Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Nippon Steel Corp
Original Assignee
Shin Etsu Chemical Co Ltd
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, Nippon Steel CorpfiledCriticalShin Etsu Chemical Co Ltd
Priority to EP87105719ApriorityCriticalpatent/EP0242818B1/en
Priority to DE8787105719Tprioritypatent/DE3780341D1/de
Priority to US07/041,249prioritypatent/US4794159A/en
Publication of JPS6399231ApublicationCriticalpatent/JPS6399231A/ja
Publication of JPH0331730B2publicationCriticalpatent/JPH0331730B2/ja