JP2732470B2 - Tip holder - Google Patents
Tip holderInfo
- Publication number
- JP2732470B2 JP2732470B2 JP2094698A JP9469890A JP2732470B2 JP 2732470 B2 JP2732470 B2 JP 2732470B2 JP 2094698 A JP2094698 A JP 2094698A JP 9469890 A JP9469890 A JP 9469890A JP 2732470 B2 JP2732470 B2 JP 2732470B2
- Authority
- JP
- Japan
- Prior art keywords
- probe
- base
- conductor
- probe holder
- heated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measuring Leads Or Probes (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 この発明、電界イオン顕微鏡（FIM）や走査型トンネ
ル顕微鏡（STM）等で使用される探針の保持具に関す
る。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a probe holder used in a field ion microscope (FIM), a scanning tunneling microscope (STM), and the like.
試料表面を原子レベルでとらえることの出来るSTMやF
IMでは超高真空の空間に試料を設置する。FIMでは鋭い
針の先端が試料面であり、STMでは先端を鋭敏に尖らせ
た探針を平面状の試料面から数十Å（オングストロー
ム）まで近接させて観察する。探針は導電性がよいこ
と、耐熱性があること、加熱しても汚染原因とならない
こと等の性質が要求される。この探針先端の加工法とし
ては機械加工による方法と電界研磨による方法とがある
が、いずれにしても使用後先端部は汚染されるので時々
加熱により再形成処理しなければならない。従来の処理
法としては第４図に示すようにタングステン（Ｗ）ヒー
タ12を接近させたり、或いはベース11を加熱させて探針
先端部から汚染物質を除去する方法が採られていた。ま
た、探針を固定する探針保持具としては特に決まったも
のは無く、大体第４図に示すようにステンレス（SUS）
やモリブデン（Mo）或いはタンタル（Ta）製のベース11
に、タングステン（Ｗ）や白金（Pt）或いはイリジウム
（Ir）製の探針13をスポット溶接したものが使用されて
いる。STM and F that can capture the sample surface at the atomic level
In IM, a sample is placed in an ultrahigh vacuum space. In FIM, the tip of a sharp needle is the sample surface, and in STM, a sharply pointed tip is observed close to a few tens of angstroms (angstrom) from a flat sample surface. The probe is required to have properties such as good conductivity, heat resistance, and no contamination caused by heating. As a method of processing the tip of the probe, there are a method by mechanical processing and a method by electric field polishing. In any case, since the tip is contaminated after use, it must be reformed by heating sometimes. As a conventional processing method, as shown in FIG. 4, a method of removing a contaminant from the tip of the probe by approaching a tungsten (W) heater 12 or heating the base 11 has been adopted. There is no particular fixed probe holder for fixing the probe, and as shown in FIG. 4, stainless steel (SUS) is generally used.
Or molybdenum (Mo) or tantalum (Ta) base 11
A spot-welded probe 13 made of tungsten (W), platinum (Pt) or iridium (Ir) is used.
探針は加熱処理、再形成等の繰り返しを要するが従来
は上記するように外部からヒーティングする方法が一般
的であった。しかし超高真空下で探針とは別に熱源を設
け、探針に熱源を接近させても肝心の探針先端は非常に
先鋭なため加熱効率が低くベースのみが加熱され、ベー
ス回りから不純ガスが発生して探針に付着し、却って探
針先端部が汚染され、探針再形成、清浄化するという目
的に反する結果となったり、或いは探針から直ぐに熱が
奪われなかなか加熱出来ないという問題があった。この
発明はかかる課題を解決するためになされたものであ
る。The probe requires repetition of heat treatment, re-formation, etc., but conventionally, the method of heating from the outside as described above has been common. However, even if a heat source is provided separately from the probe under ultra-high vacuum, even if the heat source is brought close to the probe, the tip of the probe is extremely sharp, so the heating efficiency is low and only the base is heated, and the impurity gas from around the base Is generated and adheres to the probe, and the tip of the probe is contaminated instead, resulting in contrary to the purpose of reforming and cleaning the probe, or the fact that heat is quickly taken away from the probe and it is difficult to heat it There was a problem. The present invention has been made to solve such a problem.
即ち、この発明は上記する課題を解決するために探針
保持具が、サファイヤ或いはセラミックで製作され中央
部に空間部を形成すると共に一端から他端に貫く穴を穿
設したベースと、前記ベースの穴に挿通され且つ該ベー
スの空間部で曲折部を形成した導通体と、該導通体の曲
折部に固着された探針とより成ることを特徴とする。That is, in order to solve the above-mentioned problems, the present invention provides a base in which a probe holder is made of sapphire or ceramic, forms a space in a center portion, and has a hole formed from one end to the other end, and And a conductive member having a bent portion formed in the space of the base and a probe fixed to the bent portion of the conductive member.
導通体に固着した探針を加熱、再形成する際該導通体
の両端部を電源につなぐと導通体自身が通電により加熱
され、特にベースの中央部空間に形成した導通体の曲折
部には熱が溜まるので探針先端もよく加熱され清浄化す
ることが出来る。従ってこの探針保持具によれば最小限
の発熱体積で効率的な探針の加熱、形成処理を行うとが
出来る。またこの探針保持具自体はカートリッジとなる
ため取扱や交換も容易である。When the probe stuck to the conductor is heated and reformed, when the both ends of the conductor are connected to a power source, the conductor itself is heated by energization, and particularly in the bent portion of the conductor formed in the central space of the base. Since the heat accumulates, the tip of the probe is well heated and can be cleaned. Therefore, according to the probe holder, the probe can be efficiently heated and formed with a minimum heat generation volume. Further, since the probe holder itself becomes a cartridge, handling and replacement are easy.
以下、この発明の具体的実施例について図面を参照し
て説明する。Hereinafter, specific embodiments of the present invention will be described with reference to the drawings.
第１図はこの発明にかかる探針保持具の全体斜視図で
ある。１はベースであって材質としては耐熱性があり且
つ電気絶縁性の大きい物質、例えばサファイヤ、セラミ
ックで製作してある。このサファイヤ、セラミック等は
高温時にガスが出にくいことも好都合である。更に該ベ
ース１の中央部には空間部1aが形成されている。FIG. 1 is an overall perspective view of a probe holder according to the present invention. Reference numeral 1 denotes a base, which is made of a material having heat resistance and high electrical insulation, such as sapphire or ceramic. This sapphire, ceramic or the like is also advantageous in that gas does not easily come out at high temperatures. Further, a space 1a is formed in the center of the base 1.
２は例えばφ0.3mm程度の導通体であって電気伝導度
が良く且つ耐熱製のあるタングステン（Ｗ）や白金（P
t）等で製作する。前記ベース１には一端から他端に貫
く穴が穿設され該導通体２が突き抜けるように嵌挿され
ている。そして導通体２の両端部は後述する取付台４に
固定しやすくするため鍔部2b、2cを形成してある（但し
該鍔部2b、2cは必ずしも形成する必要はない）。また、
前記ベース１の空間部1aでは導通体２を図のように曲
げ、曲折部（ループ）2aが形成されているがこれは該導
通体２を加熱した時熱が溜まりやすくするためである。
該導通体２の曲折部2aにはタングステンや白金製の探針
３がスポット溶接により固着されている。Reference numeral 2 denotes a conductor having a diameter of, for example, about 0.3 mm, which has good electrical conductivity and is made of heat-resistant tungsten (W) or platinum (P
t) etc. A hole penetrating from one end to the other end is formed in the base 1, and the conductor 2 is fitted so as to penetrate therethrough. Both ends of the conductive body 2 are formed with flanges 2b and 2c for facilitating fixing to the mounting table 4 described later (however, the flanges 2b and 2c are not necessarily formed). Also,
In the space 1a of the base 1, the conductor 2 is bent as shown in the figure, and a bent portion (loop) 2a is formed. This is because heat is easily accumulated when the conductor 2 is heated.
A probe 3 made of tungsten or platinum is fixed to the bent portion 2a of the conductor 2 by spot welding.
この発明にかかる探針保持具の構成は以上のようであ
るが、次にその作用について説明する。The configuration of the probe holder according to the present invention is as described above. Next, the operation thereof will be described.
この探針保持具の導通体２に固着した探針３を加熱、
再形成する再該導通体２（ダンクステン線）の両端部の
鍔部2b、2cにを電源につなぐと導通体２自身が通電によ
り加熱され特にベースの中央部空間1aに形成した導通体
２の曲折部2aには熱が溜まるので探針３の先端もよく加
熱され汚染物質を飛ばして清浄化することが出来る。The probe 3 fixed to the conductor 2 of the probe holder is heated,
When the power supply is connected to the flanges 2b and 2c at both ends of the conductor 2 (Dunksten wire) to be reformed, the conductor 2 itself is heated by energization, and particularly the conductor 2 formed in the central space 1a of the base. Since heat accumulates in the bent portion 2a, the tip of the probe 3 is also heated well, so that contaminants can be blown off and cleaned.
従ってこの探針保持具によれば最小限の発熱体積で効
率的な探針の加熱、形成処理を行うことが出来る。また
この探針保持具自体はカートリッジとなるため取扱や交
換も容易である。Therefore, according to the probe holder, the probe can be efficiently heated and formed with a minimum heat generation volume. Further, since the probe holder itself becomes a cartridge, handling and replacement are easy.
次にこの探針保持具を装着する取付台の具体例につい
て説明する。第２図は探針保持具を装着する取付台４の
断面図である。即ち、取付台４は中央部に溝4aを穿設
し、更に該溝4aの底面にも別の溝4bを穿設する。そして
溝4aの両側面から取付台４の上面にかけて板バネ５が取
付けてあり、また前記溝4bの底には電源６に連結され導
通体２の鍔部2cに接触させるための端子７が設置されて
いる。一方、取付台４の上側には前記探針保持具の導通
体２の鍔部2bに接触させるための端子８が設置されてい
るが、該端子８も電源６に連結されている（但し、スイ
ッチ機構等は略してある）。また該端子８は回転式とし
て探針保持具を溝4aに嵌めた後接触させるようにしても
良い。第３図はこの発明にかかる探針保持具を取付台４
に装着した状態の斜視図である。このように探針保持具
を取付台４に嵌め込み、スイッチ（図示せず）を入れる
だけで探針３の加熱、再形成処理が可能となる。Next, a specific example of a mounting table on which the probe holder is mounted will be described. FIG. 2 is a sectional view of the mounting table 4 on which the probe holder is mounted. That is, the mounting base 4 has a groove 4a formed in the center, and another groove 4b is formed in the bottom of the groove 4a. A leaf spring 5 is attached from both side surfaces of the groove 4a to the upper surface of the mounting base 4, and a terminal 7 connected to a power source 6 and brought into contact with the flange 2c of the conductor 2 is provided at the bottom of the groove 4b. Have been. On the other hand, a terminal 8 for contacting the flange 2b of the conductor 2 of the probe holder is provided above the mounting table 4, and the terminal 8 is also connected to the power supply 6 (however, The switch mechanism and the like are omitted). Alternatively, the terminal 8 may be of a rotary type so that the probe holder is brought into contact after being fitted into the groove 4a. FIG. 3 shows the probe holder according to the present invention attached to the mounting base 4.
FIG. In this manner, the probe 3 can be heated and reformed simply by fitting the probe holder into the mount 4 and turning on a switch (not shown).
この発明にかかる探針保持具の一実施例は以上のよう
であるが、ベース１や導通体２或いは取付台４の形状は
図示例に限らず種々の変形が可能であることはいうまで
もない。One embodiment of the probe holder according to the present invention is as described above, but it goes without saying that the shape of the base 1, the conductor 2, or the mounting table 4 is not limited to the illustrated example, and various modifications are possible. Absent.
この発明にかかる探針保持具は以上詳述したような構
成としてので、真空室内に探針を加熱、再形成処理する
ための別個の熱源を設置する必要はなくなり熱源自身に
よって探針を汚染させる危険性はなくなる。また、この
発明にかかる探針保持具は全体として高温加熱時ガスの
発生量が少なく汚染原因となることは殆どない。更にこ
の探針保持具は加熱処理時の扱いが楽で且つ交換も簡単
で極めて便利である。Since the probe holder according to the present invention is configured as described above in detail, it is not necessary to provide a separate heat source for heating and reforming the probe in the vacuum chamber, and the probe is contaminated by the heat source itself. The danger is gone. Further, the probe holder according to the present invention generates a small amount of gas at the time of high-temperature heating as a whole and hardly causes contamination. Furthermore, the probe holder is very convenient because it is easy to handle during heat treatment and easy to replace.
第１図はこの発明にかかる探針保持具の全体斜視図、第
２図は探針保持具を装着する取付台の断面図、第３図は
この発明にかかる探針保持具を取付台に装着した状態の
斜視図、第４図は従来の探針保持具と探針加熱方法を示
す斜視図である。 １……ベース、２……導通体、３……探針、４……取付
台FIG. 1 is an overall perspective view of a probe holder according to the present invention, FIG. 2 is a cross-sectional view of a mount for mounting the probe holder, and FIG. FIG. 4 is a perspective view showing a conventional probe holder and a conventional method for heating the probe. DESCRIPTION OF SYMBOLS 1 ... Base, 2 ... Conductor, 3 ... Probe, 4 ... Mounting base
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｈ０１Ｊ 37/28 Ｈ０１Ｊ 37/28 Ｚ (72)発明者 西川 治 東京都目黒区東山２丁目16番１号410 (72)発明者 富取 正彦 神奈川県横浜市緑区美しが丘１丁目12番 20号 第３松美102 (56)参考文献 特開 平３−135701（ＪＰ，Ａ) 特開 平２−181601（ＪＰ，Ａ) 特開 平２−228503（ＪＰ，Ａ)──────────────────────────────────────────────────の Continuation of the front page (51) Int.Cl. 6 Identification number Agency reference number FI Technical indication location H01J 37/28 H01J 37/28 Z (72) Inventor Osamu Nishikawa 2--16 Higashiyama, Meguro-ku, Tokyo No. 1 410 (72) Inventor Masahiko Tomitori 1-12-20 Miyoshigaoka, Midori-ku, Yokohama-shi, Kanagawa Prefecture No. 3 Matsumi 102 (56) References JP-A-3-135701 (JP, A) JP-A-2-181601 (JP, A) JP-A-2-228503 (JP, A)
Claims (1)
央部に空間部を形成すると共に一端から他端に貫く穴を
穿設したベースと、前記ベースの穴に挿通され且つ該ベ
ースの空間部で曲折部を形成した導通体と、該導通体の
曲折部に固着された探針とより成ることを特徴とする探
針保持具。1. A base made of sapphire or ceramic and having a space formed in a central portion and having a hole penetrating from one end to the other end, and a bent portion inserted through the hole of the base and bent at the space of the base. And a probe fixed to the bent portion of the conductor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2094698A JP2732470B2 (en) | 1990-04-09 | 1990-04-09 | Tip holder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2094698A JP2732470B2 (en) | 1990-04-09 | 1990-04-09 | Tip holder |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03291501A JPH03291501A (en) | 1991-12-20 |
| JP2732470B2 true JP2732470B2 (en) | 1998-03-30 |
Family
ID=14117401
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2094698A Expired - Lifetime JP2732470B2 (en) | 1990-04-09 | 1990-04-09 | Tip holder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2732470B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2928061C (en) | 2001-10-19 | 2018-10-16 | Sumitomo Chemical Company, Limited | Weed controller metabolism proteins, genes thereof and use of the same |
-
1990
- 1990-04-09 JP JP2094698A patent/JP2732470B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03291501A (en) | 1991-12-20 |
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