KR100545585B1 - Holder for test sample to be divided to 4 electrodes - Google Patents

Abstract

The present invention relates to a sample holder for facilitating sample processing such as metals and semiconductors in a high vacuum chamber, and more specifically, separated into four electrodes, the main body is made of stainless steel and ceramic material, and the sample attaching part is molybdenum. The present invention relates to a four-electrode separate type sample holder made of denium material and adapted to an experimental device using a spectroscopic microscope. Meanwhile, the present invention uses a tantalum plate and a molybdenum material for the holder to withstand up to about 3000 ° C. in heat treating the sample, and heat treatment by applying a current to the sample and dipolar separation for heat treatment of the semiconductor sample. The main body uses a highly insulating ceramic material to separate the two poles for producing an electron beam for the heat treatment of the sample that cannot be applied, and the latter two poles of the above four poles have a certain distance from the two poles of the sample attachment position. (E.g., 3 mm) and a sample holder that allows the electrode to be tethered to a tungsten filament to extrude an electron beam on the back of a metal sample.

Description

4-electrode separate sample holder {Holder for test sample to be divided to 4 electrodes}

1 is a perspective view of a four-electrode separate type sample holder according to the present invention,

2 is a perspective view of a sample holder housing according to the present invention;

3 shows an example of practical application in a vacuum chamber of a sample holder according to the invention,

4 is a perspective view of the sample holder according to the present invention assembled with other members,

5 and 6 is a practical application design of the sample holder according to the present invention,

7 to 15 are actual design drawings for each part of the sample holder according to the present invention.

<Description of the symbols for the main parts of the drawings>

1: holder wing 2: body

3: tap hole 4: housing

5 guide rail 6 enamelled wire

7: insulating ceramic 8: tungsten filament

9: tantalum plate attached to the sample 10: leaf spring

11: molybdenum 12: molybdenum screw

100: sample holder L, R, D, U: electrode member

The present invention relates to a sample holder for facilitating sample processing such as metals and semiconductors in a high vacuum chamber, and more specifically, separated into four electrodes, the main body is made of stainless steel and ceramic material, and the sample attaching part is molybdenum. The present invention relates to a four-electrode separate type sample holder made of denium material and adapted to an experimental device using a spectroscopic microscope.

As is well known to those skilled in the art, sample holders used for analysis in conventional photoelectron spectroscopy and other high vacuum are generally fixed to the manipulator holder for application to spectroscopic microscope experiments In this case, there was a difficulty in enabling sample processing of various functions (eg, heat treatment, voltage application, current application, etc.). Therefore, there is a need for developing a sample holder that has four independent electrodes capable of providing such a sample processing function and is quick and convenient to transport and mount. In particular, the invention of the sample holder to improve the position reproducibility is required when the sample is transferred to another chamber for sample processing in the high vacuum in order to measure the spectroscopic microscope.

Accordingly, the technical problem to be achieved by the present invention is to provide a sample holder capable of improving the position reproducibility of the sample when measuring the spectroscopic microscope in a high vacuum, and allowing the sample processing on the fly without moving to another chamber for sample processing. There is.

Another technical problem to be solved by the present invention is a sample using a low-cost stainless material and a stainless plate spring that can be used in high vacuum to improve the position reproducibility of the sample and to make the electrical contact and the position fixation of the housing elastic. To provide a holder.

Another technical problem to be solved by the present invention is to use a tantalum plate and a molybdenum material for the sample attaching part so that the holder can withstand up to about 3000 ° C. in heat treatment of the sample, The main body uses a highly insulating ceramic material, and the latter two poles are attached to the sample to separate the two poles for generating an electron beam for the heat treatment of the sample that cannot be heat-treated by direct current flow. It is to provide a sample holder which is located a certain distance (for example 3mm) behind the two poles of the position to hang the electrode on the tungsten filament to shed the electron beam on the back of the metal sample.

In order to achieve the above technical problem, the present invention is a sample holder mounted on a high vacuum spectroscopic microscope chamber for facilitating sample processing such as metal or semiconductor, the sample member is attached; Four electrode members separated into four to be individually supplied with power; And a holder wing and a leaf spring for improving electrical contact, earthquake resistance, and positional reproducibility of the respective electrode members.

In a preferred embodiment of the present invention, the sample holder further comprises a housing which is inserted or separated for processing various samples in a vacuum, the housing being made of stainless material.

In a preferred embodiment of the present invention, a hole is formed in the sample holder to confirm the alignment of the probe light source without detachment of the sample holder.

In a preferred embodiment of the present invention, the sample holder is made of ceramic, and the electrode member is made of stainless.

In a preferred embodiment of the present invention, a molybdenum member is mounted on the stainless electrode member, a tungsten filament is provided for facilitating heat treatment of the sample with an electron beam, and electrical contact and sample fixability and high temperature to the sample are provided. Tantalum plates are provided to improve durability.

Hereinafter, with reference to the accompanying drawings will be described in detail a preferred embodiment of the four-electrode separate type sample holder according to the present invention. In the following description of the present invention, when it is determined that detailed descriptions of related well-known technologies or configurations may unnecessarily obscure the subject matter of the present invention, the detailed description will be omitted. In addition, terms to be described below are terms defined in consideration of functions in the present invention, which may vary according to the intention or custom of a user or an operator. Therefore, the definition should be made based on the contents throughout the specification.

1 is a three-dimensional configuration of the assembled four-electrode separate sample holder 100 of the present invention. The sample holder 100 of FIG. 1 may be inserted / detached into the housing 4 of FIG. 2, and the housing 200 is also divided into four electrodes corresponding to the sample holder 100. 3 is an exemplary embodiment of a sample holder before being mounted in an actual high vacuum spectroscopic microscope chamber 300 and used in an experiment. A hole 13 having a diameter of about 10 mm in the center of the sample holder 100 is used to confirm the alignment of the probe light source without detachment of the sample holder 100.

5 shows a two-dimensional design drawing of the main body of the housing 4 according to the invention. The body of the housing 4 is designed to be made rigid using stainless material. FIG. 6 shows a view in which the stainless guide rail 5 is assembled for the stable mounting of the ceramic plate and the sample holder such that the four electrodes of the housing 4 are separated.

7 to 15 show the configuration for each part of the sample holder 100 of the present invention. Figure 7 shows a front view and a side view of the assembled sample holder 100 of the present invention. 8 to 14 show the configuration of the sample holder 100 in detail. 8 shows the main body 2 (FIG. 1) of the sample holder 100 made of ceramic. 9, 10, 11, and 12 each of the drawings made of stainless with the upper pole separation, the lower pole separation, the right pole separation, the left pole separation based on the front surface of the sample holder 100 is shown. FIG. 13 shows molybdenum member 11 (FIG. 4) to be attached to the left and right stainless, and FIG. 14 shows molybdenum member 11 (FIG. 4) to be attached to the upper and lower stainless. As shown, the left and right molybdenum members are designed to have a height of approximately 2.8 mm lower than the upper and lower sides so as to facilitate heat treatment of the metal sample by the electron beam using tungsten filament 8 (FIG. 4). FIG. 15 shows a tantalum plate 9 (FIG. 4) capable of providing good electrical contact to the sample at the front of the sample holder 100, fixing the sample, and being able to withstand high temperatures well.

Referring to the operation of the sample holder of the present invention shown in each of the drawings as described above are as follows.

As shown in FIGS. 1 to 4, the current and the voltage are applied to the enamelled wires 6 connected to the four electrode members L, R, D, and U outside the vacuum chamber 300. The applied current and voltage are respectively passed through the insulated guide rails 5 (FIG. 2) to the leaf springs 10 (FIG. 4) of the holder 100 separated by the four-electrode members L, R, D and U. Flow. The current and voltage flowing to each of the four-electrode members L, R, D, and U flows through the two-electrode member of the sample-attached tantalum plate 9 and the tungsten filament 8 and adheres to the tantalum plate 9. Supply the power for heat treatment.

For example, when a semiconductor sample is attached to both sides of the sample-attached tantalum plate 9 separated by two electrode members and subjected to heat treatment, when current is applied to the anode of the attached semiconductor, heat due to the resistance of the semiconductor sample itself is lost. Will occur. Heat treatment experiment is possible by adsorbing metal atoms, molecules, gas, etc. on the heated semiconductor.

In the case of metal, tungsten filament 8 is used for heat treatment. The sample is attached to the anode of the sample-attached tantalum plate 9, and unlike the semiconductor having a large resistance, the current flowing through the anode due to its small resistance requires a very large current. In order to overcome this difficulty, the sample may be heat-treated using an electron beam generated from the filament 8 by applying a large voltage and a small current to the tungsten filament 8.

The members 9, 11 and 12 to which the sample is attached all use tantalum and molybdenum materials that can withstand high temperatures (about 3000 ° C.).

The four-electrode separate sample holder according to the present invention as described above improves the positional reproducibility of the sample when measuring the spectroscopic microscope in a high vacuum, and enables the sample processing on the fly without moving to another chamber for sample processing. Provide an advantage.

In addition, the present invention has an excellent performance in the ease and robustness, heat resistance, positional reproducibility of sample processing in high vacuum when measuring the spectroscopic microscope provides an advantage that can greatly contribute to the study of semiconductor, new materials, etc. using the spectroscopic microscope.

Although a preferred embodiment of the present invention has been described in detail above, those skilled in the art to which the present invention pertains may make various changes without departing from the spirit and scope of the invention as defined in the appended claims. It will be appreciated that modifications or variations may be made. Therefore, changes in the future embodiments of the present invention will not be able to escape the technology of the present invention.

Claims (5)

In the sample holder to be mounted in a high vacuum spectroscopic microscope chamber to facilitate the processing of samples such as metal or semiconductor, A plate member to which a sample is attached; Four electrode members separated into four to be individually supplied with power; And And a holder wing and a leaf spring for improving electrical contact, earthquake resistance, and positional reproducibility of each electrode member. The method of claim 1, The sample holder further comprises a housing which is inserted or separated for processing various samples in a vacuum, The housing is a four-electrode separate sample holder, characterized in that made of stainless material. The method of claim 1, A four-electrode separate type sample holder, characterized in that a hole formed in the sample holder for confirming the alignment of the probe light source without detaching the sample holder. The method of claim 1, The sample holder is made of ceramic, the electrode member is a four-electrode separate sample holder, characterized in that made of stainless. The method of claim 4, wherein A molybdenum member is mounted on the stainless electrode member, a tungsten filament is provided to facilitate heat treatment of the sample by an electron beam, and a tantalum plate is provided to improve electrical contact with the sample, sample fixability, and high temperature durability. 4-electrode separate type sample holder, characterized in that.

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