986-06-03

Publications (2)

Publication Number Publication Date
JPS62196973U JPS62196973U (OSRAM) 1987-12-15
JPH0332863Y2 true JPH0332863Y2 (OSRAM) 1991-07-11

Family

ID=30940552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986085285U Expired JPH0332863Y2 (OSRAM) 1986-06-03 1986-06-03

Country Status (1)

Country Link
JP (1) JPH0332863Y2 (OSRAM)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6122973U (ja) * 1984-07-13 1986-02-10 株式会社 小金井製作所 電子弁

Also Published As

Publication number Publication date
JPS62196973U (OSRAM) 1987-12-15

Similar Documents

Publication Publication Date Title
EP0831315A3 (en) Pressure sensor
US7819015B2 (en) Silicon carbide piezoresistive pressure transducer and method of fabrication
US7154372B2 (en) Micromechanical flow sensor with tensile coating
US4704306A (en) Method and mask for forming thin film
US5446616A (en) Electrode structure and method for anodically-bonded capacitive sensors
CN1092164A (zh) 高过压低量程压力传感器
EP1187234A3 (en) Piezoelectric/electrostrictive element
EP0825427A3 (en) Resonating structure and method for forming the resonating structure
JPH0332863Y2 (OSRAM)
JPH11195820A (ja) 圧電アクチエータ
EP0751374A3 (en) Vibrating gyroscope
JP2003522510A (ja) 圧電式アクチェータ
JPH073380B2 (ja) 集積化圧力センサ
JP2001260357A5 (OSRAM)
JP2003065819A (ja) 薄膜式センサ
EP0889349A3 (en) Acousto-optical device
JP2000214027A (ja) 半導体圧力センサ
JP2000315805A (ja) 歪み検出素子及び歪み検出素子製造方法
JPS62268167A (ja) 薄膜圧力センサ
JP4024368B2 (ja) 発熱型薄膜素子を備えたセンサ
JPH05231970A (ja) 薄膜体ブリッジ構造
JP2601141B2 (ja) 磁気抵抗素子
JP2024175234A (ja) センサ素子及びセンサ素子の製造方法
JP3079966B2 (ja) 加速度センサ
JP2003508923A (ja) 圧電曲げ変換器