JPH0332632B2 - - Google Patents
Info
- Publication number
- JPH0332632B2 JPH0332632B2 JP1294384A JP1294384A JPH0332632B2 JP H0332632 B2 JPH0332632 B2 JP H0332632B2 JP 1294384 A JP1294384 A JP 1294384A JP 1294384 A JP1294384 A JP 1294384A JP H0332632 B2 JPH0332632 B2 JP H0332632B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- valve
- etching
- strainer
- trap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 claims description 17
- 238000001312 dry etching Methods 0.000 claims description 11
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 5
- 229910052801 chlorine Inorganic materials 0.000 claims description 5
- 239000000460 chlorine Substances 0.000 claims description 5
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 3
- 229910052731 fluorine Inorganic materials 0.000 claims description 3
- 239000011737 fluorine Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 30
- 108010085603 SFLLRNPND Proteins 0.000 description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 239000007795 chemical reaction product Substances 0.000 description 6
- 239000011261 inert gas Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 238000010926 purge Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1294384A JPS60159178A (ja) | 1984-01-27 | 1984-01-27 | ドライエツチング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1294384A JPS60159178A (ja) | 1984-01-27 | 1984-01-27 | ドライエツチング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60159178A JPS60159178A (ja) | 1985-08-20 |
| JPH0332632B2 true JPH0332632B2 (enrdf_load_stackoverflow) | 1991-05-14 |
Family
ID=11819361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1294384A Granted JPS60159178A (ja) | 1984-01-27 | 1984-01-27 | ドライエツチング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60159178A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2574816Y2 (ja) * | 1990-07-09 | 1998-06-18 | 三菱電機株式会社 | 排ガス除害装置 |
| CN104480468A (zh) * | 2014-12-31 | 2015-04-01 | 深圳市华星光电技术有限公司 | 干式蚀刻机及用于捕集气体中磁性颗粒的捕集装置 |
-
1984
- 1984-01-27 JP JP1294384A patent/JPS60159178A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60159178A (ja) | 1985-08-20 |
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