JPH06241715A - Sample heating device for microscope - Google Patents
Sample heating device for microscopeInfo
- Publication number
- JPH06241715A JPH06241715A JP5049968A JP4996893A JPH06241715A JP H06241715 A JPH06241715 A JP H06241715A JP 5049968 A JP5049968 A JP 5049968A JP 4996893 A JP4996893 A JP 4996893A JP H06241715 A JPH06241715 A JP H06241715A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- heated
- heating
- microscope
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Microscoopes, Condenser (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】 本発明は走査トンネル顕微鏡な
どで観察される試料を加熱する顕微鏡の試料加熱装置に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microscope sample heating apparatus for heating a sample observed by a scanning tunnel microscope or the like.
【０００２】[0002]
【従来の技術】 走査トンネル顕微鏡で観察される試料
の処理の１つに試料加熱がある。この試料加熱は、試料
のクリーニングと、加熱状態での試料の観察を目的とし
て行われる。試料の加熱方式としては、直接試料に電流
を流して加熱する通電加熱方式と、ヒータなどで試料を
間接的に加熱する傍熱方式とがある。2. Description of the Related Art One of the treatments of a sample observed by a scanning tunneling microscope is sample heating. This sample heating is performed for the purpose of cleaning the sample and observing the sample in a heated state. As a sample heating method, there are an electric heating method in which an electric current is directly applied to the sample to heat the sample, and an indirect heating method in which the sample is indirectly heated by a heater or the like.
【０００３】[0003]
【発明が解決しようとする課題】 前記通電加熱方式を
採用した試料装置を使用すれば、試料を比較的高温に加
熱することができるので、試料のクリーニングを良好に
行なうことができる。しかし、加熱状態の試料を観察す
るために試料に電流を流すと、試料の表面構造が変化し
たり、また、試料を均一の電位に保つことができなくな
る。このため、加熱状態の試料を良好に観察することが
できない。When the sample apparatus adopting the electric heating method is used, the sample can be heated to a relatively high temperature, so that the sample can be cleaned well. However, when an electric current is applied to the sample in order to observe the sample in a heated state, the surface structure of the sample is changed and the sample cannot be kept at a uniform potential. Therefore, the heated sample cannot be observed well.
【０００４】また、傍熱方式を採用した試料装置を採用
した試料ホルダを使用すれば、試料に電流を流さないの
で、電流を流すことによる影響を与えることなく試料を
観察することができる。しかし、傍熱方式においては試
料を高温に加熱することができないので、試料のクリー
ニングを十分に行なうことができない。If a sample holder that employs a sample device that employs the indirectly heated method is used, no current is applied to the sample, so that the sample can be observed without being affected by the application of the current. However, in the indirect heating method, the sample cannot be heated to a high temperature, so that the sample cannot be sufficiently cleaned.
【０００５】本発明はこのような点に鑑みて成されたも
ので、試料のクリーニングを良好に行なえ、且つ、加熱
状態の試料を良好に観察できる顕微鏡の試料加熱装置を
提供することにある。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a sample heating device for a microscope, which can clean a sample satisfactorily and can observe a heated sample satisfactorily.
【０００６】[0006]
【課題を解決するための手段】 本発明の顕微鏡の試料
加熱装置は、試料を保持するための手段と、該試料への
加熱電流の供給を制御するための手段と、前記試料の近
傍に配置された被加熱部材と、該被加熱部材への加熱を
制御するための手段と、前記被加熱部材と前記試料との
接触を制御するための手段とを備えている。A sample heating device for a microscope according to the present invention includes means for holding a sample, means for controlling supply of a heating current to the sample, and a device arranged near the sample. The heated member, means for controlling heating to the heated member, and means for controlling contact between the heated member and the sample.
【０００７】[0007]
【実施例】 以下、図面を参照して本発明を詳述する。
図１は走査トンネル顕微鏡に使用される試料加熱装置の
実施例を示したものである。図１（ａ）はその装置の断
面図を、図１（ｂ）は平面図を示したものである。The present invention will be described in detail below with reference to the drawings.
FIG. 1 shows an embodiment of a sample heating apparatus used in a scanning tunneling microscope. FIG. 1 (a) is a sectional view of the device, and FIG. 1 (b) is a plan view thereof.
【０００８】図において１は試料である。試料１は電極
２，２' に押さえ金具３，３' により固定されている。
４，４' は、押さえ金具３，３' を電極２，２' に固定
するためのビスである。電極２，２' は碍子５にビス
６，６' ，６''，６''' により固定されている。碍子５
の中央部には円筒状の溝が形成されており、この溝の底
部には円板状のバイメタル７が置かれ、その上に、傍熱
加熱体８が載置されている。８ａはヒータ部で、碍子８
ｂに巻き付けられたタングステン線などのヒータ線８ｃ
を加熱することによりヒータ部８ａは加熱される。図に
おいてはヒータ線を２層構造としたが、必要とする熱量
に応じて層数を変えてもよい。ヒータ線８ｃの巻き始め
と巻き終わりは電極９，９' にスポット溶接されてお
り、電極９，９' は碍子５にビス１０，１０' により固
定されている。１１はベースで、ベース１１は碍子５に
ビス１２，１２' により固定されている。１３はピン
で、この試料装置を走査トンネル顕微鏡の試料ホルダに
セットする時に掴む部分である。なお、図示していない
が、試料ステージには電極４，４' ，９，９' と接続さ
れる電極が設けられており、外部から通電可能な構造に
なっている。In the figure, 1 is a sample. The sample 1 is fixed to the electrodes 2 and 2 ′ by pressing metal fittings 3 and 3 ′ .
Reference numerals 4, 4 ′ are screws for fixing the pressing metal fittings 3, 3 ′ to the electrodes 2, 2 ′ . The electrodes 2, 2 ′ are fixed to the insulator 5 with screws 6, 6 ′ , 6 ″ , 6 ″ . Insulator 5
A cylindrical groove is formed in the center of the disk, a disk-shaped bimetal 7 is placed on the bottom of the groove, and an indirectly heated body 8 is placed on the disk. 8a is a heater part, and is an insulator 8
Heater wire 8c such as tungsten wire wound around b
The heater portion 8a is heated by heating the. Although the heater wire has a two-layer structure in the figure, the number of layers may be changed according to the required amount of heat. The winding end and beginning winding heater wire 8c 'are spot-welded to the electrode 9, 9' electrodes 9 are fixed by screws 10, 10 'in the insulator 5. Reference numeral 11 is a base, and the base 11 is fixed to the insulator 5 with screws 12, 12 ' . Reference numeral 13 is a pin, which is a portion to be gripped when the sample device is set in the sample holder of the scanning tunneling microscope. Although not shown, the sample stage is provided with electrodes connected to the electrodes 4, 4 ′ , 9, 9 ′, and has a structure capable of conducting electricity from the outside.
【０００９】次に、このような構成の装置の動作を説明
する。Next, the operation of the apparatus having such a configuration will be described.
【００１０】まず、試料をクリーニングする場合、電極
２，２' 間に電流を流し、試料１を通電加熱する。試料
１は通電加熱により高温に加熱され、試料１のクリーニ
ングが良好に行われる。この時、ヒータ部８ａは試料に
接触しておらず、試料は熱を放出することなく効率的に
加熱される。First, when cleaning the sample, an electric current is passed between the electrodes 2 and 2 ' , and the sample 1 is electrically heated. The sample 1 is heated to a high temperature by electric heating, and the sample 1 is well cleaned. At this time, the heater portion 8a is not in contact with the sample, and the sample is efficiently heated without releasing heat.
【００１１】次に、試料１を加熱状態で観察する場合、
電極９，９' に電流を流し、ヒータ線８ｃを加熱する。
その結果、ヒータ線８ｃの発熱によりヒータ部８ａが加
熱される。また、傍熱加熱体８の発熱により、それに接
触しているバイメタル７が加熱され、バイメタル７は図
に示すように湾曲する。このバイメタル７の湾曲によ
り、傍熱加熱体８が上方に持ち上げられ、ヒータ部８ａ
が試料１に接触する。この接触により試料１は効率的に
加熱され、加熱状態の試料を良好に観察することができ
る。Next, when observing the sample 1 in a heated state,
Flowing a current to the electrodes 9, 9 ', to heat the heater wire 8c.
As a result, the heater portion 8a is heated by the heat generated by the heater wire 8c. Further, the heat generated by the indirectly heated body 8 heats the bimetal 7 in contact therewith, and the bimetal 7 bends as shown in the figure. Due to the bending of the bimetal 7, the indirectly heated body 8 is lifted upward, and the heater portion 8a
Contacts sample 1. The sample 1 is efficiently heated by this contact, and the sample in the heated state can be observed well.
【００１２】以上、本発明の試料加熱装置を走査トンネ
ル顕微鏡に使用する場合について説明したが、本発明は
走査電子顕微鏡の試料加熱装置にも適用する事ができ
る。The case where the sample heating device of the present invention is used in the scanning tunneling microscope has been described above, but the present invention can also be applied to the sample heating device of a scanning electron microscope.
【００１３】[0013]
【発明の効果】 本発明の顕微鏡の試料加熱装置は、試
料を保持するための手段と、該試料への加熱電流の供給
を制御するための手段と、前記試料の近傍に配置された
被加熱部材と、該被加熱部材への加熱を制御するための
手段とを備えているので、試料をクリーニングする際に
は試料に電流を流し、また、試料を加熱した状態で観察
する際には前記被加熱部材により試料を加熱すれば、試
料のクリーニングおよび試料観察を良好に行なうことが
できる。また、前記被加熱部材と前記試料との接触を制
御するための手段を備えており、試料をクリーニングす
る際には被加熱部材を試料に接触しないように制御すれ
ば、試料を熱放出なく効率的に加熱することができ、ま
た、試料を被加熱部材により加熱する際には被加熱部材
が試料に接触するように制御すれば、試料を効率的に加
熱することができる。EFFECT OF THE INVENTION A sample heating device for a microscope according to the present invention comprises a means for holding a sample, a means for controlling the supply of a heating current to the sample, and a heated object arranged in the vicinity of the sample. Since a member and means for controlling heating to the member to be heated are provided, when cleaning the sample, an electric current is applied to the sample, and when observing the sample in a heated state, If the sample is heated by the member to be heated, cleaning of the sample and observation of the sample can be performed well. Further, a means for controlling contact between the heated member and the sample is provided, and if the heated member is controlled so as not to contact the sample when cleaning the sample, the sample does not release heat and the efficiency is improved. The sample can be heated efficiently, and when the sample is heated by the member to be heated, the sample can be efficiently heated if the member to be heated is controlled so as to contact the sample.
【図１】本発明の顕微鏡の試料加熱装置の実施例を示し
たものである。FIG. 1 shows an embodiment of a sample heating device for a microscope of the present invention.
１ 試料 ２，２' 電極 ３，３' 押さえ金具 ４，４' ビス ５ 碍子 ６，６' ，６''，６''' ビス ７ バイメタル ８ 傍熱加熱体 ８ａ ヒータ部 ８ｂ 碍子 ８ｃ ヒータ線 ９，９' 電極 １０，１０' ビス １１ ベース １２，１２' ビス １３ ピン1 sample 2,2 ' electrode 3,3 ' press fitting 4,4 ' screw 5 insulator 6,6 ' , 6 '' , 6 ''' screw 7 bimetal 8 indirect heating element 8a heater part 8b insulator 8c heater wire 9 , 9 'electrodes 10 and 10' bis 11 base 12, 12 'bis 13 pins
Claims (1)
の加熱電流の供給を制御するための手段と、前記試料の
近傍に配置された被加熱部材と、該被加熱部材への加熱
を制御するための手段と、前記被加熱部材と前記試料と
の接触を制御するための手段とを備えた顕微鏡の試料加
熱装置。1. A means for holding a sample, a means for controlling the supply of a heating current to the sample, a heated member arranged in the vicinity of the sample, and heating to the heated member. And a means for controlling contact between the member to be heated and the sample, and a sample heating device for a microscope.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5049968A JP2994903B2 (en) | 1993-02-16 | 1993-02-16 | Microscope sample heating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5049968A JP2994903B2 (en) | 1993-02-16 | 1993-02-16 | Microscope sample heating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06241715A true JPH06241715A (en) | 1994-09-02 |
| JP2994903B2 JP2994903B2 (en) | 1999-12-27 |
Family
ID=12845829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5049968A Expired - Fee Related JP2994903B2 (en) | 1993-02-16 | 1993-02-16 | Microscope sample heating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2994903B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0989909A (en) * | 1995-09-20 | 1997-04-04 | Jeol Ltd | Holder receiver and sample holder |
| JPH1164348A (en) * | 1997-08-19 | 1999-03-05 | Jeol Ltd | Sample holder |
| CN106443075A (en) * | 2016-12-09 | 2017-02-22 | 南京大学 | Temperature control system and temperature control sample stage for atomic force microscope |
-
1993
- 1993-02-16 JP JP5049968A patent/JP2994903B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0989909A (en) * | 1995-09-20 | 1997-04-04 | Jeol Ltd | Holder receiver and sample holder |
| JPH1164348A (en) * | 1997-08-19 | 1999-03-05 | Jeol Ltd | Sample holder |
| CN106443075A (en) * | 2016-12-09 | 2017-02-22 | 南京大学 | Temperature control system and temperature control sample stage for atomic force microscope |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2994903B2 (en) | 1999-12-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19991005 |
|
| LAPS | Cancellation because of no payment of annual fees |