JPH03287335A - Single crystal ingot posture adjusting device - Google Patents

Abstract

PURPOSE:To adjust the posture of a single crystal ingot without applying an unnatural force by providing X and Y stages, theta stage and phi stage rotating around axes parallel to the X and Y axes, and hands to hold the single crystal ingot to each stage. CONSTITUTION:In the X-Y-theta-phi stage 24, when a motor M5 is ON, the X stage 26 moves in the vertical direction on the paper surface to a base 25, and when a motor M6 is ON, a taper block 268 moves in the reverse direction to the left side and the right side each other, and at the same time, the Y stage 28 moves up and down in the direction of the arrow Y to the X stage 26. When a motor M7 is ON, the theta stage 30 rotates in the direction of the arrow theta making a pin 302 as the center, to the Y stage, and when a motor M8 is ON, the phistage 32 rotates in the direction of the arrow phi making a pin 322 as the center, to the theta stage 30. A wrist 204 is fixed to the phi stage 32. Hands 205 and 206 are driven in the reverse directions up and down each other at the same dis tance.

Description

[Detailed description of the invention] [Industrial application field]

The present invention relates to a single-crystal ingot posture adjusting device that adjusts the posture of a gripped single-crystal ingot when the single-crystal ingot is clamped by a peripheral surface grinding device.

[Conventional technology]

A single crystal ingot grown by the CZ method or the FZ method is made into a cylindrical shape through the following steps. (1) Both cone-shaped ends of the single crystal ingot are cut in a direction perpendicular to the axis to make the single crystal ingot into a substantially cylindrical shape. (2) Place the single crystal ingot on a cart and transport it manually.
An operator grips the single crystal ingot and holds the single crystal ingot on a rotating clamp shaft of a rotating device. The single crystal ingot is rotated by hand, and the worker's intuition determines the amount of deviation of the rotation center of the single crystal ingot from the rotation center of the rotating clamp shaft in order to maximize the diameter of the single crystal ingot after grinding. . The worker taps the circumferential surface of the i-crystal ingot with a hammer to eliminate this shift. (3) In this state, press the rotating clamp shaft even more strongly against the end face of the single crystal ingot. The single-crystal ingot is rotated, and a grindstone is pressed against the circumferential surface of the single-crystal ingot using a grindstone moving device, thereby grinding the single-crystal ingot into a cylindrical shape.

[Problem to be solved by the invention]

However, in the step (2) above, since the amount of deviation was determined by the operator's intuition, it was not possible to accurately match the two centers. For this reason, the shavings on the peripheral surface of the single crystal ingot became larger than necessary, resulting in waste. In order to automate this operation and make the matching accurate, a single-crystal ingot posture adjustment device is required that grips the single-crystal ingot with a pair of hands and adjusts the position of each hand. Therefore, the single-crystal ingot attitude adjustment device may be equipped with two X-Y stages that move each hand separately in the vertical plane. However, in this case, the width of the single crystal ingot attitude adjustment device becomes considerably wide. Further, the center of rotation for grinding the single crystal ingot cannot be precisely aligned with the center line of the rotation axis of the rotation clamp shaft of the ingot peripheral surface grinding device. In other words, two steps are required to make the grinding rotation center line parallel to the center line of the rotating clamp shaft, and two steps are required to align the rain center lines. In the operation for matching, even if the motors that drive each hand are turned on for the same amount of time, the rain center line cannot be matched accurately due to the difference in stopping accuracy of the two motors and the difference in mechanical dimensions of the two hands. I can't do it. Furthermore, when each hand is operated independently, unreasonable force is applied to the single crystal ingot. In view of these problems, an object of the present invention is to accurately adjust the posture of a single crystal ingot to a desired posture without applying excessive force to the single crystal ingot when clamping the single crystal ingot to a surface grinding device. An object of the present invention is to provide a single-crystal ingot posture adjustment device that can adjust the posture of a single-crystal ingot.

[Problem solving means and their effects]

In order to achieve this object, the single crystal ingot attitude adjustment device according to the present invention includes an X-Y-θ-φ stage, and a single-crystal ingot whose attitude is adjusted by being attached to the x-Y-θ-φ stage. It is equipped with a hand for grasping, and a. The X-Y-θ-φ stage moves in the X-axis direction.
a stage, a Y stage that moves in a Y-axis direction perpendicular to the X-axis, a θ stage that rotates around an axis parallel to the X-axis, and a φ stage that rotates around an axis parallel to the Y-axis. It is equipped with The present invention can reduce the width to half that of the device in which an X-Y stage is connected to each hand as described above, and
For example, the four mutually independent steps shown in FIG. 12 make it possible to accurately adjust the attitude of the single crystal ingot to a desired attitude. Furthermore, during this adjustment, no unreasonable force is applied to the single crystal inkotsut. The directions of the X-axis and Y-axis are determined by the single crystal ingot rotating device 46.
It is sufficient that the X-axis lies in a plane perpendicular to the direction of the rotation center line of the clamp rotation shafts 70A and 70B. Therefore, when the rotation center line is horizontal as usual, for example, the X-axis is horizontal and The direction is perpendicular to the center line of rotation, and the Y axis is perpendicular. The stages constituting the X-Y-θ-φ stage may be connected in any order; for example, the Y stage is attached to the X stage, the θ stage is attached to the Y stage, and the φ stage is attached to the Y stage. The node is attached to the φ stage, and the node is attached to the φ stage. Further, the operating mechanism of the Y stage relative to the X stage is configured as follows, for example. That is, the X
a feed screw that is connected to the stage and has a left male thread and a right male thread formed on one shaft; a pair of nuts that are screwed into each of the left male thread and the right male thread; and a pair of nuts that move integrally with the nut;
a pair of slide blocks having inclined surfaces that are non-parallel to the axial direction of the feed screw; and a pair of slide blocks fixed to the Y stage and having surfaces parallel to the inclined surfaces facing the inclined surfaces of the slide blocks. It has a fixed block and means for guiding the slide block along the inclined surface of the fixed block, and by rotating the feed screw, the distance between the X stage and the Y stage, which are parallel to each other, is changed. It is composed of

【Example】

Hereinafter, the present invention will be described in detail based on the drawings. (1) First Embodiment FIG. 1 shows a single crystal ingot conveying/periphery grinding device. A single crystal ingot 10 to be processed has both ends cut perpendicularly to the axial direction, so that it has a substantially cylindrical shape. This single crystal ingot 10 is mounted on a rotation center marker 12 by a transport robot (not shown). Rotation center marker 12
Measures the circumferential shape at multiple locations along the axial direction, and based on the measured shape, determines the center line of grinding rotation for making the single crystal ingot (10) into a cylindrical shape with the maximum diameter. Then, grinding center points MA and MB are marked at the intersections of this center line and both end faces of the single crystal ingot 10. This single crystal ingot 10 is
In the conveyor robot, the conveyor belt 1 of the conveyor 14
Support stands 142 attached at regular intervals on 41
(Fig. i4A). On the ceiling side of the factory, there are traveling rails 168 and 1 of the same shape.
6B are parallel to each other and perpendicular to the conveyor 14,
It is arranged. Single-crystal ingot transport/attitude adjustment devices 2OA and 20B having the same configuration are respectively attached to the traveling rails 16A and 16B so as to be freely movable along the traveling rails L6A and 16B. On the other hand, on the floor of the factory, single-crystal ingot peripheral surface grinding devices 221Δ to 225A and 221B to 225B, each having the same configuration, are arranged side by side at regular intervals along traveling rails 16A and 16B. The single crystal ingot transport/attitude adjustment device 2OA and the single crystal ingot peripheral surface grinding devices 221A to 225A can communicate via the communication line 18A. A communication line 1 is connected between the crystal ingot peripheral surface grinding devices 221B to 225B.
Communication is possible via 8B. Between the communication line 18A and the single crystal ingot conveyance/attitude adjustment device 2OA, and between the communication line 18B and the single crystal ingot conveyance/attitude adjustment device 20
B is magnetically coupled in a non-contact manner. Since the single crystal ingot transport/attitude adjustment devices 2OA and 20B operate in the same way, the single crystal ingot transport/attitude adjustment devices 20A and 20B operate in the same manner, so the following description will explain
Only the attitude adjustment device 2OA will be explained. The single-crystal ingot transport/attitude adjustment device 2OA transports the single-crystal ingot 10 on the conveyor 14 and supplies it to the single-crystal ingot peripheral surface grinding devices 221A to 225A, and the single-crystal ingot peripheral surface grinding bag! The single crystal ingot 11 ground into a cylindrical shape with f221A to f225A is transferred to the conveyor 14.
It is placed on a conveyor 23 arranged parallel to. FIG. 2 shows the transport processing procedure of the single crystal ingot transport/attitude adjustment device 2OA. (100) First, single crystal ingot peripheral surface grinding device 221
Since A to 225A do not have an object to be ground, the single crystal ingot conveyance/attitude adjustment device 20A is
The above single crystal ingot (10) is transported and supplied to these single crystal ingot peripheral surface grinding devices 221A to 225A. (102>Single crystal Inkotsuto peripheral surface grinding device 22iA (
When any one of i=1 to 5) finishes grinding and issues a grinding end signal, the single crystal ingot transport/attitude adjustment device 2O
A receives this and proceeds to the next step 104. (104) Single crystal ingot transport/position adjustment device [2OA
is the monocrystalline ingot surface grinding bag that is the source of the grinding end signal! Run up to 22iA. (106) Next, single crystal ingot peripheral surface grinding bag H22i
The cylindrical single crystal ingot 11 held at A is grasped and taken out from the single crystal ingot peripheral surface grinding bag H22i A. (108) Travel to the top of the conveyor 23 in the state shown in FIG. (110) Place the held cylindrical single crystal ingot 11 on the conveyor 23. (112) Next, it travels up to the top of the conveyor 14. (114) Grasp the single crystal ingot 10 on the conveyor 14 and lift it up. (116) Travels to above the monocrystalline ingot peripheral surface grinding bag H22rA, which is the source of the grinding end signal. (118) Lower the jll crystal ingot 1.0,
It is supplied to a single crystal ingot peripheral surface grinding device 221A. As a result, the single crystal ingot peripheral surface grinding device 22iA holds the single crystal ingot 10 and grinds the single crystal ingot 10.
The single crystal ingot 10 is made into a cylindrical shape by grinding the 0 curve. Here, the schematic configuration of the single crystal ingot conveyance/attitude adjustment device 2OA will be described based on FIG. 4A. This single crystal ingot conveyance/attitude adjustment device 2OA consists of components 201 to 207. The running section 201 is locked to the running rail 16A, and runs along the longitudinal direction of the running rail 16A by a motor M1. Further, the traveling section 201 drives a vertical arm 203 whose lower end is fixed to the upper end of the posture adjusting section 202 up and down using a motor M2. The vertical arm 203 and the traveling section 201 are connected by, for example, a rack and a pinion. At the bottom of the attitude adjustment unit 202 are two lists 2 with the same configuration.
04 is fixed, and hands 205 and 206 of the same configuration are attached to each of the wrists 204 and 204. The hands 205 and 206 are driven by torque motors M4 and M4 provided in each of the wrists 204 and 204 in vertically opposite directions by the same distance. For example, by rotating a vertically arranged feed screw with a right-hand thread on the upper part and a left-hand thread on the lower part with the torque motor M4, the hand 205 Move the .206 up and down. List 204.2
The reason why it is necessary to include torque motors M4 and M4 in each of the single crystal ingots 04 is because the diameter of the single crystal ingot 10 differs depending on its location. Note that the attitude adjustment section 2o2 is equipped with four motors for driving an X-Y-theta-phi stage 24 and an X-Y-theta-phi stage 24, which will be described later. Next, the details of the above step 114 are shown in FIGS. 3 and 4A-4.
This will be explained based on the 4G diagram. Initially, the single crystal ingot conveyance/attitude adjustment device 20A,
As shown in FIG. 4A, the posture adjustment section 202 is connected to the traveling section 201.
It is located on the side (upper limit). Also, hands 205 and 20
6 and I are as passionate about each other as possible. (200) In this state, the traveling section 201
2 is lowered to the level of the single crystal ingot 10 on the conveyor 14 and stopped in the state shown in FIG. 4B. (202) The conveyor belt 141 is moved two steps (the distance between the single crystal ingots 10 on the conveyor 14) to position the single crystal ingots 10 between the hands 205 and 206, as shown in FIG. 4C. (204) The wrist 204 turns on the torque motor M3 and moves the hands 205 and 206 toward each other, resulting in the state shown in FIG. 4D. Torque motor M3 remains on. (206) The traveling unit 201 moves the posture adjusting unit 202 upward to the upper limit and stops it in the state shown in FIG. 4E. As described above, the process of step 1 and step 4 shown in FIG. 2 is executed. The process of step 110 shown in FIG. 2 is executed by proceeding in the reverse direction from step 210 shown in FIG. 3 to step 200. Next, the single crystal ingot peripheral surface grinding device 221A shown in FIG. 1 will be explained based on FIGS. 5 to 7. The mechanical configuration of this single-crystal ingot peripheral surface grinding device 221A includes a separate single-crystal ingot rotating device 46 and a grindstone moving device 48. The grindstone moving device 48 has a well-known structure that moves the grindstone 49 back and forth and left and right with respect to the single crystal ingot 10 held and rotated by the single crystal ingot rotation device 46, and is omitted. The single crystal ingot rotating device 46 will be explained below. A leg plate 54A and two parallel rails 56 are fixed on a base plate 52 fixed on the base 50. A slider 58 is fitted onto the two rails 56, and the slider 58 is movable along the rails 56 in a direction perpendicular to the leg plate 54A. slider 58
A leg plate 54B is fixed on the top, facing the leg plate 54A. A hydraulic cylinder 60 is fixed on the leg plate 54B with its piston rod 62 parallel to the rail 56. The tip of the piston rod 62 is fixed to a stopper 64, a slider 65 is fixed to the lower surface of the stopper 64, and the slider 65 is fitted into the rail 56. The stopper 64 is
It is fixed to the rail 56 at any position along the rail 56 by a screw 66 threaded through it. As shown in FIG. 6, bearings 68A are fixed to both ends of a hole passing through the leg plate 54A, and a rotary clamp shaft is attached to the bearing 68A. OA is inset supported. Rotating clamp* [The tip of the h7OA is equipped with a rubber ring plate 7.
2A is attached. Rotating clamp shaft protruding to the outside of the leg plate 54A? A spur gear 74 is fitted into the base end of 0A. On the other hand, a motor 76 is fixed to the leg plate 54A via a bracket (not shown), and a spur gear 78 that meshes with the spur gear 74 is fitted onto a drive shaft 77 of the motor 76. Therefore, when the motor 76 is turned on, the rotating clamp shaft 70A rotates. Rotating clamp shaft? Rotating clamp shaft 7 is used for the shaft center of OA.
A through hole 79A is formed concentrically with 0A. Into the through hole 79A, the distal end side of a borescope 82A having a bearing 8OA fitted to its outer peripheral surface is inserted and supported. The borescope 82A includes a hard vibrator 821 whose proximal end is attached to a base 822, and a CCD camera 8 mounted on the base R822, facing an eyepiece 823 disposed within the base 822.
4A is fixed. This base portion 822 is supported by the lower leg plate 54A via a bracket (not shown). A light source 86A is fixed to the base end of the vibrator 821. Illumination light from the light source 86A passes through a light guide (optical fiber) 824 arranged on the inner peripheral surface of the vibrator 821, is led out from the tip of the borescope 82A, and illuminates the end face of the single crystal ingot 10. The reflected light from the end face of the single crystal ingot 10 passes through an objective lens 825 and a relay lens 826 arranged in a vibrator 821, and further passes through an eyepiece 823 to form an image on an image sensor (not shown) in a CCD camera 84A. be done. CCD camera 8
The video signal taken out from 4A is sent to monitor T for confirmation.
Supplied to V88A. Therefore, a grinding center point image NA corresponding to the grinding center point MA marked on the end face of the single crystal ingot 10 is displayed on the screen A of the monitor TV 88A. The XY orthogonal coordinates are also displayed on the monitor TV88A, and the intersection point is the optical axis of the borescope 82A and the rotating clamp axis?
It corresponds to the rotation center line of OA. FIG. 7 shows the configuration of the leg plate 54B side. This configuration is the same as that in FIG. 6 except that the rotating clamp shaft 70B rotates freely, and the same components are given the same numbers and A
B will be added instead of , and the explanation thereof will be omitted. In FIG. 5, since grinding debris and coolant are scattered during grinding, a slide cover (not shown) is provided to cover the upper surface and front surface between the leg plates 54A and 54B so as to be slidable along the longitudinal direction of the base plate 52. , and the leg plate 5
The grindstone 49 covers the back surface between 4A and 54B and passes through it.
The grindstone moving device 48 is equipped with a slide sheet (not shown) that moves together with the grindstone 9. As shown in FIG. displacement coordinates (△XA, △Y
A) and (ΔXm, ΔYB) are determined and supplied to the controller 92. FIG. 13(A) shows the grinding center point image N
These coordinates are shown for Δ and NB. The controller 92 controls the X stage 26 of the
, Y stage 28, θ stage 30 and φ stage 32
is driven to match the above-mentioned shift coordinates with the origin (0,0). The driver 94 and controller 92 are optically or magnetically coupled in a non-contact manner. Next, the configuration of the X-Yθ-φ stage 24 will be explained based on FIGS. 9 and 10. Figure 10 is A-A of Figure 9.
It is a line enlarged sectional view. Rails 251 are fixed to the base 25 on both sides of its lower surface in a direction perpendicular to the plane of the paper, and a feed screw 251 is fixed to the center of the lower surface.
52 is supported by a bearing (not shown) in a direction perpendicular to the plane of the paper, and is rotationally driven by a motor M5. On the other hand, a slider 261 into which the rail 251 is fitted is fixed to the upper surface of the X stage 26. Further, a nut 262 on which the feed screw 252 is screwed is fixed to the center of the upper surface of the X stage 26. Therefore, when motor M5 is turned on, X stage 2
6 moves relative to the base 25 in a direction perpendicular to the plane of FIG. Leg plates 264 are fixed to opposite sides of the lower surface of the X stage 26, and a feed screw 265 is rotatably supported by the leg plates 264. The feed screw 265 has a hand 2
Similar to the drive parts 05 and 206, the right male thread and the left male thread are formed symmetrically, and a nut 266 is screwed into both the male threads. This feed screw 265 is rotationally driven by a motor M6 fixed to the leg plate 264. The nut 266 is fixed to the center of the lower surface of the slide plate 267. A slider 269 is fixed to the upper side of the slide plate 267. This slider 269 is fitted into a rail 270 fixed to the lower surface of the X stage 26 in the left-right direction in FIG. A tapered block 268 is fixed to the lower side of the slide plate 267. A rail 271 is fixed to the lower surface (slanted surface) of the taper block 268,
The rail 271 is fitted into a guide 281 having the same shape as the slider 269, and the guide 281 is fixed to both sides of the upper surface of the Y stage 28 via a tapered block 282. Therefore, when the motor M6 is turned on, the taper blocks 268 move in opposite left and right directions, and at the same time, the Y stage 28 moves up and down in the direction of arrow Y with respect to the X stage 26. A connecting piece 283 is fixed to one end of the lower surface of the Y stage 28, and correspondingly a connecting piece 301 is fixed to one end of the upper surface of the θ stage 30, and a bottle 302 is passed through the connecting pieces 283 and 301. . A feed screw 303 is soldered at the other end of the θ stage 30, and a spur gear 304 is fitted to the base end of the feed screw 303.
is rotationally driven by a motor M7 fixed to the θ stage 30. The tip of the feed screw 303 presses against the horizontal portion of an L-shape 284 fixed to the side surface of the Y stage 28. Therefore, when motor M7 is turned on, θ stage 3
0 rotates in the direction of arrow θ with respect to the Y stage 28 about the pin 302. On the bottom surface of the θ stage 30, a worm wheel φ
The stage 32 is rotatably supported by a pin 322 via a spacer 321. A worm 323 supported by a bearing (not shown) is engaged with the φ stage 32, and this worm 323 is driven by a motor M8 fixed to the θ stage 30. Therefore, when motor M8 is turned on, φ stage 3
2 rotates relative to the θ stage 30 in the direction of the arrow φ about the pin 322. On the φ stage 32, there is a fourth AI! List 20 shown in
4 is fixed (not shown in FIG. 9). FIG. 11 shows the moving direction of the single crystal ingot 10 by the XY-θ-φ stage 24 as xSy, θ, and φ.
The rotation center of is parallel to the X axis, and the rotation center of φ is parallel to the Y axis. Next, based on FIG. 12 and FIG.
The attitude adjustment operation of the XY-θ-φ stage 24 that is operated with the stage 24 lowered will be described. Initially, the grinding center point images NA and NB are as shown in FIG. (300) In this state, ΔX
The φ stage 32 is rotated so that A=ΔXi. (Pin 302) Next, as shown in FIG. 13(C), ΔXA
The X stage 26 is moved so that =ΔX B =O. (Spur gear 304) Next, as shown in FIG. 13(D), ΔY
The θ stage 30 is rotated so that A=ΔYll. (306) Next, as shown in FIG. 13(E), ΔYA=Δ
The Y stage 28 is moved so that Y,=0. In this way, the grinding center points MA and MB are the rotational clamp axis? Accurately coincides with the rotation center line of OA and 70B. In this state, the hydraulic cylinder 60 is turned on to hold the single crystal ingot 10 between the rotating clamp shafts 7oΔ and 70B, the motor 76 is turned on and the single crystal ingot 10 is rotated, and the single crystal ingot is moved by the grindstone moving device 48. Grind the peripheral surface of No.10. As a result, a cylindrical single crystal ingot 11 having a maximum diameter can be obtained. (2) Second Embodiment FIG. 14 shows a single-crystal ingot conveyance/attitude adjustment device 20C according to a second embodiment. In this single crystal ingot transport/attitude adjustment device 2°C, a transport section 201A moves along a rail 16C laid on the floor. On the base plate 25 of the transport section 201A, there is an X-Y-θ-φ stage 2 having almost the same configuration as the x-Y-θφ stage 24 shown in FIG.
4A, and the same components are given the same reference numerals and their explanations will be omitted. On the φ stage 32, there is a fourth
The same wrist 204 as shown in FIG. 8 is fixed via the support 324, and the same hand 2 as shown in FIG.
06.207 protrudes above the page. This single crystal ingot transport/attitude adjustment device 20C does not have a vertical arm 203 as shown in FIG. 4A,
Y stage 28 plays the role of vertical arm 203. Other points are the same as the first embodiment. Note that the present invention includes various other modifications. For example, a single-crystal ingot attitude adjustment device with a single-crystal inch (7) transport/adjustment device 20C fixed on the floor as shown in FIG.
A loader for supplying the single crystal ingot 10 to the single crystal ingot attitude adjustment device is placed (at the bottom of the page), and the φ stage 32 is rotated 180 degrees to receive and take the single crystal ingot 10 from the loader. 180 degrees, move the X stage 26 upwards on the paper, and
The attitude of the single crystal ingot 10 may be adjusted in the state shown in the figure.

[Brief explanation of drawings]

1 to 13 relate to the first embodiment of the present invention, FIG. 1 is a perspective view showing a schematic configuration of a single-crystal ingot conveyance/peripheral surface grinding device, and FIG. 2 is a single-crystal ingot conveyance/position adjustment A general flowchart showing the processing procedure of the apparatus 2OA, FIG. 3 is a detailed flowchart of step 114 in FIG. 2, and FIGS. 4A to 4E are explanations of the operation of the single crystal ingot transport/attitude adjustment apparatus 2OA corresponding to FIG. 3. Figure, 51st! 1 is a perspective view of the single crystal ingot peripheral surface grinding device 221A, FIG. 6 is a partially sectional front view showing details of the vicinity of the leg plate 54A of FIG. 5, and FIG. 7 is a detailed view of the vicinity of the leg plate 54B of FIG. 5. A partially sectional front view, FIG. 8 is a schematic diagram of the grinding center positioning part of the single crystal ingot conveyance/periphery grinding device, FIG. 9 is a front view of the x-y-θ-φ stage 24, FIG. 10 is an enlarged sectional view taken along line A-A in Fig. 9. Fig. 11 is
A diagram showing the movement direction of the single crystal ingot 10 by the Y-θ-φ stage 24, FIG. 12 is a flowchart showing the processing procedure of grinding center positioning by the controller 92,
FIG. 13 is a diagram showing the positions of the grinding center point images NA and NB on the monitor screens A and B, corresponding to FIG. 12. FIG. 14 is a front view of a single-crystal ingot conveyance/attitude adjustment device according to a second embodiment of the present invention. In the figure, 10.11 is the single crystal ingot 12, the rotation center marker 14. 23 is the conveyor 16A, 16B, 16C is the running rail 20A, 20B, 20C is the single crystal ingot conveyance/attitude adjustment device 201. 201A is the running section 202 is the attitude Adjustment unit 203 is vertical arm 204, wrist 205, 206 is hand 22iA, 22iB (i=1 to 5) is single crystal ingot peripheral surface grinding device 24.24AitX-Y-θ-φ stage 251.27
0.271.56 is the rail 26 is the X stage 261.269.323.58.65 is the slider 262.266 is the nut 252.265.303.324 is the feed screw 264.5
4A, 54B are leg plates 267, 304, spur gears 268, 282, taper block 28, Y stage 281, guide 30, θ stage 32, φ stage 323, worm 46, single crystal ingot rotating device 48, grindstone moving device 60, hydraulic Cylinder? OA, 70B are rotating clamp shafts 74, 78 are spur gears 76, M1 to M8 are motors 82A, 82B are borescopes 84A, 84B are CCD cameras 86A, 86B are light sources 88A, 88B are F-=-tar'rv Figure 2 Figure 16A Figure 4A Figure 16A Figure 8 ρ Figure 10 Figure 12 Monitor white side A Monitor self side B

Claims (1)

[Claims] 1) An X stage (26) that moves in the X-axis direction, and a Y-stage (28) that moves in the Y-axis direction perpendicular to the X-axis.
and a θ stage (
30) and a φ stage (32) that rotates around an axis parallel to the Y-axis; A single-crystal ingot attitude adjustment device comprising: a hand that is adjusted and grips a single-crystal ingot; 2) The apparatus according to claim 1, wherein the X-axis is horizontal and the Y-axis is vertical. 3), the Y stage (28) is connected to the X stage (26).
), the θ stage (30) is attached to the Y stage, the φ stage (32) is attached to the φ stage, and the hand is attached to the φ stage. The device according to item 2. 4) a feed screw that is pivotally supported by the X stage and has a left male thread and a right male thread formed on one shaft; a pair of nuts that are screwed into each of the left male thread and the right male thread; a pair of slide blocks that move integrally and have inclined surfaces that are non-parallel to the axial direction of the feed screw; and a pair of slide blocks that are fixed to the Y stage and have surfaces parallel to the inclined surfaces facing the inclined surfaces of the slide blocks. A pair of arranged fixed blocks and a means for guiding the slide block along the inclined surface of the fixed blocks, and by rotating the feed screw, the X
4. The apparatus according to claim 3, wherein the distance between the stage and the Y stage is changed.