JPH0329178B2 - - Google Patents
Info
- Publication number
- JPH0329178B2 JPH0329178B2 JP10837884A JP10837884A JPH0329178B2 JP H0329178 B2 JPH0329178 B2 JP H0329178B2 JP 10837884 A JP10837884 A JP 10837884A JP 10837884 A JP10837884 A JP 10837884A JP H0329178 B2 JPH0329178 B2 JP H0329178B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- memory
- image signal
- signal
- binary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007547 defect Effects 0.000 claims description 20
- 238000007781 pre-processing Methods 0.000 claims description 11
- 238000007689 inspection Methods 0.000 claims description 10
- 238000003384 imaging method Methods 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 7
- 238000001514 detection method Methods 0.000 description 4
- 238000005286 illumination Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000013139 quantization Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59108378A JPS60253224A (ja) | 1984-05-30 | 1984-05-30 | パタ−ン検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59108378A JPS60253224A (ja) | 1984-05-30 | 1984-05-30 | パタ−ン検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60253224A JPS60253224A (ja) | 1985-12-13 |
| JPH0329178B2 true JPH0329178B2 (enrdf_load_stackoverflow) | 1991-04-23 |
Family
ID=14483248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59108378A Granted JPS60253224A (ja) | 1984-05-30 | 1984-05-30 | パタ−ン検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60253224A (enrdf_load_stackoverflow) |
-
1984
- 1984-05-30 JP JP59108378A patent/JPS60253224A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60253224A (ja) | 1985-12-13 |
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