JPH03291501A - Probe holder - Google Patents
Probe holderInfo
- Publication number
- JPH03291501A JPH03291501A JP9469890A JP9469890A JPH03291501A JP H03291501 A JPH03291501 A JP H03291501A JP 9469890 A JP9469890 A JP 9469890A JP 9469890 A JP9469890 A JP 9469890A JP H03291501 A JPH03291501 A JP H03291501A
- Authority
- JP
- Japan
- Prior art keywords
- probe
- conductor
- base
- heat
- probe holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 title claims abstract description 57
- 239000004020 conductor Substances 0.000 claims abstract description 21
- 229910052594 sapphire Inorganic materials 0.000 claims abstract description 6
- 239000010980 sapphire Substances 0.000 claims abstract description 6
- 239000000919 ceramic Substances 0.000 claims abstract description 5
- 230000000149 penetrating effect Effects 0.000 claims description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 abstract description 10
- 229910052697 platinum Inorganic materials 0.000 abstract description 4
- 239000000356 contaminant Substances 0.000 abstract description 3
- 238000003466 welding Methods 0.000 abstract description 2
- 238000010438 heat treatment Methods 0.000 description 10
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 238000011109 contamination Methods 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 238000002407 reforming Methods 0.000 description 2
- 241000270722 Crocodylidae Species 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- LNNWVNGFPYWNQE-GMIGKAJZSA-N desomorphine Chemical compound C1C2=CC=C(O)C3=C2[C@]24CCN(C)[C@H]1[C@@H]2CCC[C@@H]4O3 LNNWVNGFPYWNQE-GMIGKAJZSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、電界イオン顕微鏡（ＦＩＭ）や走査型トン
ネル顕微鏡（ＳＴＭ）等で使用される探針の保持具に関
する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a holder for a probe used in a field ion microscope (FIM), a scanning tunneling microscope (STM), and the like.
試料表面を原子レベルでとらえることの出来るＳＴＭや
ＦＩＭでは超高真空の空間に試料を設置する。ＦＩＭで
は鋭い針の先端が試料面であり、ＳＴＭでは先端を鋭敏
に尖らせた探針を平面状の試料面から数十人（オングス
トローム）まで近接させて観察する。探針は導電性がよ
いこと、耐熱性があること、加熱しても汚染原因となら
ないこと等の性質が要求される。この探針先端の加工法
としては機械加工による方法と電解研磨による方法とが
あるが、いずれにしても使用後先端部は汚染されるので
時々加熱により再形成処理しなければならない。従来の
処理法としては第４図に示すようにタングステン（Ｗ）
ヒータ１２を接近させたり、或いはベース１１を加熱さ
せて探針先端部から汚染物質を除去する方法が採られて
いた。また、探針を固定する探針保持具としては特に決
まったものは無く、大体第４図に示すようにステンレス
（ＳＵＳ）やモリブデン（Ｍｏ）或いはタンタル（Ｔａ
）製のベース１１に、タングステン（Ｗ）や白金（Ｐｔ
）或いはイリジウム（Ｉ ｒ）製の探針１３をスポット
溶接したものが使用されている。In STM and FIM, which can capture the surface of a sample at the atomic level, the sample is placed in an ultra-high vacuum. In FIM, the tip of a sharp needle is the sample surface, and in STM, a probe with a sharp tip is brought close to the planar sample surface to a distance of several tens of angstroms for observation. The probe is required to have properties such as good conductivity, heat resistance, and not causing contamination even when heated. Methods for processing the tip of the probe include mechanical processing and electrolytic polishing, but in either case, the tip becomes contaminated after use and must be reshaped by heating from time to time. As shown in Figure 4, the conventional treatment method is to use tungsten (W).
A method has been adopted in which contaminants are removed from the tip of the probe by bringing the heater 12 closer or by heating the base 11. In addition, there is no fixed probe holder for fixing the probe, and as shown in Figure 4, it is generally made of stainless steel (SUS), molybdenum (Mo), or tantalum (Ta).
) made of tungsten (W) or platinum (Pt).
) or a probe 13 made of iridium (Ir) spot welded is used.
探針は加熱処理、再形成等の繰り返しを要するが従来は
上記するように外部からヒーティングする方法が一般的
であった。しかし超高真空下で探針とは別に熱源を設け
、探針に熱源を接近させても肝心の探針先端は非常に先
鋭なため加熱効率が低くベースのみが加熱され、ベース
回りから不純ガスが発生して探針に付着し、却って探針
先端部が汚染され、探針再形成、清浄化するという目的
に反する結果となったり、或いは探針から直ぐに熱が奪
われなかなか加熱出来ないという問題があった。この発
明はかかる課題を解決するためになされたものである。Although the probe requires repeated heat treatment, re-formation, etc., the conventional method of heating from the outside as described above has been common. However, even if a heat source is provided separately from the probe under ultra-high vacuum and the heat source is brought close to the probe, the tip of the probe is extremely sharp, so heating efficiency is low and only the base is heated, resulting in impure gas coming from around the base. This may occur and adhere to the tip, contaminating the tip of the tip, which defeats the purpose of reforming and cleaning the tip, or heat is taken away from the tip immediately and it is difficult to heat it up. There was a problem. This invention has been made to solve this problem.
即ち、この発明は上記する課題を解決するために探針保
持具が、サファイヤ或いはセラミックで製作され中央部
に空間部を形成すると共に一端から他端に貫く穴を穿設
したベースと、前記ベースの穴に挿通され且つ該ベース
の空間部で曲折部を形成した導通体と、該導通体の曲折
部に固着された探針とより成ることを特徴とする。That is, in order to solve the above-mentioned problems, the present invention provides a probe holder that includes a base made of sapphire or ceramic, with a space formed in the center and a hole penetrating from one end to the other; It is characterized by comprising a conductive body that is inserted through the hole of the base and has a bent portion formed in the space of the base, and a probe that is fixed to the bent portion of the conductive body.
〔作 用〕
導通体に固着した探針を加熱、再形成する際該導通体の
両端部を電源につなぐと導通体自身が通電により加熱さ
れ、特にベースの中央部空間に形成した導通体の曲折部
には熱が溜まるので探針先端もよく加熱され清浄化する
ことが出来る。従ってこの探針保持具によれば最小限の
発熱体積で効率的な探針の加熱、形成処理を行うことが
出来る。[Function] When heating and reshaping the probe fixed to a conductor, if both ends of the conductor are connected to a power source, the conductor itself will be heated by electricity, and the conductor formed in the central space of the base will be heated. Since heat accumulates in the bent portion, the tip of the probe is well heated and can be cleaned. Therefore, with this probe holder, it is possible to efficiently heat and form the probe with a minimum heat generation volume.
またこの探針保持具自体はカートリッジとなるため取扱
や交換も容易である。Furthermore, since the probe holder itself is a cartridge, it is easy to handle and replace.
以下、この発明の具体的実施例について図面を参照して
説明する。Hereinafter, specific embodiments of the present invention will be described with reference to the drawings.
第１図はこの発明にがかる探針保持具の全体斜視図であ
る。１はベースであって材質としては耐熱性があり且つ
電気絶縁性の大きい物質、例えばサファイヤ、セラミッ
クで製作しである。このサファイヤ、セラミック等は高
温時にガスが出にくいことも好都合である。更に該ベー
ス１の中央部には空間部１ａが形成されている。FIG. 1 is an overall perspective view of a probe holder according to the present invention. Reference numeral 1 denotes a base, which is made of a material that is heat resistant and has high electrical insulation properties, such as sapphire or ceramic. Sapphire, ceramic, etc. are advantageous in that they do not easily generate gas at high temperatures. Furthermore, a space 1a is formed in the center of the base 1.
２は例えばφ０．３−−程度の導通体であって電気伝導
度が良く且つ耐熱型のあるタングステン（Ｗ）や白金（
Ｐ ｔ ）等で製作する。前記ベース１には一端から他
端に貫く穴が穿設され該導通体２が突き抜けるように嵌
挿されている。そして導通体２の両端部は後述する取付
台４に固定しやすくするため鍔部２ｂ、２Ｃを形成しで
ある（但し該鰐部２ｂ、２Ｃは必ずしも形成する必要は
ない）。2 is a conductor with a diameter of about 0.3 mm, for example, and has good electrical conductivity and heat resistance such as tungsten (W) or platinum (
Pt) etc. The base 1 has a hole penetrating it from one end to the other end, and the conductor 2 is inserted through the hole. Flange portions 2b and 2C are formed at both ends of the conductor 2 to facilitate fixation to a mounting base 4, which will be described later (however, the crocodile portions 2b and 2C are not necessarily required to be formed).
また、前記ベース１の空間部１ａでは導通体２を図のよ
うに曲げ、曲折部（ループ）２ａが形成されているがこ
れは該導通体２を加熱した時熱が溜ま・りやすくするた
めである。該導通体２０曲折部２ａにはタングステンや
白金製の探針３がスポット溶接により固着されている。In addition, in the space 1a of the base 1, the conductor 2 is bent as shown in the figure to form a bent part (loop) 2a, but this is to make it easier for heat to accumulate when the conductor 2 is heated. It is. A probe 3 made of tungsten or platinum is fixed to the bent portion 2a of the conductor 20 by spot welding.
この発明にかかる探針保持具の構成は以上のようである
が、次にその作用について説明する。The structure of the probe holder according to the present invention is as described above, and its operation will be explained next.
この探針保持具の導通体２に固着した探針３を加熱、再
形成する際該導通体２（タングステン線）の両端部の鍔
部２ｂ、２ｃにを電源につなぐと導通体２自身が通電に
より加熱され特にベースの中央部空間１ａに形成した導
通体２の曲折部２ａには熱が溜まるので探針３の先端も
よく加熱され汚染物質を飛ばして清浄化することが出来
る。When heating and reshaping the probe 3 fixed to the conductive body 2 of this probe holder, when the flanges 2b and 2c at both ends of the conductive body 2 (tungsten wire) are connected to a power source, the conductive body 2 itself Since the heat is heated by energization and accumulates especially in the bent portion 2a of the conductor 2 formed in the central space 1a of the base, the tip of the probe 3 is also well heated and contaminants can be blown off and cleaned.
従ってこの探針保持具によれば最小限の発熱体積で効率
的な探針の加熱、形成処理を行うことが出来る。またこ
の探針保持具自体はカートリッジとなるため取扱や交換
も容易である。Therefore, with this probe holder, it is possible to efficiently heat and form the probe with a minimum heat generation volume. Furthermore, since the probe holder itself is a cartridge, it is easy to handle and replace.
次にこの探針保持具を装着する取付台の具体例について
説明する。第２図は探針保持具を装着する取付台４の断
面図である。即ち、取付台４は中央部に溝４ａを穿設し
、更に該溝４ａの底面にも別の溝４ｂを穿設する。そし
て溝４ａの両側面から取付台４の上面にかけて板バネ５
が取付けてあり、また前記溝４ｂの底には電源６に連結
され導通体２の鍔部２ｃに接触させるための端子７が設
置されるでいる。一方、取付台４の上側には前記探針保
持具の導通体２の鍔部２ｂに接触させるための端子８が
設置されているが、該端子８も電源６に連結されている
（但し、スイッチ機構等は略しである）。また該端子８
は回転式として探針保持具を溝４ａに嵌めた後接触させ
るようにしても良い。第３図はこの発明にがかる探針保
持具を取付台４に装着した状態の斜視図である。このよ
うに探針保持具を取付台４に嵌め込み、スイッチ（図示
せず）を入れるだけで探針３の加熱、再形成処理が可能
となる。Next, a specific example of a mounting base for mounting this probe holder will be explained. FIG. 2 is a sectional view of the mounting base 4 on which the probe holder is mounted. That is, the mounting base 4 has a groove 4a formed in its center, and another groove 4b formed at the bottom of the groove 4a. Then, a leaf spring 5 is applied from both sides of the groove 4a to the top surface of the mounting base 4.
A terminal 7 connected to the power source 6 and brought into contact with the flange 2c of the conductor 2 is installed at the bottom of the groove 4b. On the other hand, a terminal 8 for contacting the flange 2b of the conductor 2 of the probe holder is installed on the upper side of the mounting base 4, and the terminal 8 is also connected to the power source 6 (however, (Switch mechanisms, etc. are omitted). Also, the terminal 8
Alternatively, the probe holder may be of a rotating type and brought into contact after being fitted into the groove 4a. FIG. 3 is a perspective view of the probe holder according to the present invention mounted on the mounting base 4. In this way, the probe 3 can be heated and reshaped simply by fitting the probe holder into the mounting base 4 and turning on a switch (not shown).
この発明にがかる探針保持具の一実施例は以上のようで
あるが、ベース１や導通体２或いは取付台４の形状は図
示例に限らず種々の変形が可能であることはいうまでも
ない。One embodiment of the probe holder according to the present invention has been described above, but it goes without saying that the shapes of the base 1, the conductor 2, and the mounting base 4 are not limited to the illustrated example and can be modified in various ways. do not have.
この発明にかかる探針保持具は以上詳述したような構成
としたので、真空室内に探針を加熱、再形成処理するた
めの別個の熱源を設置する必要はなくなり熱源自身によ
って探針を汚染させる危険性はなくなる。また、この発
明にかかる探針保持具は全体として高温加熱時ガスの発
生量が少なく汚染原因となることは殆どない。更にこの
探針保持具は加熱処理時の扱いが楽で且つ交換も簡単で
極めて便利である。Since the probe holder according to the present invention has the structure described in detail above, there is no need to install a separate heat source in the vacuum chamber for heating and reforming the probe, and the probe is not contaminated by the heat source itself. There is no danger of it happening. Further, the probe holder according to the present invention generates a small amount of gas as a whole when heated at high temperatures, and hardly causes contamination. Furthermore, this probe holder is easy to handle during heat treatment and easy to replace, making it extremely convenient.
第１図はこの発明にかかる探針保持具の全体斜視図、第
２図は探針保持具を装着する取付台の断面図、第３図は
この発明にがかる探針保持具を取付台に装着した状態の
斜視図、第４図は従来の探針保持具と探針加熱方法を示
す斜視図である。FIG. 1 is an overall perspective view of a probe holder according to the present invention, FIG. 2 is a cross-sectional view of a mounting base on which the probe holder is attached, and FIG. FIG. 4 is a perspective view showing a conventional probe holder and a probe heating method.
Claims (1)
を形成すると共に一端から他端に貫く穴を穿設したベー
スと、前記ベースの穴に挿通され且つ該ベースの空間部
で曲折部を形成した導通体と、該導通体の曲折部に固着
された探針とより成ることを特徴とする探針保持具。A base made of sapphire or ceramic and having a space in the center and a hole penetrating from one end to the other, and a conductor that is inserted into the hole in the base and has a bent part in the space in the base. A probe holder comprising: and a probe fixed to a bent portion of the conductor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2094698A JP2732470B2 (en) | 1990-04-09 | 1990-04-09 | Tip holder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2094698A JP2732470B2 (en) | 1990-04-09 | 1990-04-09 | Tip holder |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03291501A true JPH03291501A (en) | 1991-12-20 |
| JP2732470B2 JP2732470B2 (en) | 1998-03-30 |
Family
ID=14117401
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2094698A Expired - Lifetime JP2732470B2 (en) | 1990-04-09 | 1990-04-09 | Tip holder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2732470B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2453018A1 (en) | 2001-10-19 | 2012-05-16 | Sumitomo Chemical Company, Limited | A herbicide metabolizing protein, a gene thereof and use thereof |
-
1990
- 1990-04-09 JP JP2094698A patent/JP2732470B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2453018A1 (en) | 2001-10-19 | 2012-05-16 | Sumitomo Chemical Company, Limited | A herbicide metabolizing protein, a gene thereof and use thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2732470B2 (en) | 1998-03-30 |
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