JPH0329473B2 - - Google Patents
Info
- Publication number
- JPH0329473B2 JPH0329473B2 JP60080497A JP8049785A JPH0329473B2 JP H0329473 B2 JPH0329473 B2 JP H0329473B2 JP 60080497 A JP60080497 A JP 60080497A JP 8049785 A JP8049785 A JP 8049785A JP H0329473 B2 JPH0329473 B2 JP H0329473B2
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- temperature
- automatic production
- liquid
- robot mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Auxiliary Devices For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8049785A JPS61238383A (ja) | 1985-04-16 | 1985-04-16 | 恒温洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8049785A JPS61238383A (ja) | 1985-04-16 | 1985-04-16 | 恒温洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61238383A JPS61238383A (ja) | 1986-10-23 |
| JPH0329473B2 true JPH0329473B2 (enExample) | 1991-04-24 |
Family
ID=13719941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8049785A Granted JPS61238383A (ja) | 1985-04-16 | 1985-04-16 | 恒温洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61238383A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000012232A1 (en) * | 1998-08-28 | 2000-03-09 | Mitutoyo Corporation | Automatic washer for works before measurement and automatic production system equipped with the automatic washer |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0461975A (ja) * | 1990-06-26 | 1992-02-27 | Makino Milling Mach Co Ltd | ワーク洗浄装置 |
| JP5843233B2 (ja) * | 2011-11-10 | 2016-01-13 | 東芝機械株式会社 | 静圧空気軸受スピンドル装置およびこれを用いた工作機械 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5544780A (en) * | 1978-09-27 | 1980-03-29 | Toshiba Corp | Cleaning device for semiconductor wafer |
-
1985
- 1985-04-16 JP JP8049785A patent/JPS61238383A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000012232A1 (en) * | 1998-08-28 | 2000-03-09 | Mitutoyo Corporation | Automatic washer for works before measurement and automatic production system equipped with the automatic washer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61238383A (ja) | 1986-10-23 |
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