JPH0330257U - - Google Patents

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Publication number
JPH0330257U
JPH0330257U JP8824789U JP8824789U JPH0330257U JP H0330257 U JPH0330257 U JP H0330257U JP 8824789 U JP8824789 U JP 8824789U JP 8824789 U JP8824789 U JP 8824789U JP H0330257 U JPH0330257 U JP H0330257U
Authority
JP
Japan
Prior art keywords
slit
slit disk
viewing window
motor
vacuum device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8824789U
Other languages
English (en)
Other versions
JPH0638112Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8824789U priority Critical patent/JPH0638112Y2/ja
Publication of JPH0330257U publication Critical patent/JPH0330257U/ja
Application granted granted Critical
Publication of JPH0638112Y2 publication Critical patent/JPH0638112Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図及び第２図は夫々本考案の一実施例を示
す断面図、第３図は従来例を説明するための図、
第４図は第３図で使用されるスリツトの平面図で
ある。 １……真空室、２……覗き窓、３……スリツト
円板、４ａ乃至４ｈ……スリツト、１３……クラ
ツチ機構、１４……摩擦板、１５……移動棒、１
６……つまみ、１７……スプリング、１８……円
板。

Claims (1)

    【実用新案登録請求の範囲】
  1. 放射状に沿つて形成された多数のスリツトを同
    一円周上に配置したスリツト円板を透明材料で形
    成された覗き窓の真空側に設け、該スリツト円板
    をモータにて高速回転させることにより前記覗き
    窓及びスリツトを介して真空装置内を観察するよ
    うに構成した装置において、前記モータの駆動を
    停止したとき手動により前記スリツト円板を回転
    させるためのクラツチ機構を設けたことを特徴と
    する真空装置用覗き窓。
JP8824789U 1989-07-27 1989-07-27 真空装置用覗き窓 Expired - Lifetime JPH0638112Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8824789U JPH0638112Y2 (ja) 1989-07-27 1989-07-27 真空装置用覗き窓

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8824789U JPH0638112Y2 (ja) 1989-07-27 1989-07-27 真空装置用覗き窓

Publications (2)

Publication Number Publication Date
JPH0330257U true JPH0330257U (ja) 1991-03-25
JPH0638112Y2 JPH0638112Y2 (ja) 1994-10-05

Family

ID=31637871

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8824789U Expired - Lifetime JPH0638112Y2 (ja) 1989-07-27 1989-07-27 真空装置用覗き窓

Country Status (1)

Country Link
JP (1) JPH0638112Y2 (ja)

Also Published As

Publication number Publication date
JPH0638112Y2 (ja) 1994-10-05

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