JPH0332683U - - Google Patents
Info
- Publication number
- JPH0332683U JPH0332683U JP9213189U JP9213189U JPH0332683U JP H0332683 U JPH0332683 U JP H0332683U JP 9213189 U JP9213189 U JP 9213189U JP 9213189 U JP9213189 U JP 9213189U JP H0332683 U JPH0332683 U JP H0332683U
- Authority
- JP
- Japan
- Prior art keywords
- rotary table
- sponge brush
- drive motor
- rotated
- cleaning fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims 2
- 238000005201 scrubbing Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9213189U JPH0332683U (cs) | 1989-08-07 | 1989-08-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9213189U JPH0332683U (cs) | 1989-08-07 | 1989-08-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0332683U true JPH0332683U (cs) | 1991-03-29 |
Family
ID=31641574
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9213189U Pending JPH0332683U (cs) | 1989-08-07 | 1989-08-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0332683U (cs) |
-
1989
- 1989-08-07 JP JP9213189U patent/JPH0332683U/ja active Pending
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