JPH033281A - Metal vapor laser device - Google Patents
Metal vapor laser deviceInfo
- Publication number
- JPH033281A JPH033281A JP13633289A JP13633289A JPH033281A JP H033281 A JPH033281 A JP H033281A JP 13633289 A JP13633289 A JP 13633289A JP 13633289 A JP13633289 A JP 13633289A JP H033281 A JPH033281 A JP H033281A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- vessel
- discharge
- tube
- metal vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 title claims abstract description 31
- 239000012212 insulator Substances 0.000 abstract description 4
- 230000000694 effects Effects 0.000 description 3
- 230000005855 radiation Effects 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/031—Metal vapour lasers, e.g. metal vapour generation
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、ガス放電によって金属を加熱、気化および
励起させてレーザ出力を得る金属蒸気レーザ装置の放電
管構造に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a discharge tube structure for a metal vapor laser device that obtains laser output by heating, vaporizing, and exciting metal by gas discharge.
第３図は昭和５６年度レーザ研究第９巻第２号「銅蒸気
レーザーの製作」Ｃζ示された従来の金属蒸気レーザ装
置を示す断面図であり、図において、（１）は陰極端子
、（２］は陽極端子、＋３Ｊは陰極、（４）は陰極（３
目ζ対向する陽極、（５）は電極（３） 、 （４）間
に配置され、内部に放電が形成される内管、（６）はこ
の内管（５）から径方向への熱伝導や対流ζこよる熱損
失を抑制するための絶縁物、（７）は真空部（６）を形
成するためのシール管、（８）はレーザ光を取り出す窓
、（９）はこれらを取り囲む金属外管、ＱＯは金属蒸気
を生成する金属粒、東は上記シール管（７）から径方向
への熱伝導や対流１ζよる熱損失を抑制するための真空
部、四は真空部（６）の内部番ζあり、上記シール管（
７）からの熱放射による熱損失を抑制する複数の金属板
、□は金属板を支持するスポット溶接で構成した金属ス
ペーサ、Ｑ４は陰極フランジ、μｓは放電を起すために
注入されている放電ガスである。Figure 3 is a sectional view showing a conventional metal vapor laser device shown in 1981 Laser Research Vol. 2] is the anode terminal, +3J is the cathode, (4) is the cathode (3
(5) is an inner tube placed between the electrodes (3) and (4), in which a discharge is formed; (6) is heat conduction from this inner tube (5) in the radial direction; (7) is a seal tube to form a vacuum section (6), (8) is a window for extracting laser light, and (9) is a metal surrounding these. The outer tube, QO, is the metal grain that generates metal vapor, the east is the vacuum part for suppressing heat conduction in the radial direction from the seal tube (7) and heat loss due to convection 1ζ, and the fourth is the vacuum part (6). Internal number ζ available, above sealed tube (
7) Multiple metal plates to suppress heat loss due to heat radiation from □, metal spacer made by spot welding to support the metal plates, Q4 is the cathode flange, μs is the discharge gas injected to cause discharge It is.
次に動作について説明する。Next, the operation will be explained.
陰極端子（１）と陽極端子（２］より各々陰極フランジ
（４）と金属外管（９）を通して陰極（３）と陽極（４
ンの間にパルス電圧が印加されると、放電ガス（７）雰
囲気中の陰極（３）と陽極（４）との間にパルス放電が
発生し、内管（５）の内部に放電が形成される。次いで
、放電ｆこより発生した熱は、内管（５）に伝導し、内
情（６）を伝り囲む絶縁物（６）、真空部Ｑυ、金属板
（転）、金属スペ−サ（１３１こより径方向への熱の対
流、伝導、放射による熱損失を極力抑えることで、内管
（６）の温度を上昇させる。温度が上昇すると、内管（
５）内部に設定した金属粒ＣＩＱを溶融して、レーザ発
振を起こすのに必要な金属蒸気を得る。この状態におい
て、パルス電圧により、金属蒸気が励起され、反転分布
を起こし、光共振器（第３図には示されていない）を両
端の窓（８）の外側に設置すれば、窓（８）を遍してレ
ーザ光が得られる。The cathode (3) and anode (4) are connected to the cathode (3) and anode (4) through the cathode flange (4) and metal outer tube (9) from the cathode terminal (1) and anode terminal (2), respectively.
When a pulse voltage is applied between the two, a pulse discharge is generated between the cathode (3) and the anode (4) in the discharge gas (7) atmosphere, and a discharge is formed inside the inner tube (5). be done. Next, the heat generated by the discharge F is conducted to the inner tube (5), and is transmitted to the inner tube (6) and then to the surrounding insulator (6), the vacuum part Qυ, the metal plate (roller), and the metal spacer (131). The temperature of the inner tube (6) is increased by minimizing heat loss due to convection, conduction, and radiation in the radial direction.When the temperature rises, the inner tube (6)
5) Melt the metal grains CIQ set inside to obtain metal vapor necessary to cause laser oscillation. In this state, the metal vapor is excited by the pulse voltage, causing population inversion, and if an optical resonator (not shown in Figure 3) is installed outside the windows (8) at both ends, ) laser light is obtained.
従来の金属蒸気レーザ装置は以上のように構成されてい
るので、シール管（７）が加熱されることで放出ガスが
真空部四に発生し、真空部（ロ）内の真空度が低下する
ことにより、陰極フランジＱ４と金属外管（９）の間に
電圧を印加すると真空部東門に不正放電が発生する恐れ
があり、レーザ効率を低下させるといった問題点があっ
た。Since the conventional metal vapor laser device is configured as described above, when the seal tube (7) is heated, released gas is generated in the vacuum section (4), and the degree of vacuum in the vacuum section (B) decreases. As a result, when a voltage is applied between the cathode flange Q4 and the metal outer tube (9), there is a risk that an illegal discharge will occur at the east gate of the vacuum section, resulting in a problem of lowering laser efficiency.
この発明は上記のような問題点を解消するためになされ
たもので、真空部Ｑ時に電圧を発生させないようにして
不正放電を防ぎ、安定したレーザ出力の金属蒸気レーザ
装置を得ることを目的とする。This invention was made to solve the above-mentioned problems, and its purpose is to prevent voltage from being generated in the vacuum section Q to prevent unauthorized discharge and to obtain a metal vapor laser device with stable laser output. do.
この発明に係る金属蒸気レーザ装置は、放電部を形成す
る管の外周部に、少なくとも一方の電極から電気的に絶
縁された真空容器を設けたものである。The metal vapor laser device according to the present invention is provided with a vacuum vessel electrically insulated from at least one electrode on the outer periphery of a tube forming a discharge section.
この発明における金属蒸気レーザ装置では、内管の外周
部・ζ、少なくとも一方の電極から絶縁された真空容器
を設ける仁とにより、真空容器を設けることにより、真
空容器内の真空層に高電圧が印加されず、上記真空層で
の不正放電が起こらず、安定したレーザ出力が得られる
。In the metal vapor laser device of the present invention, by providing a vacuum container insulated from the outer periphery of the inner tube and at least one electrode, a high voltage is applied to the vacuum layer inside the vacuum container. No voltage is applied, no illegal discharge occurs in the vacuum layer, and stable laser output can be obtained.
以下、この発明の一実施例を図によって説明する。 Hereinafter, one embodiment of the present invention will be described with reference to the drawings.
第１図はこの発明の一実施例による金属蒸気レーザ装置
を示す断面図である。第１図曇ζおいて、ａＱは、陰極
（３）を支持する陰極フランジである。ｑηは、陽極（
４）を支持する陽極フランジである。Ｏｌは絶縁物（６
）の外周にあり、例えば金属の真空容器である。（至）
は、陽極（４）と陽極（４）と陽極７ランジｑηと真空
容器−を電気的につなぐ金属板である。FIG. 1 is a sectional view showing a metal vapor laser device according to an embodiment of the present invention. In FIG. 1 ζ, aQ is the cathode flange supporting the cathode (3). qη is the anode (
4) is an anode flange that supports. Ol is an insulator (6
), for example, a metal vacuum container. (To)
is a metal plate that electrically connects the anode (4), the anode 7 lunge qη, and the vacuum vessel.
上記のように構成された金属蒸気レーザ装置においては
、陰極フランジ韓、陽極フランジｑη、窓（８）と内管
（５）によって、放電部の気密が保たれている。また内
管（５）の外周に設けた絶縁物（６）の外周に真空容器
−を設けているが、例えば金属の真空容器−を金山板（
７）により陽極フランジ（ロ）と接続して、真空容器−
を電流の帰環回路に使用しても、＠１図に示されている
ように陰極側が真空容器ａ９と絶縁されているので、真
空容器内の真空層（６）は同電位になる。また、真空容
器ａＱは主放電と同軸状に設置されているから、電極管
のインダクタンスは極めて小さく＊流が流れることによ
り、真空容器−のインダクタンスの逆起電力士じた場合
でも、その大きさは非常に小さい。よって、真空層四を
不正放電防止のために高真空に維持する必要がなく、熱
伝導を防止するだけの真空度であれば良く、真空容器Ｑ
９が加熱され内部で放出ガスが発生しても、容器内の圧
力が数Ｔｏｒｒ以下であれば問題なく、例えば真空容器
を封じ切った場合でも長時間性能を損なうことはなく安
定したレーザ出力が得られるようになる。In the metal vapor laser device configured as described above, the discharge section is kept airtight by the cathode flange q, the anode flange qη, the window (8), and the inner tube (5). In addition, a vacuum container is provided on the outer periphery of the insulator (6) provided on the outer periphery of the inner tube (5).
7) to connect the anode flange (b) to the vacuum vessel.
Even if it is used in the current return circuit, the cathode side is insulated from the vacuum container a9 as shown in Figure @1, so the vacuum layer (6) in the vacuum container has the same potential. In addition, since the vacuum vessel aQ is installed coaxially with the main discharge, the inductance of the electrode tube is extremely small. is very small. Therefore, it is not necessary to maintain the vacuum layer 4 at a high vacuum to prevent unauthorized discharge, and the vacuum level only needs to be high enough to prevent heat conduction.
Even if the 9 is heated and released gas is generated inside, there is no problem as long as the pressure inside the container is below several Torr.For example, even if the vacuum container is completely sealed, the laser output will remain stable for a long time without any loss in performance. You will be able to get it.
第２図はこの発明の他の実施例に係る真空容器の形状を
示す断面図である。図における真空容器０９は実施例と
同様、内管の外周に少なくとも一方の電極から電気的に
絶縁されており、また、端部を曲げた真空容器である。FIG. 2 is a sectional view showing the shape of a vacuum container according to another embodiment of the invention. The vacuum container 09 in the figure is a vacuum container that is electrically insulated from at least one electrode on the outer periphery of the inner tube and has a bent end, as in the embodiment.
このようにすることで軸方向の熱伝導も防止することが
出来、断熱効率を上げることが出来る。By doing so, heat conduction in the axial direction can also be prevented, and the insulation efficiency can be increased.
なお、上記実施例では真空容器ａＱは金属製であり、電
流の帰環回路に使用しているが、帰環回路に使用せず、
ガラス製であっても良いことは言うまでもない。In addition, in the above embodiment, the vacuum container aQ is made of metal and is used for the current return circuit, but it is not used for the return circuit,
Needless to say, it may be made of glass.
以上のように、この発明によれば放電部を形成する管の
外周部に、少なくとも一方の電極から電気的に絶縁され
た真空容器を設けたので、真空容器内での不正放電が起
こることがなく、安定したレーザ出力を得ることが出来
る効果がある。As described above, according to the present invention, since a vacuum container electrically insulated from at least one electrode is provided around the outer circumference of the tube forming the discharge section, unauthorized discharge within the vacuum container is prevented. This has the effect of making it possible to obtain stable laser output.
第１図はこの発明の一実施例による金属蒸気レーザ装置
を示す断Ｆｔｎ図、第２図はこの発明の他の実施例によ
る金属レーザ装置を示す断面図、及び第３図は従来の金
属蒸気レーザ装置を示す断面図である。
図にわいて、（３）は陽極、（４）は陽極、（５Ｊは内
Ｗ、ｑυは真空層、０４は放電ガス、す９は真空容器で
ある。
なお、図中、１Ｆで一符号は同−又は相当部分を示しま
す。FIG. 1 is a sectional Ftn diagram showing a metal vapor laser device according to an embodiment of the present invention, FIG. 2 is a sectional view showing a metal vapor laser device according to another embodiment of the invention, and FIG. FIG. 2 is a cross-sectional view showing a laser device. In the figure, (3) is the anode, (4) is the anode, (5J is the inner W, qυ is the vacuum layer, 04 is the discharge gas, and 9 is the vacuum vessel. In the figure, 1F is the one symbol. indicates the same or equivalent part.
Claims (1)
た放電部を形成する管を有する金属蒸気レーザ装置にお
いて、上記管の外周部に、少なくとも一方の上記電極か
ら電気的に絶縁された真空容器を設けたことを特徴とす
る金属蒸気レーザ装置。In a metal vapor laser device having a pair of electrodes facing each other and a tube forming a discharge section filled with discharge gas between the electrodes, a vacuum electrically insulated from at least one of the electrodes is provided on the outer periphery of the tube. A metal vapor laser device characterized by being provided with a container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13633289A JPH033281A (en) | 1989-05-30 | 1989-05-30 | Metal vapor laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13633289A JPH033281A (en) | 1989-05-30 | 1989-05-30 | Metal vapor laser device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH033281A true JPH033281A (en) | 1991-01-09 |
Family
ID=15172746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13633289A Pending JPH033281A (en) | 1989-05-30 | 1989-05-30 | Metal vapor laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH033281A (en) |
-
1989
- 1989-05-30 JP JP13633289A patent/JPH033281A/en active Pending
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